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No.SK00-7200-EI-003-08 

 

 

 

 

AxTRAN 

 

MODEL ISX2 

 

EXTREME-HIGH VACUUM GAUGE 

 

INSTRUCTION MANUAL 

 

 

This manual is for ultra-high vacuum  gauges of serial 
numbers 00100 and higher.

 

 

Read this manual carefully before using this gauge and keep 
it at hand for immediate reference.

 

 

When used by Torr, the following conversion equations shall be used. 

1[Torr]=1.3332

×

10

2

 [Pa] 

1[Pa]=7.5006

×

10

-3

[Torr]

 

 

 

Components Division, 

ULVAC, Inc. 

2500 Hagisono, Chigasaki City, Kanagawa Prefecture, Japan 253-8543 

http://www.ulvac.co.jp/

Содержание AxTRAN ISX2

Страница 1: ...mbers 00100 and higher Read this manual carefully before using this gauge and keep it at hand for immediate reference When used by Torr the following conversion equations shall be used 1 Torr 1 3332 1...

Страница 2: ...I...

Страница 3: ...Safety Denotations Safety symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of...

Страница 4: ...environment Do not connect the sensor head to an environment where pressure exceeds atmospheric pressure If the pressure in the sensor head exceeds atmospheric pressure the sensor head will be damaged...

Страница 5: ...n repacking When shipping the gauge repack it in the same way as on delivery It is shipped bare it may be damaged Maintenance Aluminum electrolytic capacitor and cooling fan are used for the electric...

Страница 6: ...lete Nov 13 2013 04 Sensor material Standard Accessories WARRANTY EC DECLARATION OF CONFORTMITY CERTIFICATE OF DECONTAMINATION added Oct 28 2016 05 Baking temperature added Initial setting Degassing T...

Страница 7: ...sensor head 11 5 FLOW OF PROGRAM RUN 13 6 STARTING UP GAUGE SUPPLY OF POWER 14 7 FRONT PANEL OPERATION 15 7 1 Filament ON OFF 15 7 1 1 When pressure protection is activated 16 7 2 Initialization 17 7...

Страница 8: ...nal 48 11 3 3 Control of filament 48 11 3 4 Control of degassing 48 11 3 5 Reading the gauge status 49 Setting sensitivity factor 49 11 3 7 Setting specific sensitivity factor 49 11 3 8 Setting and re...

Страница 9: ...Set point internal circuit 37 Input output connector pin assignment 39 Fig 10 2 Digital output internal circuit 40 Fig 10 3 Data valid signal strobe signal actuating chart 41 Fig 10 4 Data rewriting...

Страница 10: ...surement resolution of 0 5 10 10 Pa by reducing the residual current due to soft X rays and electron stimulated desorption ESD ions The unit consists of a sensor head cable and measuring unit The sens...

Страница 11: ...output a contact Contact capacity AC 125V max 0 5 A max Contact capacity DC 24 V max 1 0 A max Sensitivity factor setting function Sensitivity factor for nitrogen can be set Specific sensitivity fact...

Страница 12: ...mA Sensor head sensitivity 0 023 Pa 1 average value Baking temperature Sensor head 300 Ion collector cable 80 Sensor cable 150 2 3 Utilities Operating temperature range 10 to 40 C Power requirements...

Страница 13: ...y F1 Adjusts the offset of the measuring system Pressing the key selects the offset mode and returns to the normal measurement in about 3 minutes Program key PRG Switch to change over to the setting m...

Страница 14: ...ion SET 1 lamp SET1 Lit when set point 1 is activated SET 2 lamp SET2 Lit when set point 2 is activated Filament lamp Lit When the filament is ON and the emission current is normal Blink When the fila...

Страница 15: ...ont Panel Measurement Value Display Set Value Indicator Fig 3 3 Front panel measurement value display set value indicator Status Function When in the measurement mode Displays the pressure measurement...

Страница 16: ...nnector for output of set point and recorder output EXT I O D sub 9 pin socket connector for recorder output and set point output Digital I O and serial communication port by changing it with the opti...

Страница 17: ...or Fig 3 5 Set point recorder output connector pin assignment Terminal No Signal identification Terminal No Signal identification 1 REC OUT OUT PUT 6 REC OUT OUT PUT 2 SET1 OUT PUT 7 SET COMMON OUT PU...

