51
7 Technical Data
Measurement principle
heat conduction Pirani,
depending on gas type
Measuring range
VSP: 1000 - 1.0x10
-4
mbar (750 - 1.0x10
-4
Torr)
VCP: 1000 - 5.0x10
-4
mbar (750 - 5.0x10
-4
Torr)
Max. overload
10 bar abs.
Accuracy
VSP:
1000 ... 20 mbar: approx. 30% f. reading
20 ... 2.0x10
-3
mbar: 10% f. reading
VCP:
1000 ... 10 mbar: approx. 30% f. reading
10 ... 1.0x10
-2
mbar: 10% f. reading
Repeatability
VSP: 20 ... 2.0x10
-3
mbar: 2% f. reading
VCP: 10 ... 1.0x10
-2
mbar: 5% f. reading
Materials in contact
with vacuum
VSP: stainl. steel 1.4307, tungsten, nickel, glass
VCP: stainl. steel 1.4307, platinum/rhodium,
nickel, glass
Reaction time
40 ms
Operating temperature
5 ... 60
◦
C
Storage temperature
-40 ... +65
◦
C
Bake-out temperature
max. 150
◦
C at the flange (voltage supply
switched-off)
Voltage supply
20 - 30 VDC
VSP/VCP-RS485-200116
Содержание B VSP63D
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