OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE 1200
Turbopump
Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HIPACE 1200 Turbopump...
Страница 2: ...fer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and varian...
Страница 3: ...ional properties 20 3 2 1 Cooling 21 3 2 2 Rotor bearing 21 3 2 3 Drive 21 3 3 Shipment 21 4 Transportation and Storage 22 4 1 Transport 22 4 2 Storage 23 5 Installation 24 5 1 Preparatory work 24 5 2...
Страница 4: ...e information 45 7 2 Maintenance intervals and responsibilities 45 7 3 Changing the operating fluid 46 7 3 1 Draining the operating fluid 46 7 3 2 Filling the operating fluid 47 7 4 Replacing the elec...
Страница 5: ...e set accessory connections on the electronic drive unit 37 Tbl 11 Terminal lay out of the power supply connector 38 Tbl 12 Preconfigured settings for turbopumps when delivered 40 Tbl 13 Behavior and...
Страница 6: ...rew and through hole 31 Fig 15 Flange connection CF F hexagon head screw and through hole 31 Fig 16 Flange connection CF F stud screw and tapped hole 32 Fig 17 Flange connection CF F stud screw and th...
Страница 7: ...ing instructions Electronic drive unit TC 1200 DN DeviceNet PT 0353 BN Operating instructions Electronic drive unit TC 1200 EC EtherCat PT 0455 BN Declaration of conformity A component of these in str...
Страница 8: ...M 006 336 T 37800 1 min 630 Hz 27 kg D 35614 Asslar Rating plate example Rating plates of individual assemblies are located on the lower part of the turbopump or on the relevant attachments Do not ope...
Страница 9: ...e se trouve pas sous pression atmosph rique Operating fluid filler screws note This sticker provides information on the safe handling of the screws on the operating fluid pump Operating fluid filler s...
Страница 10: ...r in square brackets Frequently displayed in conjunction with a short description Example P 312 software version remote 26 pole D Sub connecting socket on the turbopump electronic drive unit WAF width...
Страница 11: ...perty Notes tips or examples indicate important information about the product or about this docu ment 2 2 Safety instructions All safety instructions in this document are based on the results of the r...
Страница 12: ...ion rating of at least 10 000 A WARNING Risk of cuts on moving sharp edged parts when reaching into the open high vacuum flange With the high vacuum flange open access to sharp edged parts is possible...
Страница 13: ...ve equipment e g safety goggles and gloves Risks during operation WARNING Risk of burns on hot surfaces when using additional equipment for heating during operation The use of additional equipment for...
Страница 14: ...sub stances causes environmental damage Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media Decontaminate affected parts before carrying out...
Страница 15: ...h live components There is a risk of electric body contact and as a result the destruction of electronic components Never disconnect the turbopump and electronic drive unit from each other if power is...
Страница 16: ...a leak from damaged connections Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate There is the risk of damaging on site connections e g fore vacuum line and result...
Страница 17: ...g pressure or at maximum gas throughput depending on the cooling type The turbopump is intrinsically safe thanks to redundant temperature monitor ing The reduction in backing pressure or gas throughpu...
Страница 18: ...for mechanical work Only a trained specialist may carry out mechanical work Within the meaning of this document special ists are people responsible for construction mechanical installation troubleshoo...
Страница 19: ...ician Maintenance level 3 Customer with Pfeiffer Vacuum service training Pfeiffer Vacuum service technician 2 7 3 Advanced training with Pfeiffer Vacuum For optimal and trouble free use of this produc...
Страница 20: ...Standard version mini Compact version U Overhead version C Corrosive gas version P Process M Active magnetic bearing T Temperature management Plus Low vibration low magnetic field E High efficiency H...
Страница 21: ...magnetic bearing Fore vacuum side ball bearing with ceramic balls Turbopumps from the hybrid bearing HiPace series use ceramic ball bearings for the rotor bearing on the fore vacuum side The operatin...
Страница 22: ...he labels relating to the valid spatial position of the vacuum pump Observe the property labels on the type plate Drain off the operating fluid before moving or transporting the vacuum pump Only fill...
Страница 23: ...atial position and with the rotor axis vertically aligned 5 If necessary remove the eye bolts after transport and installation Keep the eye bolts for future use 4 2 Storage We recommend Pfeiffer Vacuu...
Страница 24: ...ing installation Do not start the turbopump with open vacuum connections Always carry out the mechanical installation before electrical connection Prevent access to the high vacuum connection of the t...
Страница 25: ...pth of the fixing screws 170 N mm2 at 2 5 x d 270 N mm2 at 1 5 x d Maximum permissible surrounding magnetic field 6 0 mT Maximum permissible irradiated thermal output 22 5 W Tbl 6 Requirements for the...
Страница 26: ...ibration compensators are suitable for use on vibration sensitive systems WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudd...
