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Pfeiffer Vacuum HIQUAD QMG 700, Руководство по эксплуатации

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11

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Fig. 27:

QMA pin assignment

1 QMA GND

9

Filament Common

2 SPEC SRC RET 

7)

10

V4, field axis

3 V6, inner deflection

11

V0, Ref GND

4 V3, focus

12

Screen

5 V9, Wehnelt

13

V8, reserve

6 V5, extraction

14

V1, Ion Ref

7 Fi

15

SPEC SRC ON 

8)

8 Filament - / cathode

16

V7, outer deflection

QMA connection (potentials)

Switching on QMS 700 only with QMA cable

Only switch on QMS 700 with the QMA cable properly connected.

External voltage source

You must limit the external voltage source for V0 reliably to ≤2 mA.

● V1 related to V0
● V2 to V8 related to V1
● V9 related to V2

0

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.+

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V

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.0

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V

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.0

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.+

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0

V

-6

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.+

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.0

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+

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-4

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V

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.0

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.0

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+

3

0

0

V

V1

V9

V3

V4

V5

V6

V7

V8

V2

V0

QMA-GND

IONREF (V1)

Fig. 28:

Ion potentials at max. pos. IONREF (+150 V), positive polarity

7)

Reference signal for SPEC SRC ON

8)

+24 V if activated, max. 200 mA

Product description

29/70

Содержание HIQUAD QMG 700

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original QMG 700 HIQUAD Quadrupole mass spectrometer system...

Страница 2: ...act info pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all mod...

Страница 3: ...2 1 System chassis SC 700 19 3 2 2 Quadrupole controller board QC 700 19 3 2 3 Ion source supply IS 716 19 3 2 4 High voltage supply HV 701 20 3 2 5 High voltage supply HV 702 20 3 2 6 Input output mo...

Страница 4: ...ng analyzer QMA 4x0 47 5 9 Connecting IO 700 47 5 10 Connecting IO 720 47 6 Commissioning 48 7 Operation 49 8 Decommissioning 50 9 Maintenance 51 9 1 Cleaning the control unit and system chassis 51 9...

Страница 5: ...15 3 Analyzer QMA 4x0 67 15 4 Electrometer pre amplifier EP 422 67 15 5 Ion counter pre amplifier CP 400 68 EC Declaration of Conformity 69 Table of contents 5 70...

Страница 6: ...mponents 60 Tbl 19 Limits of use QMS 700 61 Tbl 20 Technical data SC 700 61 Tbl 21 Technical data QC 700 62 Tbl 22 Operating modes and parameters QC 700 62 Tbl 23 Mass flow rate operating modes QC 700...

Страница 7: ...n potentials at max neg IONREF 150 V negative polarity 30 Fig 30 Connections on HV 701 31 Fig 31 Connections on HV 702 31 Fig 32 Connections on IO 700 32 Fig 33 Block diagram of IO 700 33 Fig 34 View...

Страница 8: ...BG 5401 QUADERA software documentation Part of the software Declaration of conformity A component of these in structions Tbl 1 Applicable documents You can find these documents in the Pfeiffer Vacuum...

Страница 9: ...he document indicate useful information Note Tip 1 3 3 Stickers on the product This section describes all the stickers on the product along with their meanings SC 700 D 35614 Asslar Mod P N S N Input...

Страница 10: ...r QMA Quadrupole mass spectrometer analyzer QMH Quadrupole mass spectrometer high frequency generator QMS Quadrupole mass spectrometer control unit SC System chassis SEM Secondary electron multiplier...

Страница 11: ...afety instructions Safety instructions according to product life stages All safety instructions in this document are based on the results of a risk assessment Pfeiffer Vacuum has taken into account al...

Страница 12: ...s entered it Instead contact Pfeiffer Vacuum Service Always disconnect the power supply before cleaning the unit Risks during maintenance DANGER Danger to life due to electric voltage High voltages ar...

Страница 13: ...s before carrying out maintenance work Wear protective equipment 2 3 Safety precautions The product is designed according to the latest technology and recognized safety engineering rules Nevertheless...

Страница 14: ...Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party disregards this document does not use the product for its intended purpose carries out any modi...