Страница 18: ...witch for settings DIP switch No ON OFF 1 DC AMP 10 13 A DC AMP 10 14 A 2 Torr Pa 3 Not used Not used 4 Not used Not used 5 Not used Not used 6 Not used Not used 7 Not used Not used 8 Not used Not use...

Страница 19: ...he bottom panel in the controller is opened Name Inscription Function Grid line fuse F1 Inserted in the DEGAS line of the grid Protects the electric circuit in case the grid line is shorted by a load...

Страница 20: ...o a strong impact or vibration sideways when it is slackened by heat it may break or contact with the grid electrode 4 2 3 Connecting the controller and sensor head Connect the sensor head sensor head...

Страница 21: ...nected when there is a potential difference you may get electric shock The connectors on both ends of the sensor head cable are at the same potential as their ground Before connecting removing the cab...

Страница 22: ...et point 1 setting page 20 Set point 2 setting page 21 Sensitivity factor setting page 22 Specific sensitivity factor setting page 23 Degassing time setting page 24 Filament No selection page 25 Recor...

Страница 23: ...h on the front panel of the controller to feed power POW appears and setup is completed SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO The portion in the left figure lights 0 00 10 is displayed on...

Страница 24: ...mally the lamp above the FIL key lights and measurement starts MESU status If the filament is on but electron current is not flowing normally the lamp above the FIL key blinks SE T 2 SE T 1 0 1 I NT P...

Страница 25: ...e the following display will appear The recorder output is zero volt First adjust offset with the offset key If there is no change the pressure is below the measurable pressure SE T 2 SE T 1 0 1 I NT...

Страница 26: ...ad were inspected and calibrated in a pair 7 3 Offset See page 63 SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO OFS Adjusts the offset of the meter manually OFS is displayed during offset adjustm...

Страница 27: ...Degassing is feasible even before the set time elapses The set time count will be reset if degassing is turned off before elapse of the set time The recorder output is 10 V during degassing SE T 2 SE...

Страница 28: ...being set will not be retained The set values saved immediately before will be the set values CAUTION Inputs from the front panel are not feasible when in the REMOTE status Always reset them before i...

Страница 29: ...OFF SET PRO SET1 Each time the key is pressed the numeric value of the blinking portion changes Press the key when a desired value is displayed to transfer control to the SET1 status SE T 2 SE T 1 0...

Страница 30: ...DEG OFF SET PRO SET2 Each time the key is pressed the numeric value of the blinking portion changes Press the key when a desired value is displayed to transfer control to the SET1 status SE T 2 SE T...

Страница 31: ...umeric value of the blinking portion changes Press the key when a desired value is displayed to transfer control to the SENS status SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO SENS Each time th...

Страница 32: ...ges Press the key when a desired value is displayed to transfer control to the REL status SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO REL Each time the key is pressed the numeric value of the b...

Страница 33: ...ired value is displayed to transfer control to the DEGAS status SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO DEGAS Each time the key is pressed the numeric value of the blinking portion changes...

Страница 34: ...ol to the REC status To use filament 2 press the key with FIL _2 selected to transfer control to the REC status 8 7 Recorder Selection See page 33 If the setting is not changed press the key to transf...

Страница 35: ...AP The portion in the left figure blinks after the segment indicator displays FLt __ for about 1 second Each time the key is pressed the numeric value of the blinking portion changes FLt 00 FLt 01 FLt...

Страница 36: ...for about 1 second Each time the key is pressed the numeric value of the blinking portion changes OFS 00 OFS 01 OFS 02 OFS 06 OFS 12 OFS 24 OFS 00 cyclically Press the key when a desired value is disp...

Страница 37: ...ER F I L DEG OFF SET PRO BPS The portion in the left figure blinks after the segment indicator displays bPS __ for about 1 second Each time the key is pressed the numeric value of the blinking portion...

Страница 38: ...only in the front panel setting Input can be made from the front panel and through communication RS 232C The value set last is saved as the set value Example If 5 27 10 2 is set from the front panel a...

Страница 39: ...ugh the communication RS 232C The value entered last will be saved Example If 5 0 10 2 is set from the front panel and 3 00 10 5 is set later through the communication RS 232C the value set from the f...

Страница 40: ...communication RS 232C The degassing time set last is saved Example If 30 is set from the front panel and 50 is set through the communication later the value set from the front panel will be erased and...

