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Version 1.0 9/11 

 

 

 

SPI Supplies 

Plasma Prep III Plasma Cleaner 

Operation Manual 

 
 

 

 
 

SPI # 11055-AB  11055-AX 

 

Structure Probe, Inc. / SPI Supplies 

206 Garfield Ave. 

West Chester, PA 19380 

 

Toll-free from USA/Canada: 1-(800)-2424-SPI 

Phone: 1-(610)-436-5400 

FAX: 1-(610)-436-5755 

E-mail: 

[email protected]

Содержание plasma prep III

Страница 1: ...Prep III Plasma Cleaner Operation Manual SPI 11055 AB 11055 AX Structure Probe Inc SPI Supplies 206 Garfield Ave West Chester PA 19380 Toll free from USA Canada 1 800 2424 SPI Phone 1 610 436 5400 FAX 1 610 436 5755 E mail spi3spi 2spi com ...

Страница 2: ...400 FAX 1 610 436 5755 E mail spi3spi 2spi com For further information regarding any of the other products designed and manufactured by SPI Supplies contact your local representative or directly to SPI Supplies at the address above or visit www 2spi com Carbon and Sputter Coaters Osmium Plasma Coaters Ion Mills Plasma Reactor for ashing and etching High Vacuum Bench Top Evaporators Critical Point ...

Страница 3: ...fications or unreasonable operating procedures will void this warranty Disclaimer SPI Supplies instruments are designed for simplicity of installation and operation This manual provides full and complete information in both these areas SPI Supplies therefore assumes no liability or responsibility of any kind for damage or injury resulting from incorrect installation or operation of the machine If ...

Страница 4: ...al Section 4 General Description Identifies each of the equipment items and provides an overview of their functions and how they work Section 5 Installation Instructions on how this Instrument should be installed and the connections which should be made between the equipment items Section 6 Operation Instructions on how to start up and run the instrument Section 7 Maintenance Instructions on routi...

Страница 5: ...12 4 2 Typical Plasma Process 12 4 3 Technical Specifications 13 4 4 Equipment Controls and Indicators 14 4 4 1 Front Panel 14 4 4 2 Rear Panel 15 4 5 Equipment Description 16 4 5 1 RF Generator 16 4 5 2 Vacuum System 16 4 5 3 Gas Supply System 16 4 5 4 Reaction Chamber 16 Section 5 Installation 17 5 1 Site Requirements 17 5 2 Assembly 17 5 2 1 Installing the Outer Chamber 17 5 2 2 Engaging the TE...

Страница 6: ...Warning Symbols 8 Figure 2 2 Typical Warning Symbols 8 Figure 4 4 1 Front Panel 14 Figure 4 4 2 Rear Panel 15 Figure 5 2 1 Chamber Cross section 18 Table 8 1 Replacement Parts 25 Figure 9 1 Logic Flow Chart 26 Figure 9 2 Plasma Prep III Plasma Cleaner Chassis Wiring Diagram 27 Figure 9 3 Plasma Prep III Plasma Cleaner Control Panel Schematic 28 Figure 9 4 Plasma Prep III Plasma Cleaner RF Control ...

Страница 7: ...t on the equipment should only be undertaken by suitably qualified personnel SPI Supplies is not liable for any damage injury or consequential loss resulting from servicing by unqualified personnel SPI Supplies will also not be liable for damage injury or consequential loss resulting from incorrect operation of the instrument or customer modification of the instrument 2 2 Servicing 2 2 1 Disclaime...

Страница 8: ...ruction could result in injury or death to people CAUTION Cautions are given where failure to observe the instructions could result in damage to the equipment associated equipment and process Figure 2 1 Hazard Warning Symbols WARNING Do NOT depress button P as this will change the program Figure 2 2 Typical Warning sign as shown in this Manual ...

Страница 9: ...riate manner Use the correct tool for the job Keep a straight back and bend from the knees when lifting heavy objects Wear protective clothing when using liquid nitrogen Affix pressurised gas cylinders firmly to walls or racks Use the correct regulating valves on gas cylinders and always transport cylinders using the appropriate specialist trolley Obey safety regulations regarding lifts hoists and...

Страница 10: ... gas most commonly used in the Plasma Prep Plasma Cleaner is oxygen O2 NO OPEN FLAME and NO SMOKING signs should be posted near the instrument WARNING There are two micro switch interlocks engineered into the Plasma Prep III Plasma Cleaner to prevent injury to operating personnel They are A RF Shield Interlock This switch cuts off AC power to the RF power supply This ensures that the Plasma Prep I...

Страница 11: ...ch covers failure during the first 12 months after delivery Returns must be sent courier paid SPI Supplies will cover the return courier costs This covers defects which arise as a result of a failure in design or manufacturing It is a condition of warranty that equipment must be used in accordance with the manufacturers instructions and not have been subjected to misuse This warranty does not cove...

Страница 12: ...s discharge The TEM Specimen Stage and related material or specimen is loaded into the reaction chamber using the appropriate adapter The chamber is evacuated to a mild vacuum approximately 250 mTorr by a mechanical vacuum pump A carrier gas is drawn through the chamber over the specimen Radio frequency power is applied around the chamber at 13 56MHz This excites the carrier gas molecules and chan...

