Ulvac C10T, Инструкция по эксплуатации

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Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 3-5
3.4 Connecting the Compressor Unit to the Cryopump
・ Read the handling notes in appendix C about the connection of the flexible hoses.
・ When connecting flexible hoses, always use two single open end spanners with width
across flat 26mm and 30mm.
・ Do not forcibly bend flexible hoses. They may be damaged and cause helium leakage.
・ Do not connect or disconnect self-sealing coupling frequently. It may cause gas leakage.
If there is a leakage, you may have to replace it with a new one according to the situation of
the occurrence of leakage. nce of leakage.
1
．
Remove all dust plugs and caps from the supply and return flexible hoses, compressor
and cryopump. Clean the self-sealing coupling flat rubber gasket to be free from dust
and metallic powder.
1
．
Remove all dust plugs and caps from the supply and return flexible hoses, compressor
and cryopump. Clean the self-sealing coupling flat rubber gasket to be free from dust
and metallic powder.
2
．
Connect the flexible hose from the compressor unit to the cryopump (See Figure 3-3) . 2
．
Connect the flexible hose from the compressor unit to the cryopump (See Figure 3-3) .
a. Connect the helium gas supply flexible hose to the helium gas supply connector
on the compressor. Connect the helium gas return flexible hose to the helium gas
return connector on the compressor.
a. Connect the helium gas supply flexible hose to the helium gas supply connector
on the compressor. Connect the helium gas return flexible hose to the helium gas
return connector on the compressor.
b. Connect the helium gas supply flexible hose to the helium gas supply connector
on the cryopump. Connect the helium gas return flexible hose to the helium gas
return connector on the cryopump.
b. Connect the helium gas supply flexible hose to the helium gas supply connector
on the cryopump. Connect the helium gas return flexible hose to the helium gas
return connector on the cryopump.
3. Check the helium gas pressure gauge for proper helium pressure. The standard helium
charge pressure is 1.73
±
0.04MPaG at 20°C
．
See Figure 3-3. If the indicated pressure
is higher than the specified value, allow a slight amount of helium gas to escape by
opening the gas charge valve very slowly . If the indicated pressure is lower than
specified value, add helium gas as described in section 6.2.
3. Check the helium gas pressure gauge for proper helium pressure. The standard helium
charge pressure is 1.73
±
0.04MPaG at 20°C
．
See Figure 3-3. If the indicated pressure
is higher than the specified value, allow a slight amount of helium gas to escape by
opening the gas charge valve very slowly . If the indicated pressure is lower than
specified value, add helium gas as described in section 6.2.
If there is a helium leakage please contact our customer service. If there is a helium leakage please contact our customer service.
CAUTION
When you use a flexible hose with length of 10m to 20m, chose the hose dedicated
to C10. If a standard hose of the same length is used, helium charge pressure will
be lower than required, inviting the need for charging helium gas.
CAUTION