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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws

PZ251E

P-587 Positioner

User Manual

Version: 1.1.0

Date: 22.04.2022

This document describes the following product:



P-587.6CD

6-axis nanopositioner with long travel range,

800 µm × 800 µm × 200 µm, ±0.5 mrad, parallel

metrology, capacitive sensors, D-sub 25W3

panel plugs

Содержание P-587.6CD

Страница 1: ...ax 49 721 4846 1019 Email info pi ws www pi ws PZ251E P 587 Positioner User Manual Version 1 1 0 Date 22 04 2022 This document describes the following product P 587 6CD 6 axis nanopositioner with long...

Страница 2: ...I GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any te...

Страница 3: ...ng 10 3 3 Scope of Delivery 10 3 4 Suitable Electronics 11 3 5 Technical Features 11 3 5 1 PICMA Piezo Actuators 11 3 5 2 Flexure Guides 11 3 5 3 Capacitive Sensors 11 3 5 4 ID Chip 12 4 Unpacking 13...

Страница 4: ...Service 31 10 Technical Data 33 10 1 Specifications 33 10 1 1 Data Table 33 10 1 2 Maximum Ratings 35 10 2 Ambient Conditions and Classifications 35 10 3 Dimensions 36 10 4 Torque for Stainless Steel...

Страница 5: ...nology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The foll...

Страница 6: ...ormation in this manual 1 3 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may a...

Страница 7: ...website www pi ws 2 Search the website for the product number e g P 587 or the product family e g nanopositioner 3 Click the corresponding product to open the product detail page 4 Click the Downloads...

Страница 8: ......

Страница 9: ...used as intended in conjunction with suitable electronics p 11 available from PI The electronics are not included in the scope of delivery of the P 587 The electronics must provide the required opera...

Страница 10: ...cables from being pulled out of the positioner and electronics If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 587 in the case of malfuncti...

Страница 11: ...notes If you give the P 587 to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing inform...

Страница 12: ......

Страница 13: ...ronics 11 Technical Features 11 3 1 Product View The figure serves as an example and can differ from your positioner model Figure 1 Example of product view 1 Motion platform 2 Base body 3 Z TIP TILT c...

Страница 14: ...cturer s address website Z TIP TILT Z TIP TILT connector for controller cable XY ROT XY ROT connector for controller cable Warning sign Attention Residual voltage Indicates risk of electric shock p 5...

Страница 15: ...rrent In this way an especially high reliability is achieved even under extreme ambient conditions In contrast to motorized drives there are no rotating parts or friction The piezo actuators are there...

Страница 16: ...calibration data is saved on the ID chip together with specific product information After switching on the digital electronics read the data from the ID chip of the P 587 connected A P 587 with an ID...

Страница 17: ...s well as loss of accuracy Do not touch any sensitive parts e g motion platform when handling the P 587 1 Unpack the P 587 with care 2 Compare the contents with the scope of delivery according to the...

Страница 18: ......

Страница 19: ...tion Do not open the P 587 Discharge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics equipped with an internal discharge resistor Do not pu...

Страница 20: ...ctly tightened screws can cause damage Pay attention to the torque range p 36 specified for the screws used during installation INFORMATION Extension cables can reduce the positioning accuracy of the...

Страница 21: ...nics Tools and accessories Suitable protective earth conductor Cable cross section 0 75 mm2 M4 protective earth screw set p 10 supplied for connecting the protective earth conductor Suitable screwdriv...

Страница 22: ...e P 587 is intended for mounting in horizontal orientation standing on a surface not suspended Mounting in other orientations can cause tensile stress that reduces the preload and destroys the piezo a...

Страница 23: ...ds with high torques and heavy loads in general can overload the platform of the P 587 Mechanical overload can damage the piezo actuators sensors and flexures of the P 587 and lead to loss of accuracy...

Страница 24: ...latform adjust the controller settings before starting and operating or or contact our customer service department p 31 NOTICE Excessively long screws The P 587 could be damaged by screws inserted too...

Страница 25: ...size and length p 36 Suitable screwdriver Fixing the load 1 Align the load on the P 587 so that the mounting holes in the load and motion platform are in line 2 Insert the screws through the holes in...

Страница 26: ...ccessories Cable set K030B0055 p 10 Connecting the P 587 to the electronics 1 Connect the first connecting cable in the following way D sub 25W3 connector XY ROT of the cable to the D sub 25W3 panel p...

Страница 27: ...o the protective earth conductor before restarting NOTICE Destruction of the piezo actuator due to electric flashovers Using the P 587 in environments that increase the electrical conductivity can lea...

Страница 28: ...irreparable damage to the P 587 Oscillation is indicated by a humming noise and can be caused by the following A change in the load and or dynamics requires the servo control parameters to be adjuste...

Страница 29: ...arting and operating the P 587 in the manual for the electronics p 11 used 6 3 Discharging the P 587 The P 587 must be discharged in the following cases Before Installation When the P 587 is not used...

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Страница 31: ...s Loosened screws cause a loss in positioning accuracy Loosen screws only when instructed in this manual Do not open the P 587 7 2 Cleaning the P 587 NOTICE Damage from ultrasonic cleaning Ultrasonic...

Страница 32: ...Requirements You have discharged the piezo actuators of the P 587 p 25 You have disconnected the P 587 from the electronics Cleaning the P 587 Clean the surfaces of the P 587 with a cloth dampened wit...

Страница 33: ...of the P 587 e g surface made of aluminum Mount loads onto the P 587 with the following characteristics only The contact surface of the load has a flatness of at least 20 m The thermal expansion prop...

Страница 34: ......

Страница 35: ...on Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicabl...

Страница 36: ......

Страница 37: ...oning Integrated sensor Capacitive Travel range in X Y closed loop 800 m Travel range in Z closed loop 200 m Tip tilt angle in X Y closed loop 0 5 mrad Tip tilt angle in Z closed loop 0 5 mrad Resolut...

Страница 38: ...rature range 20 to 80 C Material Aluminum Mass 7 2 kg 5 Cable length 3 0 m 10 mm Sensor voltage connection 2 D sub 25W3 m Recommended electronics E 712 When mounted horizontally standing on a surface...

Страница 39: ...or maximum power consumption Details can be found at the following website https www physikinstrumente com en technology piezo technology properties piezo actuators electrical operation 10 2 Ambient C...

Страница 40: ...in the drawings 1 Rotation center depending on Z 10 4 Torque for Stainless Steel Screws A2 70 Screw size Minimum torque Maximum torque M6 4 Nm 6 Nm M5 2 5 Nm 3 5 Nm M4 1 5 Nm 2 5 Nm M3 0 8 Nm 1 1 Nm M...

Страница 41: ...nductor Output Probe sensor signal X immovable part of the capacitive sensor A3 outer conductor GND Shielding for Probe sensor signal X 1 Input Target sensor signal Y1 movable part of the capacitive s...

Страница 42: ...inner conductor Output Probe sensor signal Z3 immovable part of the capacitive sensor A2 outer conductor GND Shielding for Probe sensor signal Z3 A3 inner conductor Output Probe sensor signal Z1 immo...

Страница 43: ...or signal Z1 movable part of the capacitive sensor 12 GND Shielding for Target sensor signal Z2 13 GND Shielding for Target sensor signal Z3 14 Free 15 Free 16 Free 17 Free 18 Free 19 Input Piezo volt...

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Страница 45: ...onal national and local rules and regulations In order to fulfill its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all old...

Страница 46: ......

Страница 47: ...conformity were issued according to the following European statutory requirements Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed below Sa...

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