Maintenance Instructions
BG 805 457 BE / C (0204) HLT 2xx
1
QualyTest™HLT 2xx
VACUUM
VA C UU M
Страница 1: ...Maintenance Instructions BG 805 457 BE C 0204 HLT 2xx 1 QualyTest HLT 2xx VACUUM VACUUM...
Страница 2: ...LP 5xx 14 2 4 Analytical system 15 2 4 1 Detection system 15 2 4 2 Mass spectrometer supply MSV 16 2 4 3 Electrometer pre amplifier EVV 17 2 5 Electronics 18 2 5 1 MC 68 Control board 18 2 5 2 I O boa...
Страница 3: ...ts P1 and or P2 37 4 7 3 Clean the valve block replace the seals and revise the valves 37 4 8 Ventilator 1 37 4 8 1 Clean replace the filter mat 37 4 9 LP 5xx 37 4 9 1 Replace capillary filter 37 4 9...
Страница 4: ...V UNO 005A without RC HLT 265 QualyTest TM Select BG Z08 020 100 230 V extern HLT 270 QualyTest TM Dry BG Z08 010 230 V MVP 035 HLT 270 QualyTest TM Dry BG Z08 011 120 V MVP 035 HLT 270 QualyTest TM D...
Страница 5: ...sive equipment and environmental damage DANGER Information on preventing bodily injury or extensive property damage Vacuum area Always wear clean lint free gloves and use clean tools when working in t...
Страница 6: ...All processes within the instrument are controlled automatically 2 1 System overview RC 260 UNO 005A or oder MVP 035 Test leak Testleck V4 V5 V2 V1 TMH 071 Ventilator 1 L fter 1 Test port Testanschlus...
Страница 7: ...BG 805 457 BE C 0204 HLT 2xx 7 2 1 1 Block diagram Fig 3 HLT 2xx Block diagram...
Страница 8: ...8 BG 805 457 BE C 0204 HLT 2xx 2 1 2 Power inlet and ground connection on the wiring board Fig 4 Power inlet and ground connection...
Страница 9: ...tion Bel ftungs oder LP Anschluss Backing pump optional Vorvakuumpumpe optional V4 V6 V2 V1 V5 Test port Testanschluss Fig 5 Pump system HLT 2xx The test object can be connected to the test port with...
Страница 10: ...w rate of 4 m3 h at 50 Hz and 5 m 3 h at 60 Hz Oil filler leinlass Oil drain lablass Oil level sight glas lstandsschauglas Gas ballast valve Gasballastventil Fig 6 UNO 005A b HLT 270 MVP 035 Fig 7 Two...
Страница 11: ...itional roughing pump to the HLT 260 and HLT 270 can also be connected to the flange d HLT 275 External scroll pump Oil free 2 stage scroll pump with a nominal volume flow rate of 25 m3 h at 50 Hz and...
Страница 12: ...i measuring elements P1 and P2 P1 measures the fore vacuum pressure in the turbomolecular pump P2 measures the pressure on the test port Pirani measuring elements Pirani Messelemente Holder Halter P2...
Страница 13: ...Valve block Solenoid valves V1 to V6 Depending on their function the valves have different nominal diameters and opening forces V2 and V6 are concepted for 0 0 to 1 1 bar open against atmosphere V1 V...
Страница 14: ...le BG 449 217 T 120 TF 385 Spitze 385 mm flex BG 449 218 T TF 312 Spitze 120 mm flex BG 449 217 T Sinter filter Sinterfilter Sinter filter Sinterfilter Fig 2 11 Sniffer line with sniffer probe Type Or...
Страница 15: ...ach the ion collector where they can be measured by the electrometer amplifier M 4 M 4 M 4 1 2 3 4 5 6 7 8 9 10 11 Legende 1 Katode 1 2 Anode 3 Katode 2 4 Verst rker 5 Ionenf nger 6 Abschirmung zu Ion...
Страница 16: ...l Faults in the mass spectrometer are detected and signaled to the MC 68 The mass spectrometer supply is monitored in MC 68 XP1 XP2 K2 K1 Anode preheating Anode vorheizen A Cathode error Katode Fehler...
Страница 17: ...nal It has four amplification stages The MC 68 control board selects the required amplification stage and processes the analog output signal The detection limit in the most sensitive range is approxim...
Страница 18: ...68 DIP switch S1 DIP Schalter S1 1 PROCESSOR RESET 2 GLOBAL RESET 3 UNITS SUPER GLOBAL RESET 4 not evaluated wird nicht ausgewertet Flash PROM L H Lithium Accumulator Jumper XJ1 DIP switch S2 DIP Scha...
Страница 19: ...BG 805 457 BE C 0204 HLT 2xx 19 2 5 2 I O board J2 J1 XP5_IO XP1_IO XP2_IO F2 T0 8A F1 T0 8A F3 T0 315A Fig 16 I O board...
Страница 20: ...ing board XS2_MSV XS1_MSV XS2_I O XS6_MSV XS7_MC68 XS1_I O XP12 XS10 XP22 XP9 XP21 XP20 XP11 XS14 XS24 XP32 XS8 XS31 XP23 XS30 XS29 XS16 XS15 XS3 XS4 XP17 XP18 XP13 XS5 F3 T4A F2 T0 315A F1 Gas fuse 3...
