Ulvac CRYO-U Series, Инструкция по эксплуатации

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CRYO-U
®
Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED 5-3
Table 5-1 Cryopump Temperature Indication (
When used at room temp. of 20
℃
)
Thermometer Suspended No-load running
MBS-C CRYO METER
(measures 15K cryopanel temp.
with chromel-AuFe thermocouple
（*1）
Indication
（*1）
Red LED lights up Green LED lights up
Temperature
conditions
280K and more 20K and lower
Hydrogen Vapor Pressure Gauge
(measures 15K cryopanel temp.)
Indication 0.35
±
0.02MPaG
－
0.09MPaG and less
Temperature
conditions
― 15K and lower
K thermocouple
(measures 80K shield temp.)
Indication 0mV
－ 7.0mV and less
Temperature
conditions
（*2）
293K 80K and lower
(*1) MBD CRYO-METER (OPTION) can display temperatures digitally.
(*2) The temperature of 80K shield refers to the temperature conversion table of the
thermocouple electromotive force.
If a cryopump is cooled down at higher vacuum pressure for a long time, the cryopump case
may dew. It may cause short-circuit if an electrical device is put under the cryopump. Be
careful about the operating condition of equipment, and surrounding safety.
our Information †
In case the radiation heat load is high, or the partial pressure of helium, neon or hydrogen gas
is 0.1Pa or more after rough pump be longer.
†
For Y
ing, the cooldown time will
compressor unit at
20K in your operating log.
5.5 N
®
cryopump system is able to pump inside the vacuum chamber.
Start as follows. Please keep your operating log regularly.
pump and open the roughing valve
３．
Record the cooldown time to reach 20K and the gas pressure of the
ormal Operation
After cooled down, the CRYO-U
１． Make sure that the 15K cryopanel has reached 20K or lower and the 80K shield has
reached 130K or lower. Then turn on the roughing
（
RV2
）
.
CAUTION