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OPERATING INSTRUCTIONS

EN

Translation of the Original

IKT 010 

∣

 IKT 011

Cold cathode sensor for integrated pressure measurement

Содержание IKT 010

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original IKT 010 IKT 011 Cold cathode sensor for integrated pressure measurement ...

Страница 2: ...o pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and variants of your product Note that your product may not be equipped with all features described in this document Pfeiffer Vacuum constantly adapts its products to the latest state of the art without ...

Страница 3: ...ing with Pfeiffer Vacuum 14 2 9 Operator requirements 14 3 Product description 15 3 1 Function 15 3 2 Switch and status display 15 3 3 Identifying the product 15 3 4 Scope of delivery 15 4 Transport and storage 16 4 1 Transporting the product 16 4 2 Storing the product 16 5 Installation 17 5 1 Establishing the vacuum connection 17 5 2 Establishing the electric connection 18 5 2 1 Connecting the se...

Страница 4: ...l information 34 11 2 Dispose of sensors 34 12 Service solutions by Pfeiffer Vacuum 35 13 Spare parts 37 14 Accessories 38 14 1 Accessory information 38 14 2 Order accessories 38 15 Technical data and dimensions 39 15 1 General 39 15 2 Technical data 39 15 3 Dimensions 42 Certification 43 Declaration of conformity 44 Table of contents 4 46 ...

Страница 5: ...or the pressure range 10 hPa 21 Tbl 8 Malfunctions 31 Tbl 9 Measurement 32 Tbl 10 Spare parts 37 Tbl 11 Conversion table Pressure units 39 Tbl 12 Conversion table Units for gas throughput 39 Tbl 13 Measured and pressure values 39 Tbl 14 Electrical data 40 Tbl 15 Internal volume and weight 40 Tbl 16 Ambient conditions 40 Tbl 17 Temperatures 40 Tbl 18 Substances in contact with the media 41 Tbl 19 T...

Страница 6: ... 6 Disassembling the sensor 26 Fig 7 Removing the ignition aid 27 Fig 8 Inserting the ignition aid in the mounting tool 27 Fig 9 Inserting the ignition aid 27 Fig 10 Switch for CAL calibration value 29 Fig 11 Installing the sensor 30 Fig 12 Contact pins of the measurement chamber 32 Fig 13 Complete measurement chamber replacement sensor 37 Fig 14 Dimensions 42 List of figures 6 46 ...

Страница 7: ...ments You can find these documents in the Pfeiffer Vacuum Download Center 1 1 2 Variants This document applies to products with the following part numbers Article number Designation Connection Version PT R72 050 IKT 010 DN 25 ISO KF 0 5 m cable Molex Low current PT R73 050 IKT 011 DN 25 ISO KF 0 5 m cable High current PT R72 100 IKT 010 DN 25 ISO KF 1 0 m cable Molex Low current PT R73 100 IKT 011...

Страница 8: ...step A horizontal solid triangle indicates the only step in an action This is an individual action step Sequence of multi part action steps The numerical list indicates an action with multiple necessary steps 1 Step 1 2 Step 2 3 1 3 2 Pictographs The pictographs used in the document indicate useful information Note Tip Wear laboratory gloves Perform a visual inspection 1 3 3 Stickers on the produc...

Страница 9: ...ramming Unit DCU Display Control Unit LPS Limited power source MSL Mean sea level OR Overrange P 000 Electronic drive unit parameter with number p Pressure PLC Programmable logical controller ST Status WAF Width Across Flats TC Turbopump electronic drive unit turbo controller U Measuring signal V output voltage UR Underrange Tbl 3 Abbreviations used 1 4 Trademark proof HiPace is a registered trade...

Страница 10: ...tions that are not associated with personal injury Instructions to avoid damage to property Notes tips or examples indicate important information about the product or about this docu ment 2 2 Safety instructions Safety instructions according to product s life stages All safety instructions in this document are based on the results of a risk assessment Pfeiffer Vacuum has taken into account all the...

