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Nanoscale Fabrication & Characterization 

Facility 

 

PVD Products PLD 3000 Deposition system 

User Guide 

 

 

 
 

PVD Products PLD-3000 System with dual wafer 
loadlock and Class 4 Coherent 110F series COMPex 
Pro excimer laser.  The laser is UV with a 248nM 
wavelength,  The system has an ultimate vacuum on 
the order of 1.1 x 10

-7

. 

 

Содержание PLD 3000

Страница 1: ...ducts PLD 3000 Deposition system User Guide PVD Products PLD 3000 System with dual wafer loadlock and Class 4 Coherent 110F series COMPex Pro excimer laser The laser is UV with a 248nM wavelength The system has an ultimate vacuum on the order of 1 1 x 10 7 ...

Страница 2: ...contact with the eyes 6 Turn on the laser with both the red main power and the control key located on the back of the laser This will start the laser warm up process 7 Note the system pressure before venting the load lock It should be near or below 5e 7 Torr If it is not document the pressure in the FOM system and e mail the NFCF staff with details of the problem 8 Make sure the gate valve is clos...

Страница 3: ...in the up position and the sample holder is in the load position 15 Carefully release the wobble stick The pressure difference will pull it onto the chamber so maintain a strong grip Do not let go 16 Carefully use the wobble stick to pick up the holder and transfer it from the load arm to the process holder The pin must be completely inserted to support the holder Turning on the chamber light and ...

Страница 4: ...wer supply 21 Load modify the desired recipe 22 Notes for process creation a Target and substrate rotation set point must be set on the Main tab before saving the recipe b All other parameters are set on the Recipes tab c If using heat remember to enable the power supplies and press the green start button on the Magna power electronics controller d Prior to processing set the heater enclosure to t...

Страница 5: ... heater power supply enable 27 If using heat allow significant time for the sample to cool It will be HOT 28 Open the load lock gate valve and insert the load arm to line up with the wobble stick 29 Move the sample from the sample holder to the load arm 30 Lock the wobble stick 31 Move the load arm to the load lock and close the gate valve fully 32 Turn off the chamber light 33 Vent the load lock ...

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