Pfeiffer Vacuum HiPace 300 P, Руководство по эксплуатации

Страница: 21 / 64

5 Installation
The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo-
pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching
the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic
energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec-
ond.
Comprehensive tests and calculations conforming to ISO 27892 confirm the safety of the turbopump
both against crashes (destruction of the rotor blades) and against bursting (breakage of the rotor shaft).
The experimental and theoretical results are expressed in safety measures and recommendations for
the correct and safe fastening of the turbopump.
5.1 Preparatory work
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
► Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
► Do not reach into the high vacuum connection.
► Wear protective gloves during installation.
► Do not start the turbopump with open vacuum connections.
► Always carry out the mechanical installation before electrical connection.
► Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
General notes for the installation of vacuum components
► Choose an installation location that permits access to the product and to supply lines at all times.
► Observe the ambient conditions given for the limits of use.
► Provide the highest possible level of cleanliness during assembly.
► Ensure that flange components during installation are grease-free, dust-free and dry.
Select the installation location
1. Observe the instructions for transport to the installation location.
2. Make sure that there are sufficient cooling options for the turbopump.
3. Install suitable shielding if the surrounding magnetic fields exceed the permissible levels.
4. Install suitable shielding so that the irradiated thermal output does not exceed the permissible val-
ues when high temperatures occur due to the process.
5. Observe the permissible temperatures for the vacuum connection.
5.2 Connecting the high vacuum side
5.2.1 Requirements for the dimensioning of a counter flange
NOTICE
Risk of damage due to incorrect counter flange design
Unevenness on the operator-side counter flange results in stresses in the vacuum pump housing,
even when properly attached. This can produce leakage or negative changes in running characteris-
tics.
► Adhere to the shape tolerances for the counter flange.
► Observe the maximum flatness deviations over the entire surface.
Installation
21/62