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OPERATING INSTRUCTIONS

EN

Translation of the Original

HIPACE 450

Turbopump

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Содержание HiPace 300

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HIPACE 450 Turbopump...

Страница 2: ...fer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and varian...

Страница 3: ...g 18 3 1 3 Drive 19 3 2 Scope of delivery 19 3 3 Identifying the product 19 3 3 1 Product types 19 3 3 2 Product features 19 4 Transportation and Storage 20 4 1 Transport 20 4 2 Storage 20 5 Installat...

Страница 4: ...oir 41 7 3 1 Removing the operating fluid reservoir 42 7 3 2 Assembling the operating fluid reservoir 43 7 4 Replacing the electronic drive unit 44 7 4 1 Removing electronic drive unit 44 7 4 2 Instal...

Страница 5: ...ectronic drive unit TC 400 32 Tbl 10 Factory setting of the electronic drive unit for turbopumps when delivered 35 Tbl 11 Behavior and meaning of the LEDs on the electronic drive unit 37 Tbl 12 Factor...

Страница 6: ...and through hole 27 Fig 12 Flange connection CF F hexagon head screw and through hole 27 Fig 13 Flange connection CF F stud screw and tapped hole 28 Fig 14 Flange connection CF F stud screw and throu...

Страница 7: ...Operating instructions Electronic drive unit TC 400 EC EtherCat PT 0452 BN Declaration of conformity A component of these in structions Current documents are available from the Pfeiffer Vacuum Downloa...

Страница 8: ...ace 450 PM P07_ 5_ _ _ _ _ _ _ _ _ _ _ Type 12 IP54 P N n f Mass Made in Germany 20_ _ _ _ PM _ _ _ _ _ _ T 66000 1 min 1100 Hz 7 0 kg D 35614 Asslar Rating plate The rating plate of the turbopump is...

Страница 9: ...Light emitting diode FE Functional earth FKM Fluoropolymer rubber P xxx Electronic drive unit control parameters Printed in bold as a three digit number in square brackets Frequently displayed in conj...

Страница 10: ...amage to property Is used to highlight actions that are not associated with personal injury Instructions to avoid damage to property Notes tips or examples indicate important information about the pro...

Страница 11: ...on moving sharp edged parts when reaching into the open high vacuum flange With the high vacuum flange open access to sharp edged parts is possible A manual rotation of the rotor increases the danger...

Страница 12: ...ch on the vacuum pump immediately prior to operation Risks during operation WARNING Risk of burns on hot surfaces when using additional equipment for heating during operation The use of additional equ...

Страница 13: ...ng sharp edged parts when reaching into the open high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situations with risk of injury There is a risk...

Страница 14: ...bopump being sheared off in use The energy that this would release could throw the entire turbopump or shattered pieces from its interior through the surrounding space Potentially dangerous gases can...

Страница 15: ...2 Permissible ambient conditions Notes on ambient conditions The specified permissible ambient temperatures apply to operation of the turbopump at maximum permissible backing pressure or at maximum g...

Страница 16: ...documents in particular the safety maintenance and repair information 2 7 1 Ensuring personnel qualification Specialist for mechanical work Only a trained specialist may carry out mechanical work Wit...

Страница 17: ...intenance level 2 Customer with technical education Pfeiffer Vacuum service technician Maintenance level 3 Customer with Pfeiffer Vacuum service training Pfeiffer Vacuum service technician 2 7 3 Advan...

Страница 18: ...nection 5 Turbo rotor 13 Connecting panel of the electronic drive unit 6 Pump housing stainless steel 14 Connecting plug for voltage supply DCin 7 Pump base 15 LED operating mode display 8 Ground term...

Страница 19: ...1 Product types The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the family name the size which is based on the pumping speed of the vacuum pump and if requ...

Страница 20: ...weight specified on the rating plate Where possible always transport or ship the turbopump in its original packaging Always carry the turbopump with both hands Remove the protective cover only immedi...

Страница 21: ...ing installation Do not start the turbopump with open vacuum connections Always carry out the mechanical installation before electrical connection Prevent access to the high vacuum connection of the t...