Страница 15: ...ngineering field in accordance with nationally applicable regulations Knowledge of this documentation In addition these individuals must be familiar with applicable safety regulations and laws as well...

Страница 16: ...product only in accordance with these operating instructions 3 Carry out all work only on the basis of the complete operating instructions and applicable docu ments 4 Comply with the limits of use 5...

Страница 17: ...er pre amplifier CP 400 dependent on configura tions Performing ion count For ion counting use the CP 400 ion counter pre amplifier instead of the EP 422 electrometer pre amplifier The following block...

Страница 18: ...SEV 16 Power supply pack 7 Electrometer pre amplifier EP 422 2 17 Mains connection AC 8 Electrometer pre amplifier EP 422 1 18 Analog and digital inputs and outputs 9 Ion counter pre amplifier CP 400...

Страница 19: ...Quadrupole controller board QC 700 Quadrupole controller board QC 700 contains QMG 700 system controller and LAN USB interfaces to the PC Control of the HF stage Measurement signal processing Interfa...

Страница 20: ...ired high voltage for detecting positive and negative ions raised SEM 218 of analyzer QMA 4x0 with the required high voltage for detecting positive ions Fig 8 High voltage supply HV 702 3 2 6 Input ou...

Страница 21: ...r types Faraday collector SEM 217 SEM 218 both 90 off axis with integrated Faraday collector Fig 12 Analyzer QMA 4x0 3 5 Electrometer pre amplifier EP 422 The electrometer pre amplifier EP 422 amplifi...

Страница 22: ...ecovery in the case of overmodulation Fig 13 Electrometer pre amplifier EP 422 3 6 Ion counter pre amplifier CP 400 The ion counter pre amplifier CP 400 contains pulse decoupling an amplifier and a pu...

Страница 23: ...ion diagram 1 8 9 15 Fig 16 ANALOG I O pin assignment 1 Analog input channel 1 9 Analog input channel 1 2 Analog input channel 2 10 Analog input channel 2 3 Analog input channel 3 11 Analog input chan...

Страница 24: ...nnel 3 Channel 5 Channel 6 Channel 7 Channel 8 Channel 9 Channel 10 Channel 11 Channel 12 Channel 13 Channel 14 Channel 15 Channel 16 Channel 1 20 9 22 10 DO_V Optocoupler isolated Optocoupler isolate...

Страница 25: ...igital inputs 0 V 11 Digital input channel 1 3 4 24 24 V for digital input 12 Digital input channel 2 25 Digital input channel 4 13 Digital input channel 3 3 7 3 TP GAUGE connection Transmitter change...

Страница 26: ...ssigned 5 V supply 1 10 19 9 18 26 Fig 23 CTRL pin assignment Pin Signal word Signal type Description 1 GND GND above 100 to GND 10 GND GND 26 GND GND 2 RUN IN TTL input Input for external measuring c...

Страница 27: ...ove 200 20 AO MON 0 GND Reference signal for AO MON 0 above 200 to GND 8 AO MON 1 Analog output Freely applicable output 6 10 V 12 bit max 0 1mA above 200 21 AO MON 1 GND Reference signal for AO MON 1...

Страница 28: ...assignment Pin Signal word Signal type Description 1 EXT PROT 24 V digital input Filament protection input Keep the pin with activated external protection by means of potential free contact at GND int...

Страница 29: ...tching on QMS 700 only with QMA cable Only switch on QMS 700 with the QMA cable properly connected External voltage source You must limit the external voltage source for V0 reliably to 2 mA V1 related...

Страница 30: ...7 V V3 FOCUS 3 mA 20 mV 120 mV 1 6 0 V V4 F AXIS 3 mA 20 mV 120 mV 1 6 0 V V5 EXTRACT 100 A 58 82 mV 240 mV 1 6 0 V V6 DEF I 11 100 A 58 82 mV 240 mV 1 6 0 V V7 DEF O 12 100 A 58 82 mV 240 mV 1 6 0 V...

Страница 31: ...connection HV 3 7 7 Connections on HV 702 The function and configuration of HV 702 are dependent on the operating mode 3 1 2 Fig 31 Connections on HV 702 1 Conversion dynode connection CD 3 High volt...

