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MINISYSTEM Manual Version 1.5
Page 34
10.
Specifications
miniSystem
Laser
Specifications
Specification
Notes
miniJewel Laser
Sealed, conductively cooled resonator
integrated with drive and control electronics.
Wavelength
Two wavelengths
(1064/532, 532/355, or
532/266)
Beam selection and energy control using
filter wheel and dual wavelength attenuator.
Rep Rate
1-30 Hz
30-50Hz Limited*
Energy per Pulse (Typical)
1064 nm
≥ 4mJ (1064nm only)
≥ 1.25mJ (dual wavelength)
Energy is specified at the output of the
MINISYSTEM system and does not include
losses from customer supplied optics. If
required energy specification can be
increased.
532 nm
≥ 1.25 mJ
355 nm
≥ 0.4 mJ
266 nm
≥ 0.4 mJ
Pulse Width
1064 nm
6.0 +/-2.0 ns
Full width half maximum
532 nm
6.0 +/-2.0 ns
355 nm
5.0 +/-2.0 ns
266 nm
5.0 +/-2.0 ns
Pulse to Pulse Stability
full aperture 50% 25% 10%
1064 nm
≤4
%
≤8
%
≤10
%
≤
12%
RMS pulse-to-pulse stability for 98% of
pulses after warm-up, with a 100 shot
sample window
532 nm
≤5
%
≤10
%
≤15
%
≤25
%
355 nm
≤
7%
≤12
%
≤20
%
≤28
%
266 nm
≤
7%
≤12
%
≤20
%
≤28
%
Diode Lifetime
> 500,000,000 pulses
Attenuator
Specification
Notes
Attenuation Range
0 to 100%
Attenuator is calibrated and linearized
to provide the specified energy.
Accuracy
±0.5%
Resolution
0.20%
Tact Time
≤ 1.0 s
Full range of travel.
Initialization
≤ 6.0 s
From power-up.
*
Long term drift may exceed specifications. Contact factory for details.
X-Y Slit
Specification
Notes
Range
0 to 2.5 mm
0 to 50 µm with 50x objective
Accuracy
±(25 um + 0.01 * size)
Resolution
25 um
0.5 µm with 50x objective
Tact Time
≤ 1.0 s
Full range of travel.
Initialization
≤ 6.0 s
From power-up.