Страница 22: ...inimum tensile strength of the flange material in all operating states in rela tion to the engagement depth of the fixing screws 170 N mm2 at 2 5 x d 270 N mm2 at 1 5 x d Maximum permissible rotor tem...

Страница 23: ...itable for use on vibration sensitive systems WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor gene...

Страница 24: ...onto ISO K ISO flange connections For the connection of flanges in ISO KF or ISO K design twisting may occur in the event of sudden blockage of the rotor despite correct installation Leak tightness of...

Страница 25: ...d components for the turbopump 6 Screw the hexagon head screws into the tapped holes Observe the minimum tensile strength of the flange material and the screw depth 7 Fasten the hexagon head screws cr...

Страница 26: ...ation with ISO F flange are Hexagon head screw and tapped hole Stud screw with tapped hole Stud screw with through hole Required tools Hexagonal wrench 15 WAF Calibrated torque wrench tightening facto...

Страница 27: ...pump with collar flange snap ring and centering ring to the counter flange accord ing to the figure 3 Use for all prescribed components for the turbopump 4 Fasten the screw connections cross wise in 3...

Страница 28: ...3 If used Insert the protective screen or splinter shield with clamping lugs downwards in the turbo pump high vacuum flange 4 Place the seal exactly in the hollow 5 Connect the flange with the compone...

Страница 29: ...from the Pfeiffer Vacuum range In this case the backing pump is also controlled directly via the turbopump electronic drive unit interfaces e g relay box or connection cable Required tools Allen key W...

Страница 30: ...if operating with high gas throughput Always use water cooling at ambient temperatures 35 C Parameter Cooling water Appearance filtered mechanically clear visually clear no turbidity no sediment free...

Страница 31: ...mpatible accessories for its products Information and ordering options for approved accessories for hybrid bearing turbo pumps can be found online Auxiliary connection to electronic drive unit TC 400...

Страница 32: ...ructions for the relevant accessory Note the existing configuration of existing connections Use the Pfeiffer Vacuum display and control unit DCU 002 or a DCU with integrated power supply pack 5 6 Conn...

Страница 33: ...e sure that the power supply pack meets the requirements in accordance with IEC 61010 1 IEC 60950 1 and IEC 62368 1 Where possible use original power supply packs or only power supply packs that corre...

Страница 34: ...ply voltage 2 Make sure that the power supply pack main switch is off prior to connection 3 Use a suitable connection cable from the Pfeiffer Vacuum accessories range 4 Insert the connecting cable int...

Страница 35: ...is set correctly by P 027 in the electronic drive unit Consult Pfeiffer Vacuum before you use gases with higher molecular masses 80 Important settings and function related variables are factory progra...

Страница 36: ...d to PLC levels Instructions for remote control operation See the operating instructions of the electronic drive unit for the standard version 6 2 3 Operation via connection E74 Operation is possible...

Страница 37: ...injury due to ejected objects Never exceed the permissible 1500 hPa absolute inlet pressure on the suction side or the vent ing and sealing gas connection Make sure that high process related over pres...

Страница 38: ...ly lines e g for cooling water or sealing gas 6 5 2 Venting CAUTION Risk of injuries due to contact with vacuum when venting While venting the vacuum pump there is a risk of minor injuries due to the...

Страница 39: ...ation in the event of a power failure 50 of rated speed 3600 s 3600 s Tbl 12 Factory settings for delayed venting in turbopumps General information for fast venting We recommend fast venting of larger...

Страница 40: ...pen high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situations with risk of injury There is a risk of cuts from accessing sharp edged rotating...

Страница 41: ...ottom part Partially disassemble the vacuum pump Replace the operating fluid reservoir Replace the bearing hous ing Function test Spare parts package 1 bearing Maintenance level 3 Overhaul Dismantle a...

Страница 42: ...id reservoir This information can be found on the pump rating plate You can find the safety data sheet in the Pfeiffer Vacuum Download Center Prerequisites Turbopump off Vacuum system vented to atmosp...

Страница 43: ...ed consumables Laboratory gloves Operating fluid reservoir Required tools Allen key WAF 3 Tweezers Calibrated torque wrench tightening factor 1 6 4 5 6 1 2 3 7 Fig 20 Assembling the operating fluid re...