Страница 11: ... the device Moisture that has penetrated into the device results in personal injury through electric shocks Only operate the device in a dry environment Operate the device away from fluids and humidity sources Do not switch on the device if fluid has penetrated into it instead contact Pfeiffer Vacuum Serv ice Always disconnect the current supply before cleaning the device WARNING Health hazard thr...

Страница 12: ...ation operation or maintenance of the product must read understand and adhere to the safety related parts of this document Infringement of conformity due to modifications to the product The Declaration of Conformity from the manufacturer is no longer valid if the operator changes the original product or installs additional equipment Following the installation into a system the operator is required...

Страница 13: ... operates the product with accessories that are not listed in the corresponding product documenta tion The operator is responsible for the process media used 2 7 Owner requirements Safety conscious working 1 Only operate the product in a technically flawless state 2 Operate the product in line with its intended purpose safety and hazard conscious and only in compliance with these operating instruc...

Страница 14: ...orage operation and disposal fields Such training must ensure that individuals are capable of carrying out the required activi ties and work steps safely and properly 2 8 2 Personnel qualification for maintenance and repair Advanced training courses Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3 Adequately trained individuals are Maintenance level 1 Customer trained...

Страница 15: ...ly identify the product when communicating with Pfeiffer Vacuum 1 Read the data on the product rating plate 2 Record this data 3 Always have all rating plate specifications to hand 3 4 Scope of delivery The scope of delivery includes the following parts Sensor with cable and power supply plug Operating instructions Unpacking the product and checking completeness of the shipment 1 Unpack the produc...

Страница 16: ...port protections prior to each transport 4 2 Storing the product NOTICE Damage caused by improper storage Improper storage will lead to damage to the product Static charging moisture etc lead to defects on the electronic components Comply with the instructions for safe storage Packing We recommend storing the product in its original packaging General information for safe storage Store the product ...

Страница 17: ...d prove harmful to health due to escaping process medium Do not open any tensioning pieces when overpressure is prevalent in the vacuum system Use suitable tensioning pieces for overpressure Use tensioning pieces which can only be opened and closed using a tool e g tightening strap circlip Use sealing rings with an outer centering ring NOTICE Impairment from contamination and damage Touching the d...

Страница 18: ... high vacuum system using vacuum components from the Pfeiffer Vac uum Components Shop 5 2 Establishing the electric connection NOTICE Property damage to the electronics or the sensor Disconnecting the plug and socket connection with the voltage supply switched on may lead to the destruction of electronic components Always interrupt the voltage supply before you plug in or unplug the sensor connect...

Страница 19: ...ke the settings and perform the control via the interfaces of the electronic drive unit 5 2 2 Connecting the sensor with micro USB to HiPace neo Vacuum pump operating instructions Observe the information on the connection in the operating instructions for the vacuum pump 5 4 3 2 1 Fig 3 Micro USB connection type B 1 5 V blue 4 Not connected red 2 Sensor RxD master TxD white 5 GND black 3 Sensor Tx...

Страница 20: ...Vacuum proto col and the Pfeiffer Vacuum parameter set are used to operate the connected accessory devices on a Pfeiffer Vacuum vacuum pump See the valid operating instructions for the electronic drive unit used Prerequisites Control unit RS 485 parameter Firmware version or higher DCU Data type u_expo_new 020300 HPU 001 010300 1 Tbl 6 Required firmware versions Checking the firmware versions Requ...

Страница 21: ...f gas and vapor mixtures is only possible using partial pressure measurement instruments for example a quadrupole mass spectrometer Gas type Calibration factor C Air oxygen O2 carbon monoxide CO nitrogen N2 1 0 Hydrogen H2 2 4 Helium He 5 9 Neon Ne 4 1 Argon Ar 0 8 Krypton Kr 0 5 Xenon Xe 0 4 The calibration factors provided are mean values Tbl 7 Calibration factors for the pressure range 10 5 hPa...

