FS34100 User Manual
MEMS mass flow sensors
©2022 Siargo Ltd.
VA.0.01
Страница 1: ...FS34100 User Manual MEMS mass flow sensors 2022 Siargo Ltd VA 0 01...
Страница 2: ...SN1 EN Issue date 2022 07 Revision VA 0 01 Siargo Ltd 3100 De La Cruz Boulevard Suite 210 Santa Clara CA 95054 USA Tel 1 408 969 0368 Email info siargo com Copyright 2022 by Siargo Ltd Siargo Ltd and...
Страница 3: ...bration environment x Use this product according to the specified parameters x Only the trained or qualified personnel shall be allowed to perform product services x Be cautious for the electrical saf...
Страница 4: ...nection 11 5 4 RS485 Modbus communication protocol 12 5 5 1 Hardware connection 12 5 5 2 Communication parameters 12 5 5 3 Frame 13 5 5 4 Function codes 13 5 5 5 Registers 13 5 5 Analog output 0 5 4 5...
Страница 5: ...rgo com FS34100 User Manual 4 P a g e 9 Troubleshooting 22 10 Warranty and Liability 23 11 Service order contact and other information 25 Appendix I Product evaluation kit 26 Appendix II Document hist...
Страница 6: ...ar or 73 PSI and a compensated temperature ranging from 10 to 55 C The products are designed with an easy change of mechanical connectors The standard connectors are BSPT 1 4 or one touch connectors a...
Страница 7: ...packing box and you shall find the product The power and data cable as shown below may also be found according to the same packing materials Figure 2 1 FS34100 flow meter Figure 2 2 data cable Please...
Страница 8: ...sitions compatible connector with a length of 0 5 meters 2 The RS485 Modbus is asynchronous half duplex communication When the data are transmitted or received from the product the other pin is servin...
Страница 9: ...ensions Figure 3 3 FS34100 dimensions with BSPT R1 4 connectors Figure 3 4 FS34100 dimensions with one touch connectors Note Other threads or compressive types can be customized The mounting screw len...
Страница 10: ...spected to ensure no visual damage b Before installation of the product please ensure that the pipe debris or particles or any other foreign materials are completed removed c Close the upstream valve...
Страница 11: ...will conclude the installation Cautions a Don t alter any parts of the product b Ensure the electrical connection is properly done per the instructions c Make sure no mechanical stresses in the conne...
Страница 12: ...ns For the best performance of the product it is advised that the gas to be measured must be clean and free of particles or other foreign materials 5 2 Check the leakage Check gas leakage before any m...
Страница 13: ...cable connection 5 4 1 Hardware connection The RS485 hardware layer is TIA EIA 485 A as illustrated below In this configuration the product FS34100 is a slave Figure 5 1 RS485 hardware 5 4 2 Communic...
Страница 14: ...ion codes applied for the product are the sub class of the standard Modbus function codes These codes are used to set or read the registers of the product Table 5 3 function codes Code Name Functions...
Страница 15: ...below Y enabled N disabled Address 0x0001 Write Y Read Y Description Address of the product Value type UINT 16 Notes Values from 1 to 247 except for 157 0x9d Broadcast is not enabled and the default...
Страница 16: ...ription Meter response or data sampling time Value type UINT 16 Notes The default value is 10 10 msec Options are 10 20 50 100 and 200 msec It is recommended that write protection should be applied af...
Страница 17: ...is disabled After the write execution is completed the firmware will automatically re enable the write protection s 5 5 Analog output 0 5 4 5Vdc The product offers a voltage analog output of the insta...
Страница 18: ...e pressure losses of the selected models Table 5 6 FS34108 pressure loss Flow rate sccm Pressure loss Pa PSI 0 0 0 o 5 0 8 0 001 10 0 25 0 004 20 0 90 0 013 30 0 200 0 029 40 0 370 0 054 50 0 580 0 08...
Страница 19: ...meters Refer to the following for details FS341 Gas A air Ar N2 O2 C CO2 for other gases please contact the manufacturer Output B RS485 V 0 5 4 5 Vdc Maximum full scale flow rate for the value refer t...
Страница 20: ...e 0 5 MPa Response time 10 default 50 1000 programmable msec Filter depth 0 default 4 255 programmable msec Humidity 95 no condensation RH Power supply 8 24 50 mA Vdc Analog output 0 5 4 5 Vdc Maximum...
Страница 21: ...independent mass flow measurements for gases with similar thermal diffusivities It significantly simplifies the process control with high precision and easy maintenance and is very cost effective Plea...
Страница 22: ...ow path which could bring irrecoverable damage 8 2 3 Apply to a different gas medium The product is calibrated with a high precision NIST traceable metrological standard with clean and dry air Thanks...
Страница 23: ...gging Check flow and contamination Power regulator failure Return to factory Sensor failure Return to factory Large errors or unexpected flow rate Particles fluid type Check system Erroneous or large...
Страница 24: ...allation etc other consequential or indirect damages of any kind To the extent permitted by law the exclusive remedy of the user or purchaser and the limit of Siargo s liability for any and all losses...
Страница 25: ...r dismantled for whatever reasons 4 Products that have been subject to working conditions beyond the technical specification as described by this manual or related datasheet published by the manufactu...
Страница 26: ...n case you need any further assistance please contact info siargo com to obtain additional information or a Return Materials Authorization RMA before shipping the product back to the factory for facto...
Страница 27: ...for further analysis It can read from up to 128 sensors with the RS485 interface in serial For further information and purchase of the evaluation kit please contact the manufacturer or the sales repre...
Страница 28: ...www Siargo com FS34100 User Manual 27 P a g e Appendix II Document history Revision A 0 01 July 2022 Update service and sales contact Revision A 0 August 2021 First release...
