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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws

PZ247E

P-63x Nanopositioner

User Manual

Version: 1.1.0

Date: 29.04.2022

This document describes the following products:



P-630.XCD

Linear piezo nanopositioner with aperture,

40 µm, direct position measuring, capacitive

sensor



P-631.XCD

Linear piezo nanopositioner with aperture,

80 µm, direct position measuring, capacitive

sensor

Содержание P-63 Series

Страница 1: ...i ws www pi ws PZ247E P 63x Nanopositioner User Manual Version 1 1 0 Date 29 04 2022 This document describes the following products P 630 XCD Linear piezo nanopositioner with aperture 40 m direct posi...

Страница 2: ...I GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any te...

Страница 3: ...w 9 3 3 Product Labeling 10 3 4 Scope of Delivery 11 3 5 Suitable Electronics 11 3 6 Technical Features 12 3 6 1 PICMA Piezo Actuators 12 3 6 2 Flexure Guides 12 3 6 3 Capacitive Sensors 12 3 6 4 ID C...

Страница 4: ...Service 31 10 Technical Data 33 10 1 Specifications 33 10 1 1 Data Table 33 10 1 2 Maximum Ratings 34 10 1 3 Ambient Conditions and Classifications 35 10 2 Dimensions 35 10 3 Torque for Stainless Stee...

Страница 5: ...Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and T...

Страница 6: ...zo amplifier Electronics without sensor evaluation for open loop operation of positioners and piezo actuators Piezo controller Electronics with sensor evaluation for closed loop operation of positione...

Страница 7: ...e website www pi ws 2 Search the website for the product number e g P 630 or the product family e g nanopositioner 3 Click the corresponding product to open the product detail page 4 Click the Downloa...

Страница 8: ......

Страница 9: ...use the P 63x as intended in conjunction with suitable electronics p 11 available from PI The electronics is not included in the scope of delivery of the P 63x The electronics must provide the requir...

Страница 10: ...tronics If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 63x in the case of malfunction or failure of the system If there are touch voltages...

Страница 11: ...al notes If you give the P 63x to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing info...

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Страница 13: ...ble in the following versions Model Description P 630 XCD Linear piezo nanopositioner with aperture 40 m direct position measuring capacitive sensor P 631 XCD Linear piezo nanopositioner with aperture...

Страница 14: ...r example 123456789 Serial number example individual for each P 63x Meaning of each position from the left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive number WWW PI WS Manufa...

Страница 15: ...tronics to operate a P 63x The device is selected depending on the type of application Product number Description E 709 CRG Digital piezo controller 1 axis 30 to 130 V capacitive sensor benchtop devic...

Страница 16: ...or sliding parts Flexure elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not re...

Страница 17: ...as well as loss of accuracy Do not touch any sensitive parts e g motion platform when handling the P 63x 1 Unpack the P 63x with care 2 Compare the contents with the scope of delivery according to th...

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Страница 19: ...piezo actuators can be destroyed by an abrupt contraction Do not open the P 63x Discharge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics...

Страница 20: ...crews can cause damage Pay attention to the torque range p 36 specified for the screws used during installation INFORMATION Extension cables can reduce the positioning accuracy of the P 63x or affect...

Страница 21: ...Suitable protective earth conductor Cable cross section 0 75 mm2 M4 protective earth screw set p 11 supplied for connecting the protective earth conductor Suitable screwdriver Figure 3 Connecting the...

Страница 22: ...rties as the P 63x e g surfaces made of aluminum NOTICE Tensile stress on piezo actuator due to mounting in wrong orientation The P 63x is intended for mounting in horizontal orientation standing on a...

Страница 23: ...g holes in the base body see figure and the surface are in line 2 Fix the P 63x with the screws a Insert a screw into each hole b Tighten the screws Pay attention to the specified torque range p 36 wh...

Страница 24: ...from the center of the motion platform e g tall load and unwanted lever effect the P 63x can be damaged especially in dynamic operation by high strain on the flexure guides high torques and oscillati...

Страница 25: ...d to the electronics Tools and accessories Screws of suitable size and length p 35 Suitable screwdriver Fixing the load 1 Align the load on the P 63x so that the mounting holes in the load and the hol...

Страница 26: ...ve read and understood the general notes on installing p 15 You have installed suitable electronics p 11 You have read and understood the user manual for the electronics The electronics are switched o...

Страница 27: ...to the protective earth conductor before restarting NOTICE Destruction of the piezo actuator due to electric flashovers Using the P 63x in environments that increase the electrical conductivity can l...

Страница 28: ...equency or with too high operating frequency If you notice oscillation In closed loop operation switch off the servo mode immediately In open loop operation stop the P 63x immediately INFORMATION The...

Страница 29: ...nsure temperature stability Before demounting e g before cleaning and transporting the P 63x and for modifications The P 63x is discharged via the discharge resistor inside the electronics from PI Dis...

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Страница 31: ...o actuators Loosened screws cause a loss in positioning accuracy Loosen screws only when instructed in this manual Do not open the P 63x 7 2 Cleaning the P 63x NOTICE Damage from ultrasonic cleaning U...

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Страница 33: ...se of the P 63x e g surface made of aluminum Mount loads onto the P 63x with the following characteristics only The contact surface of the load has a flatness of at least 20 m The thermal expansion pr...

Страница 34: ......

Страница 35: ...tion Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applica...

Страница 36: ......

Страница 37: ...ositioning Integrated sensor Capacitive Capacitive Travel range at 20 to 120 V open loop 45 90 m Travel range closed loop 40 80 m Resolution open loop 0 1 0 1 nm Resolution closed loop 0 2 0 2 nm Line...

Страница 38: ...4 Ask about custom designs 10 1 2 Maximum Ratings P 63x positioners are designed for the following operating data Model Maximum operating voltage Maximum operating frequency unloaded 1 Maximum power c...

Страница 39: ...hPa to 0 1 hPa Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 0 C to 40 C Storage temperature 20 C...

Страница 40: ...Nm M5 2 5 Nm 3 5 Nm M4 1 5 Nm 2 5 Nm M3 0 8 Nm 1 1 Nm M2 5 0 3 Nm 0 4 Nm M2 0 15 Nm 0 2 Nm M1 6 0 06 Nm 0 12 Nm Pay attention to the screw in depth required for the respective material according to th...

Страница 41: ...voltage A2 Probe Probe sensor signal immovable part of the capacitive sensor 1 Data ID chip Data line for ID chip 2 GND Target and ID chip Target and ID chip ground 3 GND PZT Piezo voltage ground 4 n...

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Страница 43: ...tional national and local rules and regulations In order to fulfill its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all o...

Страница 44: ......

Страница 45: ...f conformity were issued according to the following European statutory requirements Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed below...

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