System overview: System capabilities
1-2
User Manual
C O N F I D E N T I A L –
limited rights
Feb 2018
Revision A
System capabilities
The Apreo is a Scanning Electron Microscope (SEM) that produces enlarged images of a variety of specimens,
achieving magnification over 100 000× and provides high resolution imaging in a digital format. The instrument
provides optimum throughput, resolution and automation.
This important and widely used analytical tool provides exceptional field of view, requires minimal specimen
preparation, and has the ability to combine the technique with X-ray microanalysis.
The instrument provide an expanded range of capabilities:
•
High-resolution electron beam images
•
High resolution elemental microanalysis of defect cross sections
•
Imaging of sample surfaces with the electron beam during navigation without erosion
System performance
The main instrument components used for imaging of the samples are:
•
Electron source
The beam of electrons (particles) is emitted within a small spatial volume with a small angular spread and
selectable energy.
•
Lens system
The beam enters the lens system consisting of several electromagnetic or electrostatic lenses and exits to hit
the specimen surface.
•
Scan unit
The scan generator signal, fed to the deflection systems, moves the beam in a raster pattern over the specimen
area. This signal, modulated by the detection system signal, produces the onscreen image of the specimen’s
surface.
•
Detection unit
Particles (electrons) striking the specimen react with atoms of the sample’s surface in various manners to
produce electrons and photons (X-rays).
The detector system picks up the particles or photons and converts them into a digital signal that is then sent to
the control PC and shown on the monitor.
