Rigaku MFM65 Скачать руководство пользователя страница 1

Страница: 1 / 138

Metal Film Monitor

MFM65

(Model : MFM65S2RFFFTFT)

Instruction Manual

2. Maintenance Section

Manual No. ME12058B02

Rigaku

Corporation

Содержание MFM65

Страница 1: ...Metal Film Monitor MFM65 Model MFM65S2RFFFTFT Instruction Manual 2 Maintenance Section Manual No ME12058B02 Rigaku Corporation...

Страница 2: ...3 1033 Fax 1 281 364 3628 URL http www Rigaku com JAPAN Rigaku Corporation Semiconductor Instruments Division 3 9 12 Matsubara cho Akishima shi Tokyo 196 8666 JAPAN Tel 81 42 545 8102 Fax 81 42 54 031...

Страница 3: ...eath This indication is used very limitedly and it must be strictly observed b WARNING In the case of mishandling an operator may be killed or suffer a serious injury It is also used to denote an acti...

Страница 4: ...START UP 26 5 SHUTDOWN 27 6 DAILY CHECKS 28 7 DAILY ANALYSIS 29 8 EDIT RECIPE 30 8 1 Display the Edit Recipe Screen 30 8 2 Edit Recipe 31 8 2 1 Process Recipe 32 8 2 2 Analysis recipe 34 8 2 3 Wafer...

Страница 5: ...9 X ray Trouble 86 APPENDIX 1 87 A1 1 Consumables and Maintenance Parts 87 A1 2 Disposing the Equipment and parts 89 APPENDIX 2 90 A2 1 Explanation of XRR X ray reflectometry method 90 A2 2 Analysis...

Страница 6: ...nel in charge General information about the MFM65 system and its operation is found in a separate Operations Manual NOTE If the MFM65 system is modified without consulting RIGAKU the system may not sa...

Страница 7: ...FM65 is designed to be 2 micro Sv H that is based on Rigaku s design standards 1 3 mSv 13 weeks 6 days 8 hours 2 micro Sv H NOTE In fact the dose of X ray radiation outside the enclosure is almost zer...

Страница 8: ...NOTE When heavy parts or units are removed for example a PC or an X ray tube shield lift these objects with a coordinated effort by 2 or more persons 5 Material Hazards WARNING Metal beryllium foil is...

Страница 9: ...e no influence on human health but dispose of them according to local regulations Refer to the attached MSDS WARNING Ethanol of the customer s FAB may be used to clean the transfer line by the mainten...

Страница 10: ...X ray Hazard X ray Hazard Exposure to harmful overriding safety interlock Please observe appropriate safety guidelines Access should be limited to authorized personnel only radiation possible by 2 X r...

Страница 11: ...T SURFACE INSIDE Contact may result in severe burns Open only after safe temperature is reached SF016 2C Fig 2 2 2 Hazard Labels 2 7 Material Hazard Material Hazard Mercury Skin contact may be hazardo...

Страница 12: ...7 ME12058B Maintenance Section The locations of the hazard indication labels are shown in the following figure Fig 2 2 3 Locations of Hazard Indication Labels...

Страница 13: ...Front View Left View Right View Fig 2 2 4 Signal Towers and Buzzers Maintenance Buzzer Maintenance Lamp X ray ON Lamp 1 X ray ON Lamp 2 X ray ON Lamp 3 EMO Maintenance Buzzer Maintenance Lamp X ray ON...

Страница 14: ...ic shock 9 9 9 9 9 9 9 9 9 9 9 7 Electric protection panel at the X ray power supply Electric shock 9 9 9 9 9 9 9 9 9 9 9 8 Electric protection panel in the lower of Power Box Electric shock 9 9 9 9 9...

Страница 15: ...er of Power Box 9 Water leak sensor 10 Rear side Door of Main module 11 Right side Door of EFEM Right side Door of EFEM Gate and Cover at wafer aligner closed 12 Left side Door of EFEM Left side Door...