Страница 21: ...ion LP and total pressure and I O Port F2 1 T0 8 A 5 x 20 24 V III RC 260 and ventilator F3 1 T0 315 A 5 x 20 not used in HLT 2xx MSV F1 1 T2 A 5 x 20 24 V der MSV F2 1 T3 15 A 5 x 20 Anode heater act...
Страница 22: ...B 8199 999 ET replace filter X II os maintenance kit 4A PT 110 010 T 4 3 2 replace oil mist filter II os if defective replacement oil mist filter B 8199 999 ET MVP 035 1 replace diaphragms X PJ 11400...
Страница 23: ...tical system MSV 1 exchange II os if defective exchange MSV B 8199 999 DZ A B 8199 999 DZ EVV 1 exchange III os if defective exchange EVV B 8199 999 EW A B 8199 999 EW Heliumsensor 1 replace ion sourc...
Страница 24: ...HLT 2xx 24 Maintenance work Module Task Operating hours weeks User s guide Rep Loca Test equipment Material Part No Ref Part number 160 2150 4300 8600 17200 level tion Comments Description Quant 1 13...
Страница 25: ...011 T TMH 071 Lubricant reservoir 1 MVP 035 Wearing parts set 1 Vent connection Screwed fitting filter 1 Ventilator 1 Air filter set 5 pieces 1 4C Seal set HLT 2xx PT 110 030 T VV vent external pump...
Страница 26: ...2 way valve 4D1 1 Spare parts for valve V1 V2 V3 V6 2 2 way valve 4D2 4 Spare parts for valve V4 2 2 way valve 4D3 1 4D1 Spare parts kit for valve V5 PT 110 041 T Core 1 Spring 2 Spring bolt 2 O Ring...
Страница 27: ...Service training 2 or PFEIFFER VACUUM Service Engineer 1 see maintenance schedule page 22 23 2 PFEIFFER VACUUM offers courses to rapair level II and III CAUTION The safety instructions in Chapter 1 3...
Страница 28: ...ace the oil if it is discolored Chapter 4 2 2 Reconnect the ground cable Reinstall the hood and close the latches on the left and right hand side with the socket wrench Reinstall operating unit RC 260...
Страница 29: ...ey size 5 reinstall the drain screw on the drain tube Remove the oil filler cap again and fill 0 33 l of fresh oil through a funnel Reinstall the oil filler cap Reconnect the ground cable Reinstall th...
Страница 30: ...he hood and close the latches on the left and right hand side with the socket wrench Reinstall operating unit RC 260 Put the HLT 2xx back into service according to the user s guide 4 3 2 Replace filte...
Страница 31: ...schraube Fig 20 Replacing the filter of the oil mist filter Reinstall the plastic cylinder Reconnect the ground cable Reinstall the hood and close the latches on the left and right hand side with the...
Страница 32: ...er No 2 unfasten 6 screws each on the head covers and simultaneously tilt down the two head covers toward the front together with the connection lines Remove two sealing rings each on the head covers...
Страница 33: ...ad covers together in the correct position on the intermediate plate With a Phillips screwdriver No 2 screw in and tighten 6 screws on each head cover If an external roughing pump is used reestablish...
Страница 34: ...ANUAL MODE switch off the TMH 071 and wait until the rotational speed is 50 Hz Vent the HLT 2xx by opening the valves V3 and V6 Turn off the power switch Detach the power plug CAUTION To prevent damag...
Страница 35: ...a new lubricant reservoir according to PM 800 504 BN and reinstall the cap screw Set the HLT 2xx upright again If an external roughing pump is used reestablish the KF 16 connection to the external rou...
Страница 36: ...ft the hood perpendicularly upward Detach the ground cable Venting filter Bel ftungsfilter Fig 23 With a fork wrench size 12 unfasten the hose coupling on the valve block and pull the hose off the nip...
Страница 37: ...uired material Seal kit Ordering No PT 110 030 T Spare parts kit to valve block Ordering No PT 110 040 T CAUTION This work must be carried out by PFEIFFER VACUUM or a service engineer who has been tra...
Страница 38: ...BG 805 268 BE The above work has been carried out by Date Signature 4 10 2 Quarterly Maintenance Work Assembly Work to be performed Section O K Ventilator 1 Replace the filter mat BG 805 263 BE LP 5x...
Страница 39: ...change 4 2 2 Valve block Clean the valve block replace the seals and revise the valves 4 7 3 The above work has been carried out by Date Signature 4 10 5 Biannual Maintenance Work Assembly Work to be...
Страница 40: ...disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay This declaration may only be completed...
Страница 41: ...BG 805 457 BE C 0204 HLT 2xx 41...
Страница 42: ...Pfeiffer Vacuum GmbH Berliner Strasse 43 D 35614 Asslar Deutschland Tel 49 0 6441 802 0 Fax 49 0 6441 802 202 info pfeiffer vacuum de http www pfeiffer vacuum de...
