Pfeiffer Vacuum HENA 201 R, Руководство по эксплуатации

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14 Technical data and dimensions
14.1 General
Basis for the technical data of Pfeiffer Vacuum rotary vane pumps:
● Specifications according to PNEUROP committee PN5
● ISO 21360-1: 2016: “Vacuum technology - Standard methods for measuring vacuum-pump per-
formance - Part 1: General description”
● Leak test to ascertain the integral leakage rate according to EN 1779: 1999 technique A1; with
20 % helium concentration, 10 s measurement duration
● Sound pressure level according to ISO 3744, class 2
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1
1 · 10
-3 100 1 0.1 0.75
bar 1000 1
1 · 10 5
1000 100 750
Pa 0.01
1 · 10
-5 1 0.01
1 · 10
-3
7.5 · 10
-3
hPa 1
1 · 10 -3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33
1.33 · 10 -3
133.32 1.33 0.133 1
1 Pa = 1 N/m
2
Tbl. 16: Conversion table: Pressure units
mbar l/s Pa m 3 /s sccm Torr l/s atm cm 3 /s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m 3 /s
10 1 592 7.5 9.87
sccm 1.69 · 10 -2 1.69 · 10 -3 1 1.27 · 10 -2 1.67 · 10 -2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm
3
/s
1.01 0.101 59.8 0.76 1
Tbl. 17: Conversion table: Units for gas throughput
14.2 Technical data
Classification Hena 201 R Hena 301 R
Operating fluid D1 D1
Connection: Atmospheric side Female thread G 2" Female thread G 2"
Connection: Vacuum side Female thread G 2" Female thread G 2"
Final pressure with gas ballast ≤ 1.5 hPa ≤ 1.5 hPa
Final pressure without gas ballast ≤ 5 · 10 -1 hPa ≤ 5 · 10 -1 hPa
Rated power 50 Hz 5.5 kW 7.5 kW
Rated power 60 Hz 6.6 kW 9.2 kW
Mains requirement: voltage (range) ±5 % ±5 %
Nominal pumping speed at 50 Hz 200 m³/h 300 m³/h
Nominal pumping speed at 60 Hz 240 m³/h 360 m³/h
Water vapor capacity 50 Hz 4000 g/h 5000 g/h
Water vapor capacity 60 Hz 4600 g/h 5800 g/h
Water vapor tolerance at 50 Hz 40 hPa 40 hPa
Water vapor tolerance at 60 Hz 40 hPa 40 hPa
Leak rate safety valve
≤ 8 · 10 -3 Pa m³/s ≤ 8 · 10 -3 Pa m³/s
Rotation speed at 50 Hz 1500 rpm 1500 rpm
Technical data and dimensions
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