Страница 16: ...ration the lock out tag out of the cooling water is normally unnecessary 1 The main breaker lock out handle 1 Pull down the lock out handle 2 Set the tag to the lock out handle 3 Lock the tag 2 The co...

Страница 17: ...used to release the interlock functions WARNING There are two kinds of maintenance keys in the MFM65 system One is the key for mechanical maintenance This key must be in safe keeping with the mainten...

Страница 18: ...ance Panel for Main Module Maintenance Door for Main Module Maintenance Door for EFEM FFU EMO Power Cable Inlet Power ON OFF Buttons Main Breaker Inside Maintenance panels EMO Utility connections Fron...

Страница 19: ...14 ME12058B Maintenance Section Goniometer Figure Fig 3 1 2 Gonimeter...

Страница 20: ...15 ME12058B Maintenance Section EFEM Figure Fig 3 1 3 EFEM Figure Wafer Robot Wafer Aligner Load Port Top View...

Страница 21: ...Robot controller C P U Motor goniometer DS RS SD APD SC Limit switches alarm lamps gates etc Main module EFEM RS232C Water Chiller XG1 XRF XG2 XRF AF SDD MCA AF controller XG3 XRR CID Carrier ID Cont...

Страница 22: ...o 15 degrees up to 40 degrees if the distance between the SDD and the sample is aligned X ray source For XRR XRD XRF Cu target sealed tube 25 W 1 corner CMF mirror Automatic single slit X ray counter...

Страница 23: ...p Pattern Map Data Log Equipment Log Process Log Alarm Setup EFEM Settings Optics Setup System Setup Startup Startup Shutdown Alarms Alarm Alarm Log Accessory off line analysis software 1 GXRR XRR ana...

Страница 24: ...orner multi layer mirror unit X ray beam size 40 m Alignment mechanism Fine adjustment with screws manual operation Incident Optics 2 XRF Monochromator Four corner multi layer mirror unit X ray beam s...

Страница 25: ...tep Sub axis in plane rotation 5 degrees 0 0001 degree step X axis left right 0 to 150 mm 0 0002 mm step Y axis front back 0 to 300 mm 0 0002 mm step Pattern Recognition Unit Positioning accuracy X 2...

Страница 26: ...pe Creates and edits analysis recipes at an arbitrary point on wafers Wafer Map Creates and edits recipes for the mapping of points on non patterned wafers Recipes Pattern Map Creates and edits recipe...

Страница 27: ...08 V phases and 1 line for grounding Cooling Water Primary Pressure Flow rate Connector Remarks 1 Water chiller 0 1 0 5 MPa 7 L min 3 8 SUS joint 20 25 C Secondary Pressure Flow rate Temp Remarks 2 X...

Страница 28: ...23 ME12058B Maintenance Section Fig 3 7 1 Utility Figure...

Страница 29: ...7 3 Hose Inlet Fig 3 7 2 Cable Inlet Cable Inlet AC208V 3 lines Ground 1 line Back side of Power Box To the Main Breaker Lower Left rear Cooling Water Inlet Cooling Water Outlet Compressed Dry Air Vac...

Страница 30: ...25 ME12058B Maintenance Section Fig 3 7 4 Layout Figure...

Страница 31: ...e equipment from the deactivated state to the standby state for analysis Follow the startup sequence specified below 1 Preparation of the water chiller 2 Power on the equipment 3 Start up the control...

Страница 32: ...operation for deactivation Cooling the X ray tube for example 30 min Turn off the power and cooling water Deactivate the control program Initialize the goniometer Controlled by the shutdown program NO...

Страница 33: ...wing points in daily operation 1 Initialize the mechanical units using the startup command 2 Check the X ray intensity and angular positions by beam diagnosis 3 Measure the check sample Others 4 Check...

Страница 34: ...29 ME12058B Maintenance Section 7 DAILY ANALYSIS The Jobs job sub navigation button is available for the daily analysis in the measurement software About the daily analysis see the operation manual...

Страница 35: ...lected and edited Use the off line utility software program XRR GXRR software XRF XRFbatch software or XRD XRDbatch software when creating each data process condition See each software s manual 1 XRR...