Страница 22: ...time Continuous operation in the range between 10 4 hPa and 10 2 hPa can lead to major contamination and thus to reduced service life and shorter maintenance intervals Contamination of the sensor generally leads to deviations in the measured values In the low pressure range 1 10 3 hPa the pressure displayed is generally too low contami nation of the cold cathode system Excessive contamination will...

Страница 23: ... with an overpressure 1000 hPa in the vacuum system can lead to inju ries as a result of flying parts and escaping process medium could prove harmful to health Elastomer seals in KF connections e g O rings are not resistant to pressures 2500 hPa This could prove harmful to health due to escaping process medium Do not open any tensioning pieces when overpressure is prevalent in the vacuum system Us...

Страница 24: ...ntering ring 3 Tensioning piece 2 Protective cap Removing the sensor 1 Disconnect the sensor cable from the turbopump s electronic drive unit 2 Remove the sensor from the vacuum system 3 Fit the protective cap on the connection flange Removal 24 46 ...

Страница 25: ...factory The sensor is maintenance free Replacing faulty components Replace the ionization chamber and the ignition aid or the complete measurement chamber re placement sensor only if the unit is faulty Replace the complete measurement chamber if heavily contaminated or faulty 8 2 Disassembling the sensor NOTICE Impairment from contamination and damage Touching the devices or components with bare h...

Страница 26: ...on and damage Touching the devices or components with bare hands increases the desorption rate and leads to in correct measurements Dirt e g dust fingerprints etc and damage impair the function When working on high or ultra high vacuum systems always wear clean lint free and powder free laboratory gloves Only use clean tools Make sure that the connection flanges are free of grease Remove protectiv...

Страница 27: ...unting tool 1 Ignition aid 3 Mounting tool 2 Serrated end of ignition aid Inserting the ignition aid in the mounting tool 1 Insert the new ignition aid in the mounting tool 2 Ensure correct position of the ignition aid serrated end at the bottom 2 3 1 Fig 9 Inserting the ignition aid 1 Measurement chamber with anode 3 Mounting tool 2 Ignition aid Maintenance 27 46 ...

Страница 28: ...re of potential reactions with product materials NOTICE Damage caused by penetrating moisture Penetrating moisture e g through condensation or dripping water damages the device Protect the device against moisture penetrating Only operate the device in a clean and dry environment Operate the device away from fluids and humidity sources Take special precautions if there is a risk of dripping water D...

Страница 29: ...unit has been tightened correctly NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in correct measurements Dirt e g dust fingerprints etc and damage impair the function When working on high or ultra high vacuum systems always wear clean lint free and powder free laboratory gloves Only use clean tools Make ...

Страница 30: ...red tools Allen key WAF 2 Pincers for circlip Tweezers Installing the sensor 1 Observe arrangement of the ionization chamber 2 Push the ionization chamber into the measurement chamber up to the mechanical stop 3 Fit the circlip 4 Push the complete measurement chamber into the electronic unit up to the mechanical stop 5 Ensure in this regard that the pins remain straight 6 Secure the grub screw on ...

Страница 31: ...a P 041 Overpressure in the meas urement chamber 1 Evacuate at 1 10 2 hPa 2 Switch off the sensor via the interface wait 5 seconds and then switch it back on reset Flashes red Off EEPROM er ror Switch off the sensor via the inter face wait 5 seconds and then switch it back on reset Replace the sensor Measured value 000000 under range Lights up yellow Flashes green Gas discharge has not ignited Wai...

Страница 32: ...es being outside of setpoint range 5 and 6 Value contamination short circuiting of cold cathode Tbl 9 Measurement Performing a resistance test 1 Perform the measurements at the contact pins of the measurement chamber using an ohmmeter 2 Replace the complete measurement chamber if the measured value is outside of the setpoint range Malfunctions 32 46 ...

