Specifications
• Prepare maintenance space.
• Do not drop or bump, or apply excess impact.
• Do not pull the lead wire forcefully, not lift the product by pulling the lead
wire. (Tensile force 49N or less).
• Mount a sensor by observing the proper tightening torque.
• Install or connect the flow sensor so that the flow direction specified on the
label matches with actual flow direction.
• Pipe the flow sensor after eliminating dust in piping by air blow to avoid
failure and malfunction.
• Use dry air which complies with the quality grade of ISO 8573-1 1.1.2 to
1.6.2 : 2001.
• If the entering of foreign material to the fluid is possible, install and pipe the
filter or the mist separator to the inle to avoid failure and malfunction.
• Avoid repeatedly bending or stretching the lead wire.
• Wire correctly.
• Do not wire while the power is supplied.
• Do not wire in conjunction with power lines or high voltage lines.
• Wire as short as possible to avoid the affect of noise and surge.
• Never use in the presence of explosive gases.
• Do not use in an area where magnetic field is generated to avoid
malfunction of sensor.
• Do not operate where the flow sensor is exposed to water.
• Do not use the sensor for poisonous substances, deleterious substances
and corrosive gas. This sensor is not a explosion proof. Do not use for
flammable gas.
• Do not apply heat cycle to the flow sensor.
• Do not used in an area where surges are generated.
• Sensors are not equipped with surge protection against lightening.
• Avoid using sensors in an environment where the likelihood of splashing or
spraying of water, chemicals, and oil to avoid failure and malfunction.
• Consider operating environment according to protection class.
• Do not use the flow sensor where exposed to vibration or impact. Vibration
may interfere correct measurement.
• Flow sensor has to be fixed when used.
• Operation under low temperature (5 or less) leads to cause damage or
operation failure due to frozen moist in the fluid or air.
• Do not short circuit the load.
• Maintenance and inspection should be performed periodically.
• Analog output may fluctuate by 2 to 3% for 5 minutes after supplying power
to the flow sensor.
• Do not poke inside a piping port with a stick.
Dimensions and Names of Individual Parts (unit: mm)
2 M5 0.8 Thread depth 3.8
Piping
1
IN
2
OUT
2 3.4
Mounting
15.2
14
3
0.8
7.1
(15)
10
34.4
18
FLOW SENSOR
2
OUT
FLOW SENSOR
L-type bracket
(Tapped)
(25.7)
10
12
5
2 x 4.5
24
34
20
1
2
9.1
With L-type bracket
Note 1) Converted value of volume flow at ANR (20 , 101.3kPa, 65%R.H.).
Note 2) Analog output shows 3V when flow is zero. Changes to 5V side when flow direction is
IN OUT. 1V side when OUT IN.
Note 3) %F.S. in the table takes 4V (1-5V) as a full scale.
Note 4) 0kPa means release to the atmosphere.
Note 5) Applicable pressure range.
Note 6) Pressure range satisfies product specification.
Model
Measured fluid
Dry air, N
2
(Air quality class is ISO 8573-1 1.1.2 to 1.6.2 : 2001)
Flow rate
/min
Note1)
(measurement range)
2%F.S. or less
Note3)
Repeatability
2%F.S. or less (0 to 300kPa)
5%F.S. or less (-70 to 0kPa)
Pressure
characteristic
(0kPa reference
Note4)
)
2% F.S. or less (15 to 35 )
5% F.S. or less (0 to 50 )
-100kPa to 400kPa
500kPa
Proof pressure
At voltage output : 1 to 5V
Output impedance : approx. 1k
5ms or less (Response 90%)
Response time
12 to 24VDC 10%, ripple(p-p) 10% or less (Protected against inverse connection)
IP40
Enclosure
0 to 50 (No freezing or condensation)
Operating fluid temp.
0 to 50 (No freezing or condensation)
Operating temp. range
35 to 85%R.H. (No condensation)
Storage humidity range
1000V AC, 1min Between battery and the body
Withstand voltage
50M or more(500V DC Mega) Between battery and the body
10 to 150Hz 1.5mm amplitude
98m/s
2
acceleration in X, Y, Z directions for 2 hours(Power is not supplied)
Vibration resistance
980m/s
2
X, Y, Z directions 3 times for each(Power is not supplied)
Impact resistance
M5 0.8 (tightening torque : 1 to 1.5N•m or less)
Port size
PPS, Si, Au, SUS316, C3604(Electroless nickel plating)
Fluid contact material
3 core vinyl cabtire cable 2.6, 0.15mm
2
, 2m
Lead wire
10g (without lead wire)
Weight
-10 to 60 (No freezing or condensation)
Storage temp. range
16mA or less
Power consumption
Source voltage
-70kPa to 300kPa
Pressure rate
Note5)
Analog output
(Non-linear output)
Insulation resistance
Resistance
Temperature
characteristics
(25 reference)
Operating pressure
range
Note6)
35 to 85%R.H. (No condensation)
Operating humidity range
PFMV505
PFMV530F
PFMV505F
PFMV530
0 to 0.5
-3 to 3
Note2)
-0.5 to 0.5
Note2)
0 to 3
PFMV510
PFMV510F
0 to 1
-1 to 1
Note2)
Model Indication Method
PFM - -
Output specification
Type
V5
Remote type sensor
Contents
Model
1
Analog (1 to 5V)
Contents
Model
Measurement flow range
05
Contents
Model
0.0 to 0.5 /min
10
30
0.0 to 1.0 /min
0.0 to 3.0 /min
05F
-0.5 to 0.5 /min
10F
-1.0 to 1.0 /min
30F
-3.0 to 3.0 /min
Operation manual
Nil
N
With Operation manual (in Japanese and English)
Contents
Model
Without Operation manual
Option(Included in the same package)
Nil
A
Without L-type bracket
Contents
Model
With
2 L-type brackets and 2 mount screws M3 x 15L included for 1station
ZS - 36 - A
L-type bracket
Stations
2
2 stns
1 stn
1
4
4 stns
5
5 stns
3 stns
2 L-type brackets, 2 mount screws M3 x 25L included
2 L-type brackets, 2 mount screws M3 x 15L included
2 L-type brackets, 2 mount screws M3 x 45L included
2 L-type brackets, 2 mount screws M3 x 55L included
2 L-type brackets, 2 mount screws M3 x 35L included
3
When optional part is needed by part alone, or to be mounted to the manifold,
please order by part number below.
10
34
24
10 x n + 24 (n=1 to 5)
10 x n + 14
2 x 4.5
20
9.1
2
1
OUT
FLOW SENSOR
FLOW SENSOR
FLOW SENSOR
2
OUT
2
OUT
2
L-type bracket
(Through hole)
L-type bracket
(Tapped)
Mount on one side
Mount on both sides
