Rigaku MFM65S2RFFFLFL, Инструкция по эксплуатации

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ME12058B
Operation Section
9.4 Loadport
Troubles Causes and remedies
The door of the load port does
not open.
Conduct the startup procedure with the software.
The carrier cannot be taken out.
The Load/Unload button of the
load port does not light.
Conduct the following steps, and also refer to “5.3 Sample
Unloading in the Event Emergency”.
Check to make sure that no wafer is left in the equipment.
Click
[Unload Wafer]
on the main window of the software
to return the wafer to the carrier.
Click
[Unload Carrier]
on the main window of the software
to activate the carrier ejection mode.
If the
[Unload Wafer]
and
[Unload Carrier]
functions do
not operate properly, conduct the startup procedure with the
software.
If there is a wafer left in the equipment, it is moved to the
robot home position. Conduct the wafer ejection operation
(
[Unload Carrier]
).
If there is no wafer in the equipment, conduct the carrier
ejection operation
(
[Unload Carrier]
)
.
If the software startup procedure fails to complete the ejection
operation, exit the software to accomplish the ejection.
Restart the software and conduct the startup procedure.
If there is a wafer left in the equipment, it is moved to the
robot home position. Conduct the wafer ejection operation
(
[Unload Carrier]
)
.
If there is no wafer in the equipment, conduct the carrier
ejection operation
(
[Unload Carrier]
)
.
If the above methods fail to complete the ejection operation,
conduct the shutdown procedure with the software, exit the
software, and turn off the main breaker lockout handle of the
equipment accomplish the ejection.
(Refer to “2.4 Lock-out/Tag-out”.)
The alarm of the load port
occurs.
Conduct the startup procedure with the software to reset the
load port.