Страница 41: ...e sensor head depends on the distance between the filaments grid and ion collector electrode The sensitivity differs slightly between filament 1 and filament 2 because the distance between filaments 1...

Страница 42: ...AS 10 00 V When offset OFS 10 00 V When initialized INT 10 00 V 9 5 3 LIN output An analog voltage of 0 to 10 V proportional to the mantissa part is outputted that is 0 00 V when the mantissa part of...

Страница 43: ...34 Fig 9 1 Recorder output graph linear Example of recorder output when pressure is rising Example of recorder output when pressure is lowering...

Страница 44: ...e value Pa Output voltage V 5 00 10 3 7 500 1 00 10 7 3 100 1 00 10 3 7 100 5 00 10 8 2 500 5 00 10 4 6 500 1 00 10 8 2 100 1 00 10 4 6 100 5 00 10 9 1 500 5 00 10 5 5 500 1 00 10 9 1 100 1 00 10 5 5...

Страница 45: ...0 1 sec interval LOG V 0 1 sec interval REC HOLD V 0 1 sec interval Place of 1 of mantissa part Place of 0 1 of the mantissa part Place of 0 01 of the mantissa part Place of exponent part Place of 0 0...

Страница 46: ...er COM a contact b contact is output per set point The contact capacity is AC 125 VMAX 0 5 AMAX DC 24 VMAX 1 0 AMAX However it is recommended to use it at below 24 VDC so as not to bring the noise sou...

Страница 47: ...ready possessed from a panel a board 2 Please install the harness which is attached to an option board on a board two places Install an attached spacer 3 Please insert the main body of option board fr...

Страница 48: ...ON VALID OK NG OUT PUT 36 PRESSURE DATA B b2 OUT PUT 12 DATA VALID OK NG OUT PUT 37 PRESSURE DATA B b3 OUT PUT 13 PRESSURE DATA OUT PUT 38 PRESSURE DATA C b0 OUT PUT 14 PRESSURE DATA C b3 OUT PUT 39 P...

Страница 49: ...ally output between pin 5 of the EXT I O connector and each signal line Internal 5V power Output signal Open collector 5 EXT OUT COM IS O GN D PH 4 GN D 23 48 D GND 24 49 A GND Fig 10 2 shows the digi...

Страница 50: ...4 Data rewriting time chart 1 Data are output at intervals of about 100 ms in which data are rewritten at intervals of 1 ms CAUTION If data are loaded during data rewriting DATA VALID Hi correct disp...

Страница 51: ...ime The Ton time is the transistor charge discharging time and the Toff time is the transistor charging time Therefore it varies with the load resistor connected to the open collector In order to term...

Страница 52: ...e 1 2 of HP3 shorting Refer to external control using the internal power supply Fig 10 7 and connect the ANALOG GND terminal or DIGITAL GND terminal 23 24 48 49 and each signal by means of a relay con...

Страница 53: ...roller power according to the line voltage on the controller side Referring to external control using the external power supply in Fig 10 8 connect the minus side GND of the power supply on the contro...

Страница 54: ...ch operation simultaneously If input simultaneously either operation may not be actuated Provide a time difference between actions Fig 10 9 Method of external control The filament can be protected wit...

Страница 55: ...e feed Japanese shift code KI 1A70 KO 1A71 Transmission distance 15 m 11 1 2 Baud rate setting Refer to 8 10 Baud Rate Setting It is factory set at 9600 bps 11 1 3 Communication cable connector The co...

Страница 56: ...AUTO mode time in XX minutes SE X XXE XX OK or NG Sets sensitivity factor SR X XX OK or NG Sets specific sensitivity factor R1 X XXE XX Reads data of setpoint 1 R2 X XXE XX Reads data of setpoint 2 S1...

Страница 57: ...K is sent back in response and if it is NG NG is sent back in response To turn ON the filament send F1 command If this setting is OK OK is sent back in response and if it is NG NG is sent back in resp...

Страница 58: ...reading the setpoint Command Parameter Response Data Explanation of function R1 X XXE XX Reads data of setpoint 1 R2 X XXE XX Reads data of setpoint 2 S1 X XXE XX OK or NG Sets setpoint 1 S2 X XXE XX...

Страница 59: ...30 60 or 90 To know the value of the set filter send T1 command In the case of 3 digit display the controller sends back XX in response to this inquiry In the absence of setting through communication...

