28
6 Technical Data
Measurement principle
capacitive, independent of gas type
Measuring range
200 - 0.1 mbar (150 - 0.1 Torr)
Max. overload
6 bar abs.
Accuracy
0.25% f. scale end
(linearity, hysteresis, repeatability)
Materials in contact
with vacuum
stainl. steel 1.4305, Al
2
O
3
ceramic, FKM
Setting time
< 120 ms (10 ... 90%)
Operating temperature
5 ... 60
◦
C
Storage temperature
-40 ... +70
◦
C
Voltage supply
9 - 30 VDC
Power consumption
max. 0.6 W
Output signal
4 - 20 mA, linear
Electrical connection
M12 round type A-coded, 5-pole, male, lockable
Vacuum connection
small flange DN16 ISO KF
with G1/4 female thread
Protection class
IP 54
Weight
approx. 170 g
VCC200-4-20 mA-201126
Содержание SP363MV
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