Pfeiffer Vacuum PrismaPro QMA 250 F1, Перевод оригинала

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Fig. 26: Support spring on the analyzer with crossbeam ion source
1 Support spring
Disassembling the filament unit
1. Place the analyzer in the mounting aid.
2. Remove the support spring.
3. Hold the clamps with the flat pliers.
4. Loosen the screws and nuts of the clamps without unscrewing the screws too far.
– The rear clamp will fall off if the screws are unscrewed too far.
5. Carefully remove the filament connections from the filament holder clamps.
6. Loosen and remove the nuts.
7. Carefully pull both filament holder and ceramic isolators away from the ion source.
Installing the filament unit
1. Place the analyzer in the mounting aid.
2. Carefully remove the new filament holder from the transport packaging.
3. Place the new filament holder onto the stud bolts of the ion source.
4. Insert the ceramic insulators, the side with the shoulder facing down towards the filament holder,
into the mounting hole.
5. Tighten the nuts.
– Tightening torque:
0.15 Nm
6. Make sure that Wehnelt plates and filaments are positioned correctly.
– When correctly installed, the Wehnelt plates and filaments sit parallel to and at the same
height as the lateral openings of the formation area.
7. Insert the filament connections into the clamps.
8. Hold the clamps with the flat pliers.
9. Tighten the screws and nuts.
– Tightening torque: 0.15 Nm
10. Secure the support spring.
11. Measure the resistance of each filament.
Setting parameters in the operating software to 0 (zero)
► Set the pressure cut-off meter of the ion source to 0 (zero) in uCon with the command U204.
– Alternatively, enter "/mmsp/sensorIonSource/tPTripCount/set?0" in the web browser and con-
firm with Enter.
9.4.3 Replacing the filament unit of the grid ion source
Prerequisite
● PrismaPro deactivated
Required tools
● Socket key, WAF 3.2
● Flat screwdriver, 3 mm
● Torque wrench
● Flat pliers
Required aid
● Mounting aid for the analyzer
Maintenance
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