Страница 33: ...Pfeiffer Vacuum decontaminates products not clearly declared Free of contamination at your expense Instructions for safe shipping Do not ship microbiological explosive or radioactively contaminated products Observe the shipping guidelines for the participating countries and transport companies Highlight any potential dangers on the outside of the packaging Download the explanation for contaminatio...

Страница 34: ...product and its components must be disposed of in accordance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 11 1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle Dispose of our products according to the following Iron Aluminium Copper Synthe...

Страница 35: ...lity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum representa tive For fast and smooth service process handling we recommend the following 1 Download the up to date form templates Explanations of service requests Service requests Contamination declaration a ...

Страница 36: ...oduct in suitable stable transport containers only e Maintain applicable transport conditions ERKLÄRUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send your product to your local Service Center 8 You will receive an acknowledgment quotation from Pfeiffer Vac uum Our sales and delivery conditions and repair and maintenance conditions for vacuum devi...

Страница 37: ...eplacement sensor 1 Circlip 3 Measurement chamber 2 Ionization chamber Description Order number Ignition aid set 10 x BN 845 995 T Mounting tool for ignition aid PT 120 316 T Ionization chamber titanium stainless steel IKT 010 PT 120 313 T Ionization chamber stainless steel IKT 011 PT 120 312 T Complete measurement chamber IKT 010 PT 120 320 T IKT 011 PT 120 300 T Tbl 10 Spare parts Spare parts 37...

Страница 38: ... connecting Piezo Pirani and cold cathode sensors to the turbopump s TC electronic drive unit Seals with centering ring and filter Filter available in different pore sizes to protect the measuring system against contamination in the event of potential contaminating applications 14 2 Order accessories Description Order number TIC 010 adapter for two sensors PT R70 000 Centering ring with sintered m...

Страница 39: ... gas throughput 15 2 Technical data Parameter Value Measuring range air N2 5 10 8 1 10 2 hPa Maximum pressure absolute 10 000 hPa limited to inert gases Burst pressure absolute 13 000 hPa Measuring principle Cold cathode Accuracy N2 30 of measured value Repeatability N2 5 of measured value Tbl 13 Measured and pressure values Parameter Value Response time pressure dependent p 10 6 hPa 100 ms p 10 6...

Страница 40: ...olume and weight Parameter Value Relative humidity for 30 days of the year 1 10 8 1 10 2 hPa 70 non condensing 1 10 7 1 10 2 hPa 95 non condensing Mounting orientation Arbitrary Usage Only in indoor areas Installation altitude max 6000 m MSL Protection degree IP40 Tbl 16 Ambient conditions Parameter Value Operation 5 55 C Storage 40 70 C Bake out 150 C 2 Tbl 17 Temperatures Parameter Value Flange ...

Страница 41: ...KT 011 Stainless steel 1 4301 1 4016 Ignition aid Stainless steel 1 4310 Tbl 18 Substances in contact with the media Parameter Value Protection degree IP40 Output voltage 5 V DC Input voltage 24 V DC Weight 24 g Tbl 19 Technical data TIC 010 Technical data and dimensions 41 46 ...

Страница 42: ...15 3 Dimensions 15 79 DN 25 ISO KF 44 44 l Fig 14 Dimensions Dimensions in mm l Connecting cable length Technical data and dimensions 42 46 ...

Страница 43: ...KT 010 and IKT 011 with Molex connector conform to the UL standard UL 61010 1 2012 are certified to the CAN CSA standard CAN CSA C22 2 No 61010 1 12 https www certipedia com Certificate No 72142403 C US TÜV Rheinland ...

Страница 44: ...4 30 EU Restriction of the use of certain hazardous substances 2011 65 EU Restriction of the use of certain hazardous substances delegated directive 2015 863 EU Harmonized standards and applied national standards and specifications DIN EN 61000 6 2 2006 03 DIN EN 61000 6 3 2011 09 DIN EN 61010 1 2011 07 DIN EN 61326 1 2013 07 Signature Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany D...

Страница 45: ...45 46 ...

Страница 46: ... BG5163 ed C Date 2103 P N BG5163BEN ...

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