Страница 32: ...USEM UCD 2 SEM positively raised Detection of negative ions HV SEM HV HV SEM HV positive high lev el voltage CD not used _ HV HV _ CP HV HV 702 CP HV_ _ USEM UBIAS 3 SEM negative ly raised Detection o...

Страница 33: ...yp 2 8 mA ISOLATION ISOLATION ISOLATION ISOLATION EXT 0V EXT 24 V R_LOAD 5 K V IN R_IN 100 K CAN GND CAN_L SHIELD CAN_H 24 V EXTERNAL 24 V POWER SUPPLY 0 V 24 V max 10 A blue 0 5 mm red 0 5 mm 5a 6c 5...

Страница 34: ...7 10 Connections on EP 422 1 2 Fig 35 Connections on EP 422 1 Connection for analyzer QMA 2 Connection cable to HF generator QMH permanently mounted 3 7 11 Connections on CP 400 You can find informat...

Страница 35: ...tion Cable Length m Order number 1 Connection IS 716 QMA 4x0 3 10 BG548082 T BG548083 T 2 Connection QC 700 QMH 4xx Extension cable 3 7 mounted on QMH 4xx BG448175 T 3 Connection EP 422 1 QMH 4xx 0 85...

Страница 36: ...90 SEM operating mode with HV 701 Position Cable jump plug Length m Order number 7 Connection EP 422 2 QMH 4xx 0 85 mounted on EP 422 8 HV connection HV 701 QMA 4x0 HV 3 10 BG541978 T BG541979 T 11 H...

Страница 37: ...38 Wiring for CP operating mode ion counter with HV 701 Position Cable jump plug Length m Order number 8 HV connection HV 701 CP 400 3 10 BG541978 T BG541979 T 10 Connection QC 700 CP 400 3 10 BG4481...

Страница 38: ...wiring applies to applications with HV 702 and operating mode 0 Position Cable jump plug Length m Order number 7 Connection EP 422 2 QMH 4xx 0 85 mounted on EP 422 8 HV connection HV 702 QMA 4x0 HV 3...

Страница 39: ...applications with HV 702 and operating mode 1 Position Cable jump plug Length m Order number 7 Connection EP 422 2 QMH 4xx 0 85 mounted on EP 422 8 HV connection HV 702 QMA 4x0 HV 3 10 BG541978 T BG54...

Страница 40: ...V 702 operating modes 2 and 3 3 9 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum To ensure clear identi...

Страница 41: ...otections prior to each transport 4 2 Storing the product NOTICE Damage caused by improper storage Improper storage will lead to damage to the product Static charging moisture etc will lead to defects...

Страница 42: ...e installation check that the connection leads are voltage free Conduct the electrical connection in accordance with locally applicable regulations Make sure that the local mains voltage and frequency...

Страница 43: ...ill lead to damage to the electronics and unreliable measuring results Meet appropriate protective measures against external voltages for example better arrange ment shielding earthing etc Do not moun...

Страница 44: ...ng pins in the plastic feet all the way in using a screwdriver handle part 4 Turn over the unit again 5 3 Installing or replacing plug in modules in system chassis NOTICE Damage to unit from electrost...

Страница 45: ...le is not fitted Install 3 8HP dummy plates if the IO 700 module is not fitted Optionally Install an IO 720 instead of IO 700 Install a 4HP dummy plate to the right of the IS 716 module Exception No d...

Страница 46: ...the red cable supplied for a direct Ethernet LAN connection Use the gray cable supplied for the connection via a switch or network 5 5 Installing electrometer pre amplifier EP 422 on analyzer Signal s...

Страница 47: ...lding to the extent that there is a proper electrical connection to the chassis potential of the back panel when closing and tightening the EMC cable gland Establish the wiring directly to the spring...

Страница 48: ...es complete systems optimally at the factory Therefore do not change anything without good reason Data transmission If the yellow LED of the Ethernet connection remains dark a problem has occurred dur...

Страница 49: ...information on the Quadera software in the software documentation as part of the software Operating QMG 700 with Quadera software Use the Quadera software to Set unit parameters Optimize unit paramete...

