SENSIRION SFC53 Series Скачать руководство пользователя страница 5

 

www.sensirion.com 

Version 1.0 

 Aug 2022 

 

5 / 11 

Copyright © Sensirion AG 2022.  

 

4.

 

Common pitfalls 

4.1.

 

Flow appears to be off by several % 

If the flow appears to be off by several % (especially around 7%) against your reference, there are good chances the flow 

units of the two devices are not the same. Sensirion’s Mass Flow Controllers ca

n be factory calibrated for different units: 

e.g.  standard  or  norm  litres.  The  conversion  difference  between  the  two  is  around  7%,  due  to  the  different  reference 
temperatures used for standard and norm litres. Please make sure that the Mass Flow Controller and your reference are 
using  the  same  units  when  testing.  Further  information  about  the  flow  unit  conversion  can  be  found  in  a  dedicated 

application note, “

Reference and Flow Conversions between mass and volumetric flow

”,

 

in the “Useful resources” 

Section 

8.1.

 

4.2.

 

Settling time is longer than specified 

The most common cause for observing longer than expected settling time is trying to verify it from a position of fully closed 
valve. Solenoid valves are commonly affected by so-

called “stiction effect”. 

To open the valve from closed position (setpoint 

0), a certain overvoltage is required to overcome the stiction effect. This can lead to a spike in the flow (especially for low 

setpoints) or a longer than expected settling time. By adjusting the “user gain” 

of the Mass Flow Controller, the behaviour 

can be tuned to the specific requirements.  
 

The settling time of Sensirion’s Mass Flow Controllers is specified for a s

tep answer from 10% to 100% of full scale within 

5% of setpoint. When testing the settling time, do not do so from a position of zero flow. 

5.

 

Design recommendations 

To achieve best accuracy, it is recommended to use a design where the Mass Flow Controller is mounted horizontally. 

The valve used in the Mass Flow Controllers (proportional valve) is an oscillating system. Try to avoid sources of vibrations 
or decouple these sources mechanically from the Mass Flow Controller. They can interfere with the proper function of the 
valve. 

The operation of the valve produces a significant amount of heat. The Mass Flow Controller should therefore not be placed 
in a hermetically sealed space.  It is recommended to  design a cooling flow over the Mass Flow Controller in order to 
counteract the heating from the valve. Large temperature gradient between the Mass Flow Controller and the gas it is used 
to control, may adversely influence the accuracy of the device. 

5.1.

 

Pressure drop and input pressure 

Pressure drop is generated when gas passes through the valve of a mass flow controller. The magnitude of the pressure 
drop is proportional to the flow rate and the density of the gas.  
 
It is important to verify that at the maximum required flow rate, for a given gas, the inlet pressure is higher than the pressure 
drop. If this cannot be achieved, contact Sensirion 

 it might be possible to order a similar mass flow controller with larger-

sized valve. Larger valves offer a lower pressure drop at the cost of a decreased accuracy/resolution at low flows. 
 

 

Содержание SFC53 Series

Страница 1: ...SFM5xxx Summary This guide provides recommendations for evaluation testing and integration of Sensirion Mass Flow Controllers and Meters It is applicable to SFC55xx SFC54xx SFC53xx as well as SFM55xx...

Страница 2: ...recommendations 4 4 Common pitfalls 5 4 1 Flow appears to be off by several 5 4 2 Settling time is longer than specified 5 5 Design recommendations 5 5 1 Pressure drop and input pressure 5 6 Fluidic a...

Страница 3: ...aluate all digital Mass Flow Controllers with a DB9 plug an adapter is available for other plugs please contact Sensirion EK F5x is available from distribution Please note Mass Flow Controller is not...

Страница 4: ...ero flow It is possible to use Sensirion recalibration software to compensate for that effect The Recalibration software can be downloaded from the Sensirion website and is also linked in the Useful r...

Страница 5: ...The settling time of Sensirion s Mass Flow Controllers is specified for a step answer from 10 to 100 of full scale within 5 of setpoint When testing the settling time do not do so from a position of z...

Страница 6: ...ic manifold must be designed and manufactured by the user In Table 4 in the Useful resources Section 8 1 CAD models for a suggested manifold designs for SFC54xx SFM54xx and SFC53xx SFM53xx can be foun...

Страница 7: ...ssure 4 bar at inlet and atmospheric pressure at outlet any situation which leads to the factory calibration requiring adjustments due to the accuracy requirements e g vertical instead of horizontal i...

Страница 8: ...ass Flow Controllers SFC sensirion com products product categories mass flow controllers Mass Flow Meters SFM sensirion com products product categories gas flow sensors General technical download sect...

Страница 9: ...SFC5500 SFM5500 50sccm 0 5slm 2slm 10slm sensirion com resource cad sfc5500 SFC5400 SFM5400 sensirion com resource datasheet sfc5400 sensirion com resource cad sfc5400 sensirion com media d ocuments...

Страница 10: ...to the stability of the MEMS based sensor element and the robust mechanical design Sensirion Mass Flow Controllers do not drift and do not require recalibration in the field High manufacturing standar...

Страница 11: ...er s expense and the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period This warranty does not apply to any equipment which has not b...

Отзывы: