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Product number Description
E-503
Piezo amplifier module, 3 channels, -30 to 130 V
E-505
Piezo amplifier module, 1 channel, -30 to 130 V
E-610
Piezo amplifier / servo controller, 1 channel, -30 to 130 V
E-617
High-power piezo amplifier, 1 channel, -30 to 130 V
E-621
Piezo amplifier / servo controller module, 1 channel, -30 to 130 V
E-625
Piezo amplifier / servo controller, 1 channel, -30 to 130 V
E-663
Piezo amplifier, 3 channels, -20 to 120 V
E-665
Piezo amplifier / servo controller, 1 channel, -30 to 130 V
E-709
Digital piezo controller, 1 channel, -30 to 130 V
E-831
Piezo amplifier module, 1 channel, -30 to 130 V
To order, contact our
customer service department (p. 27)
.
4.6
Accessories
Product number Description
P-891.VA
Vacuum feedthrough for piezo voltage, to 10
-6
hPa, 100 °C, LEMO
connectors, incl. air side cable, 2 m
To order, contact our
customer service department (p. 27)
.
4 PRODUCT DESCRIPTION
P840M0002EN
‒
1/29/2021
12
M O T I O N | P O S I T I O N I N G