Страница 27: ...the operating fluid before moving or transporting the vacuum pump Only fill the vacuum pump with operating fluid after mechanical installation Fig 4 Mounting orientations of the standard version uprig...
Страница 28: ...ll prescribed components for the turbopump 4 Tighten the bracket screws cross wise in 3 steps Tightening torque 5 15 25 2 Nm 5 2 7 Attaching ISO K flange to ISO F The connection types for ISO K flange...
Страница 29: ...the side groove on the high vacuum flange of the turbopump 5 Attach the turbopump with collar flange snap ring and centering ring to the counter flange accord ing to the figure 6 Use all prescribed c...
Страница 30: ...urbopump use only the approved mounting kits from Pfeiffer Vacuum 2 Attach the turbopump with centering ring to the counter flange according to the figure 3 Use all prescribed components for the turbo...
Страница 31: ...ults in leaks and may cause process damage Always wear suitable gloves before touching or fitting any components Fit seals only if dry and free of grease Take care of damaged surfaces and cut edges Re...
Страница 32: ...connection CF F stud screw and through hole Connection of the stud screw and through hole 1 For the connection of the turbopump use only the approved mounting kits from Pfeiffer Vacuum 2 If used Inse...
Страница 33: ...doubt contact Pfeiffer Vacuum The operating fluid pump of the turbopump is situated beneath a protective cap The screws for filling the operating fluid are identified with a respective symbol The drai...
Страница 34: ...s fittings to accelerate There is the risk of damaging on site connections e g fore vacuum line and resulting leaks This results in leakage of process media In processes involving toxic media there is...
Страница 35: ...uids or condensate from the fore vacuum area 4 Observe the information in the operating manual of the backup pump or pumping station when connecting and operating it 5 5 Connecting the cooling water s...
Страница 36: ...water composition Connection to the turbopump External cooling water supply Internal thread G 1 4 Hose cable Hose nozzles included with shipment Inner hose diameter 7 to 8 mm Tbl 9 Requirements on the...
Страница 37: ...pump Acc B B1 Y 1 Venting valve B2 Y 2 Heating Tbl 10 Factory pre set accessory connections on the electronic drive unit Connecting accessory devices 1 Observe the installation instructions in the ope...
Страница 38: ...ns from electric shocks obtained from working with or on the unit Ensure safe integration into an emergency off safety circuit Do not carry out your own conversions or modifications on the unit WARNIN...
Страница 39: ...ins connection for the turbopump Make sure that you have the correct supply voltage Order a corresponding mains connection cable from the Pfeiffer Vacuum accessories range Assemble your own mains conn...
Страница 40: ...m before you use gases with higher molecular masses 80 Important settings and function related variables are factory programmed into the vacuum pump elec tronic drive unit as parameters Each parameter...
Страница 41: ...n is provided with an inverted alarm signal and an analog output Instructions for operation with E74 See the operating instructions of the electronic drive unit with E74 version 6 2 3 Operation via mu...
Страница 42: ...rs provided for this at the danger points Ensure adequate cooling down before working on the vacuum pump or in its vicinity Wear protective equipment e g gloves WARNING Risk of serious injury in the e...
Страница 43: ...ure Examples are an impermissible motor temperature or impermissibly high housing tempera ture Further reduction of drive power and thus decreasing speed can potentially lead to underrun the rotation...
Страница 44: ...ng valve is an optional accessory for installation on the turbopump The venting valve is normally closed Control is via the turbopump electronic drive unit and configura tion of parameters P 012 and P...
Страница 45: ...equipment WARNING Risk of cuts on moving sharp edged parts when reaching into the open high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situatio...
Страница 46: ...autions Do not allow tobacco products to come into contact with the operating fluid You can find the safety data sheet in the Download Center Prerequisites Turbopump switched off Turbopump cooled down...
Страница 47: ...to come into contact with the operating fluid NOTICE Destruction of the turbopump due to incorrect operation when filling with operating fluid The operating fluid filling quantity depends on the sele...
Страница 48: ...electrical energy dur ing its run down period If the turbopump and electronic drive unit are disconnected prematurely there is the risk of a short circuit to ground and consequently the destruction o...
Страница 49: ...atmospheric pressure see chapter Venting page 43 4 Interrupt the electric supply 5 Remove all cables from the electronic drive unit 6 If dismantling the turbopump from the system Seal all openings wit...
Страница 50: ...ke proof washer Fastening the electronic drive unit 1 Screw an M4 12 Allen head screw with shake proof washer into the bore in front of the power supply plug of the electronic drive unit 2 Screw an M4...
Страница 51: ...nfiguration and setting of electronic drive unit operating parameters Adjusting the nominal rotation speed confirmation 1 Observe the display and control unit operating instructions 2 See the electron...
