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10 Technical Data

42

Version: 1.0.0

PZ248E

P-56x Nanopositioners

10.3 Dimensions

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 10: P-56x.3CD and P-56x.3CL

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Содержание P-56 Series

Страница 1: ...ion 1 0 0 Date 22 11 2013 This document describes the following products P 561 PIMars XYZ Nanopositioning System P 561 3CD 3CL 100 m 100 m 100 m P 561 3DD 45 m 45 m 15 m Direct Drive P 562 PIMars XYZ...

Страница 2: ...no 7 449 077 Japanese patent no 4667863 Chinese patent no ZL03813218 4 2013 Physik Instrumente PI GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyrig...

Страница 3: ...Recommended Piezo Controllers 13 3 6 Technical Features 13 3 6 1 PICMA Piezo Actuators 13 3 6 2 Flexure Guides 14 3 6 3 Capacitive Sensors 14 3 6 4 ID Chip Only Models With Sub D Connector 14 4 Unpac...

Страница 4: ...eshooting 35 9 Customer Service 37 10 Technical Data 39 10 1 Specifications 39 10 1 1 Data Table 39 10 1 2 Maximum Ratings 40 10 2 Ambient Conditions and Classifications 41 10 3 Dimensions 42 10 4 Tor...

Страница 5: ...knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typogr...

Страница 6: ...isting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item p 5 Cross reference to page 5 RS 232 Labeling o...

Страница 7: ...hannel high performance amplifier PZ62E E 517 interface and display module PZ214E E 712 digital piezo controller PZ195E E 725 digital piezo controller PZ197E E 761 digital piezo controller PZ164E P 5x...

Страница 8: ...d password protected manuals 1 Carry out steps 1 to 5 of the download process for freely accessible manuals 2 Insert the product CD in the PC drive 3 Switch to the Manuals directory on the CD 4 In the...

Страница 9: ...mbination with suitable drive and control electronics p 13 available from PI The electronics is not included in the scope of delivery of the P 56x The electronics must provide the required operating v...

Страница 10: ...ric shock max 130 V DC and minor injuries Do not touch the contacts in the connector Secure the connector of the stage with screws against being pulled out of the controller If a protective earth cond...

Страница 11: ...ilable for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the P 56x on to other users also turn ove...

Страница 12: ......

Страница 13: ...el metrology Sub D connector s P 561 3CL PIMars XYZ nanopositioning system with large travel range 100 m 100 m 100 m capacitive sensors parallel metrology LEMO connector s P 561 3DD PIMars high dynami...

Страница 14: ...logy Sub D connector s P 563 3CL PIMars XYZ nanopositioning system with large travel range 300 m 300 m 300 m capacitive sensors parallel metrology LEMO connector s 3 2 Product View The figure serves a...

Страница 15: ...ew 1 Product name 2 Serial number 3 Brand name 4 Country of origin 5 Manufacturer s logo 6 CE conformity mark 7 Manufacturer s address website 8 Disposal of used devices 9 Warning sign Observe manual...

Страница 16: ...c screws 000036450 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2 flat washers P500T0002 Technical Note with instructions on unpac...

Страница 17: ...terface and display module 3 X E 712 digital piezo controller modular system for up to 6 axes 3 6 X E 725 digital piezo controller for up to 3 axes 3 X E 761 digital piezo controller for up to 3 axes...

Страница 18: ...ect metrology and work without contact Neither friction nor hysteresis interferes with the motion which allows excellent linearity values to be achieved in combination with the high position resolutio...

Страница 19: ...he P 56x externally by the base body The P 56x is delivered with installed transport lock The following figures serve as examples and can differ from your stage model Figure 4 Exemplary view Stage wit...

Страница 20: ...transport lock a Place the P 56x on a surface with the support frame facing downwards b Release the four plastic screws with a screwdriver In the following figure one of the screws is marked with an...

Страница 21: ...tors can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 56x can lead to minor injuries In addition the piezo actuators can be destroyed by an a...

Страница 22: ...d by PI for connecting the P 56x to the electronics NOTICE Damage from incorrect mounting Incorrect mounting of the P 56x or incorrectly mounted parts can damage the P 56x Only mount the P 56x and the...

Страница 23: ...serve the applicable standards for mounting the protective earth conductor The P 56x is equipped with an M4 hole for fastening the protective earth conductor This hole is located next to the cable exi...

Страница 24: ...o the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protect...

