RKI Instruments GD-70D Series, Руководство по эксплуатации

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GD-70D
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Return to 2-2.SPAN
Returning to Detection Mode
Store the components of the calibration kit in a safe place.
Reconnect the dust filter and inlet line to the GAS IN fitting.
Press and hold the MODE key to return to Detection Mode.
10-4 Calibrating with a Surrogate Gas (Sensors with
Factors)
The calibration instructions in this section apply ONLY to the sensors listed in the table below. If your
sensor is not listed in the table below, you will need to follow the instructions outlined in one of the other
calibration sections. The warm up times listed are the minimum times between powering up a GD-70D and
calibrating that GD-70D.
Detection Gas Range Calibration Gas/Concentration Warm Up Time
After Power-Up
AsH3 (Arsine) 0 - 0.20 ppm Phosphine (PH3): 0.5 ppm** 24 hours
B2H6 (Diborane) 0 - 0.30 ppm Phosphine (PH3): 0.5 ppm** 24 hours
Br2 (Bromine) 0 - 1.00 ppm Chlorine (Cl2): 2 ppm** 3 hours
BTBAS (Bis[tertiary-butyl-
amino]silane)
0 - 15.0 ppm Ammonia (NH3): 5 ppm* 6 hours
CH3COOH (Acetic acid) 0 - 30.0 ppm Chlorine (Cl2): 2 ppm** 3 hours
CH3NH2 (Methylamine) 0 - 15.0 ppm Ammonia (NH3): 5 ppm** 6 hours
CH6Si (Methylsilane) 0 - 20.0 ppm Silane (SiH4): 5 ppm* 3 hours
ClF3 (Chlorine trifluoride) 0 - 0.60 ppm Chlorine (Cl2): 2 ppm* 3 hours
COF2 (Cobalt difluorine) 0 - 6.00 ppm Chlorine (Cl2): 2 ppm** 3 hours
DEA (Diethylamine) 0 - 15.0 ppm Ammonia (NH3): 5 ppm** 24 hours
DMA (Dimethylamine) 0 - 15.0 ppm Ammonia (NH3): 5 ppm** 6 hours
F2 (Fluorine) 0 - 3.00 ppm Chlorine (Cl2): 2 ppm or 5 ppm*** 3 hours
0 - 1.00 ppm Chlorine (Cl2): 2 ppm** 3 hours
GeH4 (Germane) 0 - 0.80 ppm Silane (SiH4): 5 ppm** 3 hours
H2O2 (Hydrogen peroxide) 0 - 3.00 ppm Phosphine (PH3): 0.5 ppm * 3 hours
H2Se (Hydrogen selenide) 0 - 0.20 ppm Phosphine (PH3): 0.5 ppm** 24 hours
H9NSi3 (Trisilylamine) 0 - 15.0 ppm Silane (SiH4): 30 ppm* 3 hours
HCOOH (Formic acid) 0 - 15.0 ppm Chlorine (Cl2): 2 ppm* 3 hours
HF (Hydrogen fluoride) 0.4 - 9.00 ppm Chlorine (Cl2): 2 ppm or 5 ppm*** 3 hours
HNO3 (Nitric acid) 0 - 20.0 ppm Chlorine (Cl2): 2 ppm or 5 ppm*** 3 hours
CAUTION
Exhaust gas must be collected
in the exhaust bag or discharged
through the exhaust line.