Страница 52: ...mpe 1 Jahr 1 Bauen Sie die Turbopumpe ggf aus dem Vakuumsystem aus 2 Lassen Sie das Betriebsmittel der Turbopumpe ab 3 Entleeren und trocknen Sie das K hlwassersystem der Turbopumpe 4 Verschlie en Sie...
Страница 53: ...ange for Pfeiffer Vac uum Service to replace the bearing 5 Change the turbopump s operating fluid 6 Install the turbopump according to these instructions see chapter Installation page 24 7 Recommissio...
Страница 54: ...st be disposed of in accordance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 9 1 Gen...
Страница 55: ...or shattered pieces from its interior through the surrounding space Potentially dangerous gases can escape There is a risk of very serious injuries including death and extensive property damage Take...
Страница 56: ...P 700 via a dis play and control unit Thermal load due to lack of ventilation water flow too low fore vacuum pressure too high ambient temperature too high Reduce the thermal load Ensure adequate air...
Страница 57: ...ity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represen...
Страница 58: ...duct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...
Страница 59: ...el 1 2 remote mating plug PM 061 378 X with solder tags 1 3 Supply socket HAN 3 PM 061 200 T 1 4 Sealing gas valve 17 5 20 sccm PM Z01 313 1 5 Syringe 50 ml PM 006 915 U 1 6 Operating fluid F3 50 ml P...
Страница 60: ...tle without control Air cooling For processes with low gas throughputs and good fore vacuum pressure air cooling can be used inde pendently of a water supply Automatic control through the integrated e...
Страница 61: ...multifunction coating and integrated splinter shield DN 200 ISO K F PM 016 221 AU Centering ring with multifunction coating and integrated protection screen DN 200 ISO K F PM 016 222 AU Elastomer seal...
Страница 62: ...P 350 M12 PM 071 284 X Relay box shielded for backing pumps 1 phase 20 A for TC 400 1200 TM 700 and TCP 350 M12 PM 071 285 X TIC 010 Adapter for two sensors PT R70 000 RPT 010 Digital Piezo Pirani Sen...
Страница 63: ...istance to vacuum pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 1 1 105 1000 100 750 Pa 0 01 1 10 5 1 0 01 1 10 3 7 5 10 3 hPa 1 1 10 3 100 1 0 1 0 75 kPa 10 0 01 1000...
Страница 64: ...10 37800 W min 1 710 37800 W min 1 540 37800 W min 1 Power characteristic line in gas mode 1 vertex B 750 35400 W min 1 750 35400 W min 1 756 14400 W min 1 Rotation speed 2 37800 rpm 37800 rpm 37800 r...
Страница 65: ...03 Compression ratio for He 2 105 2 105 2 105 Compression ratio for N2 1 108 1 108 1 108 Power characteristic line in gas mode 0 vertex C 578 37800 W min 1 578 37800 W min 1 406 37800 W min 1 Power ch...
Страница 66: ...1 hPa l s 6 hPa l s Gas throughput at full rotational speed for H2 30 hPa l s 30 hPa l s 30 hPa l s Gas throughput at full rotational speed for He 30 hPa l s 30 hPa l s 16 hPa l s Gas throughput at fu...
Страница 67: ...d HiPace 1200 UC with TC 1200 DN 200 ISO K corrosive HiPace 1200 UC with TC 1200 DN 200 ISO F corrosive HiPace 1200 UC with TC 1200 DN 200 CF F corrosive Order number PM P03 918 PM P03 919 PM P04 191...
Страница 68: ...s 1 10 8 Pa m s Venting connection G 1 8 G 1 8 G 1 8 Connection pressure abs for venting sealing gas valve 1500 hPa 1500 hPa 1500 hPa Electronic drive unit TC 1200 TC 1200 TC 1200 Mains requirement vo...
Страница 69: ...ISO K 10 161 5 141 9 4 0 4 5 15 4 0 G 1 4 264 285 237 3 130 G 1 8 G 1 8 VV DN 40 ISO KF 210 1 378 3 196 5 HV DN 200 ISO F 304 8 70 Fig 31 HiPace 1200 DN 200 ISO F 70 10 161 5 141 9 4 0 4 5 15 4 0 G 1...
Страница 70: ...SO K 10 161 5 141 9 4 0 4 5 15 4 0 G 1 4 264 285 237 3 130 G 1 8 G 1 8 VV DN 40 ISO KF 210 1 378 3 196 5 HV DN 200 ISO F 304 8 70 Fig 34 HiPace 1200 U DN 200 ISO F 70 10 161 5 141 9 4 0 4 5 15 4 0 G 1...
Страница 71: ...of certain hazardous substances delegated directive 2015 863 EU Harmonized standards and applied national standards and specifications DIN EN ISO 12100 2011 ISO 21360 1 2016 DIN EN 1012 2 2011 ISO 21...
Страница 72: ...PT0240 ed J Date 2002 P N PT0240BEN...