Страница 36: ...and an existing map recipe which is a wafer map recipe or pattern map recipe 2 Analysis recipe XRR XRF XRD measurement and data process conditions at an arbitrary point on a wafer 3 Wafer map recipe...

Страница 37: ...pe See the following dialog box Edit Edit an existing recipe See the following dialog box Copy Copy the specified recipe in the table Rename Rename the specified recipe in the table Delete Delete the...

Страница 38: ...a map recipe in the list box Wafer Map Wafer map recipes are displayed into the list box Radio button Pattern Map Pattern map recipes are displayed into the list box Radio button Save Save the proces...

Страница 39: ...pe See the following dialog box Edit Edit an existing recipe See the following dialog box Copy Copy the specified recipe in the table Rename Rename the specified recipe in the table Delete Delete the...

Страница 40: ...rements Z Enter scan conditions of z axis Start End Step Speed Start and End are relative positions from the current position If Adjust Mode is chosen Omega these values are ignored Omega Enter scan c...

Страница 41: ...ing auto analysis of XRR profile check this box Condition Specify an existing recipe file by creating GXRR software button is available to specify Save Save the analysis recipe NOTE Click the Save but...

Страница 42: ...ot used for XRF measurements Omega Not used for XRF measurements 1 4 Check 1 and Enter counting conditions Incident DT Z Sampling Incident and DT Z are relative positions from the adjustment position...

Страница 43: ...asurements Z Enter scan conditions of z axis Start End Step Speed Start and End are relative positions from the current position If Adjust Mode is chosen Omega these values are ignored Omega Enter sca...

Страница 44: ...nter 2 4 All Step are same value Off angle Enter 0 0 for XRR measurements Analysis When performing auto analysis of XRD profile check this box Condition Specify an existing recipe file by creating XRD...

Страница 45: ...recipe See the following dialog box Edit Edit an existing recipe See the following dialog box Copy Copy the specified recipe in the table Rename Rename the specified recipe in the table Delete Delete...

Страница 46: ...the step between Point Axis to End Move the specified line in the mapping list to upper or lower side To upper side To lower side Update Replace the specified line in the mapping list to the Point Ax...

Страница 47: ...without moving sample stage It is available to edit recipes which are saved already See the following dialog box Teaching Edits a recipe with moving sample stage It is available to create new recipes...

Страница 48: ...ents Notes New Creates a new pattern map recipe Load Loads an existing pattern map recipe Save Saves the current contents to the same file Save As Saves the current contents to another file Delete Del...

Страница 49: ...X Enters the shot size of X direction Shot size Y Enters the shot size of Y direction Chip count in Enters the number of chips in a shot X Y Shot offset X Enters the offset distance at X direction fr...

Страница 50: ...ess in the blue rectangle region of the image and displays it into the Brightness box The blue rectangle region is changed by dragging in the image Brightness Displays the average brightness in the bl...

Страница 51: ...re four in the whole wafer 2 or 4 Turn select Chooses the wafer region for setting points the left half or the right half 0 left half 180 right half Light control Changes the light power of the lamp 1...

Страница 52: ...used Match Sets the tolerance of pattern matching The parameter for the errors of brightness focusing contrast and particle on the wafer Default 50 Cross Select Check to drag the cross cursor on the i...

Страница 53: ...t Selected Shot The shot coordinates of measurement points are displayed when Focus is Shot When Focus is Point the point coordinates in shots are displayed Read only Left side The coordinates on the...

Страница 54: ...d image number click Exec button after choosing Del Max number is 10 Alignment Changes alignment mode Direct Indirect No use Light Changes the light power of the lamp 1 255 Position Changes the displa...

Страница 55: ...on individually for the setting of measurement conditions and for maintenance Select System among the navigation buttons and Select each sub navigation button 1 EFEM Control 2 Optics1 Optics3 Control...

Страница 56: ...Enlarges a part of a figure Pan Enlarges the part near the cursor Screen Reset Restores the original size Linear Linear display of X ray intensity Square root Square root axis display of X ray intensi...