Страница 25: ...x on surfaces that have the same or similar thermal expansion properties as the P 56x NOTICE Tensile stress on piezo actuator with vertical mounting When the stage is mounted vertically tensile stress...

Страница 26: ...tood the General Notes on Installation p 17 Tools and accessories Screws of appropriate size and length see Dimensions p 42 Suitable tools Mounting the stage on a surface 1 Position the stage on an ev...

Страница 27: ...xing of loads with uneven contact surface Affixing loads with an uneven contact surface can warp the P 56x Warping reduces the accuracy Only affix loads on the P 56x whose contact surface with the mov...

Страница 28: ...he moving platform p 42 Only use screws of the correct length for the respective mounting holes INFORMATION The arrows in the figures see Dimensions p 42 show the positive direction of motion Center o...

Страница 29: ...d holes p 42 intended for this purpose and with suitable screws Observe the specified torque range p 43 while doing so Affix the load so that it is centered and that the center of load is on the movin...

Страница 30: ......

Страница 31: ...arth conductor during operation If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 56x to the protective earth conductor before starting i...

Страница 32: ...operate the P 56x with controllers drivers and original accessories from PI Do not exceed the operating voltage range p 40 for which the P 56x is specified Only operate the P 56x when the operating vo...

Страница 33: ...the positioning accuracy is reduced after the P 56x the controller an extension cable or an adapter cable has been replaced Perform a recalibration of the axis displacement see controller manual or c...

Страница 34: ...and transporting the P 56x and for modifications The P 56x is discharged through the internal discharge resistor of the controller from PI Discharging a P 56x that is connected to the controller In c...

Страница 35: ...nical components and piezo actuators Loosened screws cause a loss in positioning accuracy Only loosen screws according to the instructions in this manual Do not open the P 56x 7 2 Packing the P 56x fo...

Страница 36: ...ging Transport lock included in delivery consisting of Support frame 4 plastic screws Suitable screwdriver Packing the P 56x 1 Attach the transport lock a Place the support frame on a surface b Place...

Страница 37: ...arked with an arrow 2 Pack the stage in the original packaging 7 3 Cleaning the P 56x Prerequisites You have discharged the piezo actuators of the P 56x p 30 You have disconnected the P 56x from the c...

Страница 38: ......

Страница 39: ...r above or below calibration temperature 21 C to 24 C Perform a zero point adjustment of the sensor see controller manual Reduced positioning accuracy Warping of the base body or the moving platform O...

Страница 40: ...ors Observe the assignment of the axes when connecting the stage to the controller This assignment is indicated by labels on the devices The stage starts oscillating or positions inaccurately Servo co...

Страница 41: ...stions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or...

Страница 42: ......

Страница 43: ...5 0 1 nm typ Closed loop resolution 0 8 1 2 0 2 nm typ Linearity error 0 03 0 03 0 03 0 01 typ Repeatability in X Y Z 2 2 2 2 2 4 2 2 4 2 2 2 nm typ Pitch in X Y 1 2 2 3 rad typ Crosstalk X Y motion i...

Страница 44: ...n LEMO The resolution of PI piezo nanopositioning systems is not limited by friction or stiction Value given is noise equivalent motion with E 725 E 712 controller With digital controller Non linearit...

Страница 45: ...altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 rel...

Страница 46: ...10 Technical Data 42 Version 1 0 0 PZ248E P 56x Nanopositioners 10 3 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 10 P 56x 3CD and P 56x 3CL...

Страница 47: ...Version 1 0 0 43 Figure 11 P 561 3DD 10 4 Torque for Stainless Steel Screws A2 70 Screw Size Minimum Torque Maximum Torque M6 4 Nm 6 Nm M5 2 5 Nm 3 5 Nm M4 1 5 Nm 2 5 Nm M3 0 8 Nm 1 1 Nm M2 5 0 3 Nm...

Страница 48: ...signal channel 3 nonmoving part of the capacitive sensor A2 outer conductor GND Shield of Probe sensor signal channel 3 A3 inner conductor Output Probe sensor signal channel 1 nonmoving part of the ca...

Страница 49: ...Input Piezo voltage channel 3 20 Input Piezo voltage channel 2 21 Input Piezo voltage channel 1 22 GND Shield of Target sensor signal channel 1 LEMO coaxial connector Only for P 56x 3CL one PZT P and...

Страница 50: ......

Страница 51: ...nternational national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH Co KG ensures environmentally correct dis...

Страница 52: ......

Страница 53: ...he following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic E...

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