MINISYSTEM Manual Version 1.5
Page 28
To recall a saved recipe, use the following command:
Command to send:
;LC:LR 2<CR>
Response:
OK<CR>
Description:
Loads the configurations settings from storage location #2.
Once a recipe is recalled, the only commands that need to be sent are the enable laser (EN) and
the fire laser (FL). It is recommended to utilize the recipe storage and recall commands to quickly
load new parameters into the system that have been pre-configured.
To minimize the number of setup commands that have to be sent each time when parameters
need to change quickly, the laser setup (LS) command can be used. This command combines
many of the commonly changed parameters. If the objective magnification stays the same, then
this command can be used.
Command to send:
;LC:LS 4,1,500,0,1000,1000<CR>
Response:
OK<CR>
Description:
Sets wavelength to DUV, level to high, energy to 50%,
polarization to 0 degrees, and slit to 1mm x 1mm.
Various System Status Checks
To check to see if the laser is ready to be enabled, only one bit (bit position 3) of the system status
needs to be checked. This bit is the Ready to Enable bit. When this bit is set, then the laser can
be issued an enable command. If it is not set, then check to see if any fault is detected.
To check to see if the laser is ready to fire, only the Ready To Fire bit (bit position 2) needs to be
checked. When this bit is set, it is ok to send the fire laser command. If it is not set, then check to
see if the laser is enabled or if any other fault is detected.
To monitor the status of any motor movement in the system, only the Bus Busy (or motor moving)
bit (bit position 12) needs to be checked. This bit will be set whenever any motor on the system is
in motion. This could be due to a homing sequence on startup or a commanded movement is still
in process.