Страница 60: ...lied The details of data are as follows Items 0 X1 Fil 2 1 Setting condition Fil2 Fil1 X2 Fil ON OFF OFF ON X3 Em Valid NG OK X4 DeGas ON OFF OFF ON X5 PROTECT Pressure protection OFF ON X6 SetPoint2...

Страница 61: ...uble from other items The power line in the controller is disconnected Disconnection or short has occurred in the power line in the controller inline filter wiring power switch transformer switching p...

Страница 62: ...ge 75 Note After checking the ion collector coaxial contact for insulation using a Megger short the points measured by the Megger to discharge the charge If it is reconnected without discharging the D...

Страница 63: ...O connector Reset REMOTE from the front panel Measured pressure differs largely from expected value Possible cause Corrective action Sensor head cable has blown out or insulation has failed resulting...

Страница 64: ...0 VAC Filament is turned ON above the measurable pressure range Check pressure using a Pirani gauge or other vacuum gauge If the pressure is too high gas cannot be ionized normally and the ion current...

Страница 65: ...sensor head with a new one Erroneous wiring or broken wire of the EXT I O connector Correct the wiring and check continuity using a circuit tester See page 39 Control operation from I O connector can...

Страница 66: ...ctrode to be connected is incorrect When relay contact input unit is used it is often the case that one side is connected to the power supply In this case connect the common side of the gauge to the m...

Страница 67: ...ing rewriting 1 ms Perform processing by DATA VALID signal See page 40 Communication cannot be established Possible cause Corrective action Cable specifications differ RS 232C cables include the strai...

Страница 68: ...a or less 2 The necessary electrode bias between the filament and the grid must be impressed 3 The temperature of the filament must be a necessary temperature 4 The surface area of the filament must b...

Страница 69: ...electrons emitted from the filament electron current Ie number of ions produced ion current Ii and density of gas molecules pressure P Ii k Ie P 1 Ii Ion current A k Sensitivity Pa 1 Ie Electron curre...

Страница 70: ...le water oxygen etc tend to emit a large amount of ESD ions while stable gases tend to emit a small amount of ions When a relatively active gas pressure is measured by a normal ion gauge in an ultra h...

Страница 71: ...d in the ion collector and the background signal by offset of the electron amplifier The background signal is measured by setting Vbe in the figure above to 150 V potential at which ions are not detec...

Страница 72: ...able and connector Especially humidity can be a cause of changing the electrical resistance value on the electrical board and the characteristics of the circuit itself The insulator PTFE used for the...

Страница 73: ...assume that the vacuum gauge corrected for nitrogen indicates P N2 when gas x is admitted into the vacuum layer Pressure P x of the actual gas x at this time is given by the following equation P x P...

Страница 74: ...1 30 0 17 146 70 SF6 2 50 2 41 Linear relationship holds between Srj and Xj and when Srj of the gas is unknown it can be predicted from Xj 200 80 Hg 3 30 1 04 2 07 0 04 16 10 CH4 1 58 1 63 0 30 30 18...

Страница 75: ...usly displays the software version and starts up this gauge SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO TEST Turning on power with both the key and key held down displays the figures at left Ex...

Страница 76: ...e local ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm and...

Страница 77: ...68 16 16BEC DECLARATION OF CONFORTMITY...

Страница 78: ...he product warranty period Table Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board Cha...

Страница 79: ...70 18 18BCERTIFICATE OF DECONTAMINATION...

Страница 80: ...71 19 19BRELATED DRAWINGS Fig 19 1 ISX2 compatible sensor heads...

Страница 81: ...72 Filament common Orange Filament 1 Yellow Filament 2 Blue Grid Green Vbe Red Vba White Fig 19 2 Sensor head electrode location...

Страница 82: ...73 Fig 19 3 Dimensional drawing...

Страница 83: ...are as shown above When screw holes are tapped in the panel the screw size is M5 or M4 If they are not tapped and fixed with nuts on the rear use 5mm dia or 4mm dia screws Fig 19 4 Vacuum gauge mount...

Страница 84: ...Pin No Signal identification Pin No Signal identification 1 FIL1 yellow A Vbe red 2 Vba white B Vba white 3 Vgf green C Vgf green 4 FIL COM orange D GND black 5 NC E FIL1 yellow 6 Vbe red F FIL2 blue...

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