Страница 50: ...dera turns red Switching off system 1 Switch off the SEM and if necessary the filament 2 Terminate the connection between QMG 700 HiQuad and the PC in QUADERA 3 Click on the check mark in front of Con...

Страница 51: ...the unit if fluid has entered it Instead contact Pfeiffer Vacuum Service Always disconnect the power supply before cleaning the unit WARNING Health hazards due to cleaning agent The cleaning agent be...

Страница 52: ...can be seen and before the air circulation drops below the required level 2 Use a vacuum cleaner to remove the dust from the filter mat through the ventilation slots 3 Replace the filter mat in the ca...

Страница 53: ...the current supply against unauthorized or unintentional reactivation Do not insert any objects into the vent openings Never open an external power supply pack Never operate an open or defective devic...

Страница 54: ...ible cause Remedy The DC LED on the front panel of the unit remains dark when the mains voltage is applied and the mains switch is switched on Mains fuse defec tive Replace the mains fuse Tbl 15 Malfu...

Страница 55: ...arge Pfeiffer Vacuum decontaminates products not clearly declared Free of contamination at your expense Ship product safely Do not ship microbiological explosive or radioactively contaminated products...

Страница 56: ...ance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 12 1 General disposal information...

Страница 57: ...ity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represen...

Страница 58: ...duct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...

Страница 59: ...Description Order number Ion sources Axial ion source with tungsten filament BN845055 T Axial ion source with iridium filament Y2O3 coated PT 160 040 T Cross beam ion source with tungsten filament BN...

Страница 60: ...Order number EP 422 PT 444 570 T CP 400 PT 442 210 T QMH 400 1 1 128 u QMA 410 PT M23 067 QMH 400 5 1 300 512 u QMA 430 QMA 400 PT M23 066 QMS 700 with SC 700 and QC 700 PT M27 580 Tbl 18 System comp...

Страница 61: ...ection degree IP30 Overvoltage category II Degree of pollution 2 Tbl 19 Limits of use QMS 700 15 1 1 System chassis SC 700 Parameter Value Mains voltage 100 240 V AC 50 60 Hz Power consumption 500 W M...

Страница 62: ...ith FIR filter for the measured value STAIR Scan bargraph SAMPLE Single ground and MID PEAK L Peak search with level criterion PEAK F Peak search with FIR filter ADJUST C Rough search ADJUST F Fine se...

Страница 63: ...1 DWELL STAIR 2 SPEED SCAN u SPEED Tbl 27 Measuring ranges and resolution QC 700 Parameter Value Filter type Low pass two stage effective for pre amplifier and external inputs Filter time constants c...

Страница 64: ...ssis SC 700 Required plug in positions 1 Quantity per system max 4 Plug in position see chapter Installing or replacing plug in modules in system chas sis page 44 Weight 0 3 kg Tbl 33 Technical data H...

Страница 65: ...in positions 6 Quantity per system max 3 Plug in position see chapter Installing or replacing plug in modules in system chas sis page 44 Weight 1 4 kg Tbl 37 Technical data IO 700 Parameter Value Volt...

Страница 66: ...ence point The ground connections of 4 channels each are connected internally Tbl 41 Analog outputs IO 700 Parameter Value Module used WAGO 750 459 Number of channels 8 Resolution 12 bit Input resista...

Страница 67: ...QMA Connection input TNC coaxial plug type Connection output D Sub 9 pin pins Input voltage 16 V 0 2 V 10 mV ripple by QMS 700 Input current 10 mA by QMS 700 Quantity per system max 2 Storage temperat...

Страница 68: ...50 s 0 5 mV 10 7 A 10 8 A V 1 90 s 0 5 mV 10 9 A 10 10 A V 2 1 9 ms 2 mV 10 11 A 10 12 A V 2 2 6 ms 50 150 mV Tbl 46 Offset EP 422 15 5 Ion counter pre amplifier CP 400 You can find the technical dat...

Страница 69: ...irectives Basse tension 2014 35 CE Electromagnetic compatibility 2014 30 EU Restriction of the use of certain hazardous substances 2011 65 EU Article 2 Number 4 d e and j Harmonized standards and appl...

Страница 70: ...BG5400 ed B Date 2210 P N BG5400BEN...

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