Страница 13: ...m Pump or Scroll Pump Vacuum Pump Requirements Vacuum Pump Capable of 50 100 liters min If using O2 or CF4 Fomblin oil is recommended Power 100 to 240 V AC 50 60 Hz 15 amp service Oil Mist Trap Please change element every 1 500 to 2 000 running hours NOTE This equipment complies with Title 47 Part 18 of the Federal Communications Commission Rules when operated as set forth in the accompanying inst...

Страница 14: ...t Button This button controls the venting of the chamber When lit the chamber is being vented When unlit the chamber is not being vented 4 RF Button This button turns the RF power generator on and off When lit the RF power is on When unlit the RF power is off 5 RF Level Dial This dial controls the intensity of the RF power being generated Turning the dial clockwise will increase the RF power Turni...

Страница 15: ...r Panel 10 Vacuum Inlet Flange for vacuum hose NW16 connected to the Plasma Prep III Plasma Cleaner 11 Gas Inlet Gas supply is connected to the Plasma Prep III Plasma Cleaner This is a barbed fitting for a standard tubing 12 Power Inlet and Fuses Main power cord connection to the Plasma Prep III Plasma Cleaner 13 Comm Port Communication Port to connect to the optional Plasma Prep III Process Contr...

Страница 16: ...ry system is a glass tube sealed on the inner end and perforated along its bottom surface Sliding the tubing over the barbed fittings on the glass chamber makes connections to the delivery tube 4 5 4 Reaction Chamber Reaction Chamber The reaction chamber sub system consists of an upper and lower electrode a Pyrex glass outer reaction chamber and a polymer adapter seal See Fig 2 1 NOTE For CF4 oper...

Страница 17: ... panel with retaining wires These should not be removed at this time B Remove the two nylon screws and spacing bushings on the left side and loosen the two nylon screws on the right side C Remove the outer chamber from its shipping container Make sure no packing material is in the chamber D Locate the exhaust manifold at the front center floor of the cabinet Loosen the brass compression nut to acc...

Страница 18: ...r with the adapter and ensure that the door latch is secure B Ensuring that the chamber adapter seal is seated against the outer chamber at the O ring release the wires retaining the adapter chamber seal and allow the seal to align to the outer chamber C Use the blanking plug to seal the chamber when not using a TEM Specimen Stage 5 2 3 Vacuum Pump Installation A Set the pump horizontally on the f...

Страница 19: ...e for various pumps please contact your SPI Supplies Representative CAUTION Be sure to keep the vacuum parts especially the O ring on the clamp center ring and everything it may contact clean and free from excessive moisture chips dust etc Also be sure not to damage the surface of them Chips or visible dust which enter the pump may cause mechanical failure Evacuating excessive moisture will not on...

Страница 20: ...s suggested 6 1 1 Initial Pump Down and Operation A Power switch should be OFF Red LED light will remain unlit The POWER LEVEL control dial should be turned completely counter clockwise B Start the vacuum pump Turn on the AC power by depressing the POWER button C Fit the BLANK adapter into the so that it is fully engaged and the o rings make a good seal D Turn on the vacuum by pressing the VACUUM ...

Страница 21: ...s power For most TEM Stage applications that are interested in the cleaning of TEM specimen stages this is more power than is needed Most operations are on the order of 10 watts though power as low as one watt can be achieved NOTE 2 Before the Plasma Prep III Plasma Cleaner is run for the first time allow the unit to run for one hour before use This will eliminate any contamination which might be ...

Страница 22: ... for multiple gas inputs either individually or mixed as well as allowing a process timing of an operation The Process Controller is placed on top of the Plasma Prep III Plasma Cleaner and is connected through the COMM port in the back of the system For complete instruction for installation and operation of the Process Controller please refer to the Plasma Prep III Process Controller manual ...

Страница 23: ...y become loose Similarly when replacing the from door adapter care should be used to ensure that the gasket is fully in contact with the outer chamber before latching the door Failure to do so may cause vacuum problems The gasket if in good condition may be lightly greased using an Apiezon grease In cases where no grease is desired the o rings can be run without using any grease but should be chan...

Страница 24: ... the needle clockwise or counter clockwise The chamber back fill to atmosphere is controlled by a bleed valve solenoid located on the left side of the chassis The adjustment is a setscrew Turning the setscrew clockwise closes the valve and increases the time to back fill the chamber to atmospheric pressure Turning the setscrew counter clockwise opens the valve and decreases the time to back fill t...

Страница 25: ...isted here please contact SPI Supplies SPI Part Number DESCRIPTION 11008 AB 4 ID Pyrex Inner Chamber 11009 AB 4 ID Pyrex Outer Chamber 11010 AB 4 ID O Ring 11013 AB Solenoid Valve Straight Thru 11014 AB Solenoid Valve Metering 11024 AB O Ring for Outer Chamber 11026 AB 4 ID Quartz Inner Chamber 11027 AB 4 ID Quartz Outer Chamber Table 8 1 Consumables and Replacement Parts ...

Страница 26: ...Version 1 0 9 11 9 TECHNICAL DIAGRAMS Figure 9 1 Logic Flow Chart ...

Страница 27: ...Version 1 0 9 11 Figure 9 2 Plasma Prep III Plasma Cleaner Chassis Wiring Diagram ...

Страница 28: ...Version 1 0 9 11 Figure 9 3 Plasma Prep III Plasma Cleaner Control Panel Schematic ...

Страница 29: ...Version 1 0 9 11 Figure 9 4 Plasma Prep III Plasma Cleaner RF Control Board Schematic ...

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