Phoenix HT User Manual
© 2007–2012 Rigaku Automation, Inc.
46
401718 Rev A
Figure 53. Phoenix HT Water Connections
Phoenix
water connections
(underside of base system)
Water supply
(Plumbed)
Water Control Module
Waste water
(Plumbed)
Na
no wash
Head was
h fr
on
t
Supply
Head wa
sh rear