Страница 57: ...e removed from the cassette and mounted on the sample stage The wafer on the stage can be returned to the cassette Click Sample Changer button to open Sample Changer Control dialog box for operation F...

Страница 58: ...specified wafer is removed from the FOUP and the aligner sets the notch position The wafer is then mounted on the sample stage Unload The wafer on the stage returns to the specified FOUP on the load...

Страница 59: ...wings can be performed Items Contents X ray Generator On Off of the X ray generator X ray On Off of the X ray Shutter Open Close of the shutter X ray Generator Power Setup of the X ray generator power...

Страница 60: ...trol of actuators in the main module example for positioning scanning XG operation and so on can be performed Click Execute button to open Manual Command Control dialog box for operation Fig 9 4 1 Man...

Страница 61: ...enance Section Items Contents Group Choose the operation group Command Choose the operation command in the specified groupe Run The specified command is executed Abort Abort operation Repeat Repeat nu...

Страница 62: ...Execute the sequence of the control job to be tested ProcessJob tcl Execute the sequence of the process job to be tested STOP Stop the sequence during operation List of TCLs Click Run button to execut...

Страница 63: ...58 ME12058B Maintenance Section 9 6 MFM Status Control The status figure of this equipment is displayed on the main window visually Fig 9 6 1 MFM Status Control button...

Страница 64: ...Maintenance Section 10 SETUP Input operational constants specific to the equipment 1 EFEM Settings 2 Optics Setup 3 System Setup These commands can be performed as the following pages Fig 10 1 Setup...

Страница 65: ...ems Contents Load Port 1 Carrier Chooses the type of carriers to use on the load port 1 Load Port 2 Carrier Chooses the type of carriers to use on the load port 2 Use Notch Aligner Check on the case o...

Страница 66: ...8B Maintenance Section 10 2 Optics Setup Optics Setup has four setup functions buttons as below See the following pages about each function 1 Optics 1 2 Optics 2 3 Optics 3 4 MCA Fig 10 2 1 Optics Set...

Страница 67: ...xis SDD Use The AF microscope height for SDD Beam Diagnosis Range of Intensity The permissible range of x ray intensity Range of Angle The permissible range of x ray beam angular position APD Baseline...

Страница 68: ...calibration coefficient c Y a X2 b X c SDD Resolution Coeff a The energy resolution coefficient a of the detector Y a b X b The energy resolution coefficient b of the detector Y a b X Vortex Paramete...

Страница 69: ...64 ME12058B Maintenance Section 11 DATA LOG It is available to display the equipment process and alarm log on the main window Fig 11 1 Equipment Log button Fig 11 2 Process Log button...

Страница 70: ...65 ME12058B Maintenance Section Fig 11 3 Alarm button...

Страница 71: ...66 ME12058B Maintenance Section 12 ALARMS It is available to display the current alarm status and the history log of past alarms Fig 12 1 Alarm button Fig 12 2 Alarm Log button...

Страница 72: ...ng of the pressure of compressed dry air 9 3 Vacuum Checking and adjusting the suction pressure of vacuum 9 4 Cleaning of the transport line 9 5 Checking the suction pressure of the transport robot 9...

Страница 73: ...t line Wipe the robot hand aligner suction pads and sample stage by the clean cloth which soaks up alcohol or pure water Prepare clean cloth alcohol and pure water that are used in the facility When c...

Страница 74: ...cuum as the following figure Refer to the maintenance chapter for adjustments The flow rate meters for the cooling water 1 3 1 7 L min The regulators for the flow rate adjustment of the cooling water...

Страница 75: ...beryllium foil is attached to the head of the SDD When ethanol which should be managed in the customer s FAB is used for cleaning wear gloves Refer to the attached MSDS NOTE Use the hand light which...

Страница 76: ...are protection panels in the Power Box don t remove these panels during power ON The interlock operates and power OFF if the protection panels are removed Lock out Tag out handle Refer to 2 4 Lock out...

