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Upgrade Equipment
Turbomolecular Pumps
396
ISQ 7000 Hardware Manual
Thermo Scientific
Turbomolecular Pumps
There are two types of turbomolecular pumps available — a standard capacity and an
extended capacity. We use low maintenance turbo pumps that should give you several years of
service. Consult your turbo pump documentation for recommended service intervals.
Installing a Standard Capacity Turbomolecular Pump
The standard capacity turbomolecular pump combines bladed turbomolecular stages with
molecular drag stages on the same rotor. This design allows for operation even with high
foreline pressures.
To replace or install a standard capacity turbomolecular pump
1. Shut down your system by following the steps in
“Shutting Down the ISQ System”
2. Use a T20 Torxhead screwdriver to loosen the top cover panel screws from the interior
front panel. Then lift the top cover panel off the instrument.
3. Use a T20 Torxhead screwdriver to remove the screw at each outside corner of the right
side panel.
4. Make sure the electrometer board cable is not in the way when you remove the power
supply system.
Figure 456.
Removing the Right Side Panel
Right Side Panel Screws
Содержание ISQ 7000
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