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scorpION3 5200969 Rev 4
2
1.1 scorpION3 Ionizing Bar System
The scorpION3 bar system is an ionization solution for work areas
and OEM mini-environments. Intended for cleanroom applications,
the bar is available with tungsten or single crystal silicon emitter
points for the cleanest ionization available. scorpION3’s flexible
design allows independent or dependent operation of multiple bars
in a system. 24 VDC operation allows easy installation in OEM
semiconductor and wafer processing tools. Set-up and adjustment
is easy with the two-way communication provided by the scorpION3
MMI man machine interface or CI computer interface. The
computer interface also offers real-time monitoring of scorpION3
system performance.
The scorpION3 bar utilizes Simco-Ion’s innovative and effective
microcontroller intelligent ionization technology. The system
provides rapid neutralization of static charges over a localized work
area or a mini environment. It is the most flexible and efficient
system available, capable of eliminating electrostatic discharge
(ESD) and preventing electrostatic attraction (ESA) of particles to
surfaces. The scorpION3’s design allows multiple bars to be
connected together into a system that operates synchronously
without the added expense and installation of a dedicated
controller, adding cost effectiveness to its features.
The scorpION3 bar incorporates integrated total communication
capability. This allows one bar to operate as both an ionization
source and as a controller for additional scorpION3 bars. The
scorpION3 is designed to monitor and maintain critical operating
parameters through the use of its microcontroller, active self-
monitoring, and automatic system correction.
Содержание scorpION3
Страница 1: ...I O N I Z A T I O N S O L U T I O N S Ionizing Bar System scorpION3TM User s Manual...
Страница 6: ...scorpION3 5200969 Rev 4 1 1 Description 1 1 scorpION3 Ionizing Bar System 1 2 Features...
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Страница 30: ...scorpION3 5200969 Rev 4 25 3 Operation 3 1 Settings...
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Страница 42: ...scorpION3 5200969 Rev 4 37 5 Specifications 5 1 Specifications 5 2 Parts Accessories...
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Страница 55: ...scorpION3 5200969 Rev 4 50 Notes...