Страница 77: ...module There are three sockets for the handy light as below If necessary connect it to a socket after shutdown The handy light can be turned on at the state of the lock out handle on and the power but...

Страница 78: ...dle on Refer to 2 4 Lock out Tag out 2 Remove the lower panel on the right side of the Main Module 3 Check the current adjustments as the following figures 4 Re install the panel that was removed The...

Страница 79: ...old parts to new parts is described in this section 14 4 1 Cooling Water The cooling water for X ray tube secondary cooling water is pure water When exchanging cooling water refer to the manual of the...

Страница 80: ...Turn off the main breaker lock out handle Refer to 2 4 Lock out Tag out 2 Remove the lower panel on the left side of the Main Module 3 Turn off the power switch of the CPU 4 Pull out the PC rack and t...

Страница 81: ...re to avoid injury from hitting your head against the PC panel 1 LCD Remove four screws on the rear side after pulling out cables and then exchange the LCD 2 Keyboard Pull out the external USB connect...

Страница 82: ...the outlet connector If water leakage is detected repair leaks wipe leaked water and turn on the Start button again Check to make sure that the EMO buttons are not pressed in See 2 5 EMO If the EMO bu...

Страница 83: ...nual mode Set the manual robot controller to the remote mode RMT is indicated Check to make sure that CDA and vacuum are supplied Make sure of utility connections Refer to 14 3 Utility Adjustment for...

Страница 84: ...fer to 2 4 Lock out Tag out If this alarm is generated again the filament in the X ray tube may be disconnected If the software screen shows another alarm or if the cause of the problem is unknown shu...

Страница 85: ...the direct beam position is different the X ray optics may be out of adjustment NOTE Contact our service personnel in charge for readjustment of the X ray optics If the intensity does not improve aft...

Страница 86: ...t in the equipment it is moved to the robot home position Conduct the wafer ejection operation Unload Carrier If there is no wafer in the equipment conduct the carrier ejection operation Unload Carrie...

Страница 87: ...le Unloading in the Event Emergency in the operation manual Conduct the startup procedure with the software When the wafer is moved to the robot home position click Unload Wafer on the main window of...

Страница 88: ...xis during the sample alignment Widen the scanning range so that the above mentioned profiles can be obtained Check to make sure that the incident angle 2 of the reflection alignment is appropriate An...

Страница 89: ...urface interface roughness is not excessive If the surface interface roughness is excessive several nm or larger the reflection intensity decreases rapidly disallowing the observation of oscillations...

Страница 90: ...igit number in the XRF analysis software Refer to the manual of the XRF analysis software After measuring the standard sample the data of the standard sample cannot be loaded to the XRF software of cr...

Страница 91: ...power of the X ray generator Close the door and panels and restart Check to make sure that the water chiller has not shut down If the water chiller does not supply the required amount of cooling wate...

Страница 92: ...usually has no influence on human health but evidence exists that the personnel who inhales the beryllium powder or vapor risks a possibility of serious injury or death Do not scratch polish and swee...

Страница 93: ...T1L250V Rigaku 8 Fuse Power Box FNQ R 15 Rigaku 8 NOTE Items of 8 mark should be exchanged by Rigaku service personnel Contact to Rigaku service center for exchange WARNING Metal Beryllium foil is us...

Страница 94: ...azard materials and recyclable materials 1 Hazard materials Refer to 2 1 Hazards and Risks and the attached MSDSs in APPENDIX 5 WARNING When disposing hazard materials conform to the regulations and t...

Страница 95: ...or non crystalline materials provided that the surface or interface is smooth In particular XRR has attracted attention as a method capable of estimating the thickness density and surface interface ro...

Страница 96: ...on of the XRR profile 10 5 10 4 10 3 10 2 10 1 10 0 Refle ct iv ity 8 6 4 2 0 2 degree Attenuation rate of intensity at large angles Surface roughness Attenuation rate of oscillation at large angles R...

Страница 97: ...can be improved through fitting analysis Analysis of film thickness density and roughness fitting Analysis is relatively easy as there are few parameters Analysis of film thickness density and roughn...

