MINISYSTEM Manual Version 1.5
Page 27
Command to send:
;LC:SW 4<CR>
Response:
OK<CR>
Description:
Sets the active wavelength to DUV (266nm).
Command to send:
;LC:ED 4,1,500<CR>
Response:
OK<CR>
Description:
Sets the wavelength to DUV (266nm), the level to high mode
and the percentage to 50%.
Command to send:
;LC:SP 10,1000,1000<CR>
Response:
OK<CR>
Description:
Sets the slit opening to 1um x 1um with a 10x objective.
Command to send:
;LC:SA 450<CR>
Response:
OK<CR>
Description:
Sets the slit angle to 45 degrees.
Command to send:
;LC:IL 1,200<CR>
Response:
OK<CR>
Description:
Sets the backlight illumination to 20% on.
The system is now ready to fire the laser:
Command to send:
;LC:FL 2<CR>
Response:
OK<CR>
Description:
Starts the laser firing the burst sequence. Once the burst is
finished another FL 2 command can be sent to fire another
burst.
To monitor system status, use the SS command:
Query to send:
;LC:SS?<CR>
Response:
72<CR>
Description
Means ok to enable, laser is enabled and ready to fire.
If it is desired to save this recipe for a recall later on, use the following command:
Command to send:
;LC:SR 1<CR>
Response:
OK<CR>
Description:
Saves the current system settings to storage location #1. There
are up to 6 locations to store various recipes.