ZEBV-5088C
Matrix Vapor Deposition System
iMLayer
Pre-Installation Requirements
（
Installation Preparations/Confirmation
）
Страница 1: ...ZEBV 5088C Matrix Vapor Deposition System iMLayer Pre Installation Requirements Installation Preparations Confirmation...
Страница 2: ...on Copyright 2018 Shimadzu Corporation 2 Information in this manual is subject to change without notice and does not represent a commitment on the part of the vendor 3 Any errors or omissions which ma...
Страница 3: ...2 Contents 1 INTRODUCTION 3 2 INSTALLATION CONDITIONS 4 2 1 Carry in route 4 2 2 Example installation 5 2 3 Wiring and Piping 7 2 4 Ambient Requirements 7 2 5 Required Power Supply 8 3 Customer pre ch...
Страница 4: ...ent stable please make prior arrangement in accordance with these requirements They can also be used for routine maintenance This instrument consists of a main unit used for vapor deposition of the ma...
Страница 5: ...in the Safety Precautions of the instruction manual that came with the instrument 2 1 Carrying in The instrument can be carried on a hand truck Check the following points so that delivery can be carr...
Страница 6: ...on dimensions indicated in mm Front view Top view Fig 1 Typical Layout Using a Typical Draft chamber 650 610 230 510 980 1 2 4 3 5 416 150 430 1000 150 296 150 450 305 390 660 382 100 650 opening Wall...
Страница 7: ...chamber 660mm or more Inside width of the draft chamber 1000mm ore more Height of opening front glass 650mm ore more Load limit Inside floor 100kg ore more Minimum local exhaust air velocity 1m s ore...
Страница 8: ...ACcable 2 5 8 RP power supply cable 2 0 9 RPevacuation hose 3 10 RPsuction hose 3 2 4 Ambient Requirements To ensure safe use of the product sufficient consideration must be given to preparing its in...
Страница 9: ...sharing power source with other equipment To avoid electric shock ensure grounding at power supply ground terminal has a resistance of 100 ohm or less To assure performance keep voltage fluctuation wi...
Страница 10: ...Terminal Inside To iMScope AC100V in To power supply Earth Terminal Outside 225 25316 STEP DOWN TRNASFORMER 1 5K 225 25317 41 CABLE ASSY IMSCOPE PS1 225 25319 41 CABLE ASSY IMSCOPE PS3 225 25318 41 CA...
Страница 11: ...the following pages are a checklist for each of the installation conditions that have been described in this document Please fill out the checklist yourself and pass it on to the appropriate personne...
Страница 12: ...the following specifications Inside depth of the draft chamber 660mm or more Inside width of the draft chamber 1000mm ore more Height of opening front glass 650mm ore more Load limit Inside floor 100k...