Страница 44: ...Protection of electronic devices from electrostatic phenomena Backing up settings made by the customer The factory operating parameters are always preset in replacement units All settings made by the...

Страница 45: ...head screws from the electronic drive unit 3 Pull the old electronic drive unit off the turbopump taking care to keep it straight 7 4 2 Installing the electronic drive unit Required tools Allen key W...

Страница 46: ...P 777 NomSpdConf parameter in the electronic drive unit HiPace Nominal rotation speed 10 30 60 80 1500 Hz 300 1000 Hz 350 450 1100 Hz 400 700 800 820 Hz Tbl 14 Characteristic nominal rotation speeds o...

Страница 47: ...specified temperature range 9 In rooms with humid or aggressive atmospheres Hermetically seal the turbopump together with a drying agent in a plastic bag 8 2 Recommissioning NOTICE Risk of damage to...

Страница 48: ...must be disposed of in accordance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 9 1 G...

Страница 49: ...erial approved by Pfeiffer Vacuum for the installation WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the r...

Страница 50: ...play and control unit Thermal load due to lack of ventilation water flow too low fore vacuum pressure too high ambient temperature too high Reduce the thermal load Ensure adequate air supply Adjust th...

Страница 51: ...ity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represen...

Страница 52: ...duct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...

Страница 53: ...ation Size Part number Remark Pieces 1 Electronic drive unit TC 400 refer to the rating plate depending on the connection panel 1 2 Operating fluid reservoir refer to the rating plate incl capillary r...

Страница 54: ...he electronic drive unit of the turbopump enables useful control of backing pumps Depending on the backing pump used different operating modes are available Integrated pressure measurement Evaluation...

Страница 55: ...0 with TC 400 and TM 700 TCP 350 PM Z01 312 Air cooling shielded for HiPace 350 450 with TC 400 and TCP 350 PM Z01 374 Water cooling for HiPace 60 P HiPace 80 and for SplitFlow 50 80 with push in fit...

Страница 56: ...s measurement duration Sound pressure level at distance to vacuum pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 1 1 105 1000 100 750 Pa 0 01 1 10 5 1 0 01 1 10 3 7 5 1...

Страница 57: ...6000 W min 1 90 66000 W min 1 Performance curve in gas mode 0 vertex D 100 60000 W min 1 100 60000 W min 1 Performance curve in gas mode 1 vertex A 110 66000 W min 1 110 66000 W min 1 Performance curv...

Страница 58: ...um max for Ar 10 mbar 10 mbar Fore vacuum max for He 10 mbar 10 mbar Electronic drive unit TC 400 TC 400 Operating voltage DC 24 V 24 V Input voltage tolerance 5 5 Current max 12 5 A 12 5 A Power cons...

Страница 59: ...nical data for HiPace 450 with TC 400 24 V 14 3 Characteristics Rotation speed Hz 0 5 10 15 20 25 700 800 900 1 000 1 100 1 200 Gas throughput hPa l s Backing pump HiScroll 18 N hPa l s Ar hPa l s He...

Страница 60: ...ia 14 5 Dimensions Dimensions in mm 187 163 173 128 131 HV DN160ISO K n 1 8 0 53 n167 5 n118 M8 6 VV DN16ISO KF 166 7 130 Fig 25 Dimensions HiPace 450 TC 400 DN 160 ISO K 187 163 173 128 131 HV DN 160...

Страница 61: ...190 166 176 128 131 H V DN 160 CF F 53 118 M8 6 V V DN 16 ISO KF 169 7 130 Fig 27 Dimensions HiPace 450 TC 400 DN 160 CF F Technical data and dimensions 61 64...

Страница 62: ...substances delegated directive 2015 863 EU Harmonized standards and applied national standards and specifications DIN EN ISO 12100 2011 ISO 21360 1 2016 DIN EN 1012 2 2011 ISO 21360 4 2018 DIN EN 6100...

Страница 63: ...63 64...

Страница 64: ...PT0647 ed F Date 2108 P N PT0647DEN...

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