Страница 98: ...tch aligner Move sample stage to the wafer pickup position Open lid Place wafer on the sample stage 1 Close lid Load Unload Press a button 1 Alignment of sample height Angle alignment Measurement Anal...

Страница 99: ...osition Open lid Unload wafer Return to the load port Operator call Yellow lamp blinks End A B Yes No Load Unload Press a button Open load port door Unload carrier Close load port door Analysis for al...

Страница 100: ...sing recipe Equipment shutdown Daily checks Engineers Above programs designed for operators Method of producing recipe for XRR measurement Method of producing recipe for XRF measurement Method of prod...

Страница 101: ...96 ME12058B Maintenance Section APPENDIX 4 A4 1 Power Circuit Diagram Fig A4 1 1 Power Circuit Diagram 1...

Страница 102: ...97 ME12058B Maintenance Section Fig A4 1 2 Power Circuit Diagram 2...

Страница 103: ...98 ME12058B Maintenance Section A4 2 EMO Circuit Fig A4 2 1 EMO Circuit...

Страница 104: ...llium 7440 41 7 Vacuum seal for X ray window Air seal for detector window X ray tube X ray detector APD X ray detector SDD Lithium 12190 79 3 Built in Battery PC Hour meter Mercury 7439 97 6 Discharge...

Страница 105: ...100 ME12058B Maintenance Section A5 2 MSDS of Beryllium...

Страница 106: ...101 ME12058B Maintenance Section...

Страница 107: ...102 ME12058B Maintenance Section...

Страница 108: ...103 ME12058B Maintenance Section...

Страница 109: ...104 ME12058B Maintenance Section...

Страница 110: ...105 ME12058B Maintenance Section...

Страница 111: ...106 ME12058B Maintenance Section...

Страница 112: ...107 ME12058B Maintenance Section...

Страница 113: ...108 ME12058B Maintenance Section...

Страница 114: ...109 ME12058B Maintenance Section...

Страница 115: ...110 ME12058B Maintenance Section...

Страница 116: ...111 ME12058B Maintenance Section A5 3 MSDS of Lead...

Страница 117: ...112 ME12058B Maintenance Section A5 4 MSDS of Lithium...

Страница 118: ...113 ME12058B Maintenance Section...

Страница 119: ...114 ME12058B Maintenance Section...

Страница 120: ...115 ME12058B Maintenance Section A5 5 MSDS of Mercury...

Страница 121: ...116 ME12058B Maintenance Section...

Страница 122: ...117 ME12058B Maintenance Section...

Страница 123: ...118 ME12058B Maintenance Section...

Страница 124: ...119 ME12058B Maintenance Section...

Страница 125: ...120 ME12058B Maintenance Section...

Страница 126: ...121 ME12058B Maintenance Section A5 6 MSDS of Mechanical Lubricating Grease...

Страница 127: ...122 ME12058B Maintenance Section...

Страница 128: ...123 ME12058B Maintenance Section...

Страница 129: ...124 ME12058B Maintenance Section...

Страница 130: ...125 ME12058B Maintenance Section...

Страница 131: ...126 ME12058B Maintenance Section...

Страница 132: ...127 ME12058B Maintenance Section...

Страница 133: ...128 ME12058B Maintenance Section A5 7 MSDS of Ethanol...

Страница 134: ...129 ME12058B Maintenance Section...

Страница 135: ...130 ME12058B Maintenance Section...

Страница 136: ...131 ME12058B Maintenance Section...

Страница 137: ...132 ME12058B Maintenance Section...

Страница 138: ...pecifications Subject to Change without Notice Rigaku Corporation Tokyo Branch 4 14 4 Sendagaya Shibuya ku Tokyo 151 0051 Japan Phone 81 3 3479 0618 Fax 81 3 3479 6112 e mail rinttyo rigaku co jp Riga...

Результаты поиска

Содержание MFM65

Отзывы:

Rigaku MFM65, Инструкция по эксплуатации, Страница: 1 / 138

Результаты поиска

Содержание MFM65

Отзывы: