40
Readjustment via Software Command
See section 5.7.
4.4 Bake-Out
When a bake-out of the vacuum chamber is performed with the VSP/VCP being
mounted to the chamber, the temperature at the sensor flange must not exceed
150
◦
C.
The transducer’s voltage supply must be switched-off while the
chamber is heated. Otherwise a damage of the electronics can be
the result!
VSP/VCP-RS485-200116
Содержание B VSP63D
Страница 2: ......
Страница 24: ...24 VSP VCP RS485 200116...
Страница 27: ...27 8 Konformit tserkl rung VSP VCP RS485 200116...
Страница 28: ...28 VSP VCP RS485 200116...
Страница 50: ...50 VSP VCP RS485 200116...
Страница 53: ...53 8 Declaration of Conformity VSP VCP RS485 200116...
Страница 54: ...54 VSP VCP RS485 200116...
Страница 55: ...VSP VCP RS485 200116...
Страница 56: ...VSP VCP RS485 200116...