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OPERATING INSTRUCTIONS

Translation of the Original

GSD 350 OMNISTAR

∣

THERMOSTAR

Gas analysis system

Содержание GSD 350 OMNISTAR

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original GSD 350 OMNISTAR THERMOSTAR Gas analysis system...

Страница 2: ...info pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models...

Страница 3: ...m 20 3 Product description 21 3 1 Functional description 21 3 1 1 OmniStar 21 3 1 2 ThermoStar 22 3 1 3 Corrosive gas version 22 3 2 Controls and indicators 22 3 2 1 Version with display 22 3 2 2 Vers...

Страница 4: ...1 Switching on unit 50 7 2 Starting pumping system 50 8 Operation via the display 52 8 1 Dashboard screen 52 8 2 Menu structure with functions 53 8 3 Info menu 54 8 4 Settings menu 55 8 4 1 Creating...

Страница 5: ...ide and orifice 89 10 7 4Installing gas inlet flange 90 10 8 Servicing capillary 90 10 8 1Shortening stainless steel capillaries 91 10 8 2Replacing stainless steel capillary 92 10 8 3Trimming quartz c...

Страница 6: ...Service solutions by Pfeiffer Vacuum 105 15 Spare parts 107 16 Special tool 110 17 Accessories 111 17 1 Accessory information 111 17 2 Ordering accessories 111 18 Technical data and dimensions 112 18...

Страница 7: ...l 10 Status of the Ethernet connection 49 Tbl 11 Menu structure with functions 54 Tbl 12 Maintenance work and intervals 72 Tbl 13 Determined sensitivity of the mass spectrometer 81 Tbl 14 Troubleshoot...

Страница 8: ...ecting the sealing gas line 39 Fig 27 Connecting the capillary 40 Fig 28 Position of the capillary hose upon delivery 41 Fig 29 Changing IP address of the GSD 350 via the web interface 43 Fig 30 Conne...

Страница 9: ...moving gas inlet flange 88 Fig 67 Gas guide approx 1 2 mm behind the end of the ceramic sleeve 89 Fig 68 Length of stainless steel capillary with clamping collar fitting 91 Fig 69 Notch and snap off t...

Страница 10: ...ing instructions MVP 010 3 DC PU 0071 Turbopump operating instructions HiPace 80 PT 0208 Turbopump supplementary information SplitFlow 80 PT 0635 Electronic drive unit operating instructions TC 110 PT...

Страница 11: ...iants Example of breakdown for article number PT Q80 217 110 OmniStar version Standard version Analyzer with filament made of Ir Y2O3 without calibration unit Gas inlet with heating up to 200 C and 1...

Страница 12: ...ction step A horizontal solid triangle indicates the only step in an action This is an individual action step Sequence of multi part action steps The numerical list indicates an action with multiple n...

Страница 13: ...left right The orientation left and right is from the display operator s view 1 3 5 Abbreviations Abbreviation Explanation OD Outer diameter AI Analog input AO Analog output ATEX Areas with a risk of...

Страница 14: ...pulse width modulation in which one technical variable e g the electrical voltage changes between 2 values RJ 45 Standardized plug and socket connection for telecommunication cabling registered jack s...

Страница 15: ...n NOTICE Danger of damage to property Is used to highlight actions that are not associated with personal injury Instructions to avoid damage to property Notes tips or examples indicate important infor...

Страница 16: ...erly connected protective earthing earthed conductor Plug the mains plug into a socket with earthing contact only Always connect the mains cable prior to all other cables to ensure continuous protecti...

Страница 17: ...f there is visible damage there is a risk of death when commissioning the device Work on the open device must only be carried out by trained specialist personnel Before carrying out any installation a...

Страница 18: ...ices or parts of them During maintenance work there is a risk to health from contact with these poisonous substances Illegal disposal of toxic sub stances causes environmental damage Take suitable saf...

Страница 19: ...t temperature 10 to 40 Tbl 5 Permissible ambient conditions 2 5 Proper use The gas analysis system is used for manually controlled or automatic analysis for non corrosive and non flammable gases The c...

Страница 20: ...ning troubleshooting and maintenance of the product and who have the following qualifications Qualification in the electrical engineering field in accordance with nationally applicable regulations Kno...

Страница 21: ...from 1000 hPa to the operating pressure of the mass spectrometer The gas analysis unit and the high vacuum and gas transport system are the same in both OmniStar and ThermoStar versions 3 1 1 OmniStar...

Страница 22: ...as version 1 6 P 5 4 8 7 9 2 3 Fig 4 Additionally sealing gas supply in corrosive gas version 1 Connection to the vacuum chamber 6 Sealing gas valve 2 Exhaust gas connection 7 Sealing gas connection 3...

Страница 23: ...ed operating status reached dark green activated operating status not yet reached light gray not activated dark gray switched off switched off status not yet reached Checkmark on status icon stable st...

Страница 24: ...th fans at the sides Ventilation openings on the top and bottom side of the removable display 1 8 9 10 11 12 2 3 4 5 6 7 Fig 6 Housing parts 1 Housing cover 8 Ventilation opening outlet 2 3 Optional c...

Страница 25: ...gas inlet and split flow valves are closed no gas flows into the vacuum chamber This makes it possible to determine the vacuum chamber background value with the mass spectrometer and subtract it from...

Страница 26: ...u A glass storage vessel with perfluortributylamine PFTBA serves as a calibration medium and is inserted into the vacuum chamber via an orifice and shut off valve The connection to the vacuum chamber...

Страница 27: ...nnection G 1 4 on the turbopump consists of a connection hose For defined dis posal of the pumped gas the diaphragm pump has an exhaust line that can you can connect to a local gas disposal line or ro...

Страница 28: ...trations of the admitted gases To calculate the toxicity of the sealing gas it can be assumed that the sealing gas dilutes the concentrations of the inlet gases by a factor 100 14 15 13 11 1 2 4 10 9...

Страница 29: ...t inadvertent touching Display warning signs Make sure that the product has cooled down before performing work Wear protective gloves in accordance with EN 420 The unit s heating units can be fully co...

Страница 30: ...s a heating cartridge in the valve block The gas inlet heating is always switched on and off parallel to the capillary heating The GSD 350 automatically adjusts the temperature of the gas inlet You ca...

Страница 31: ...nd control the entire turbopump Diaphragm pump electronic drive unit The electronic drive unit is a permanent component of the diaphragm pump The purpose of the elec tronic drive unit is to monitor an...

Страница 32: ...hermoStar installation hardware and small parts Allen key WAF 2 WAF 2 5 and WAF 3 Metric open end wrenches WAF 8 WAF 10 2x and WAF 14 Imperial open end wrenches WAF 5 16 WAF 3 8 and WAF 9 16 Two sided...

Страница 33: ...l for the orifice of the gas inlet system Fig 19 Mounting aid for calibration gas support Unpacking the product and checking completeness of the shipment 1 Unpack the product 2 Remove the transport fa...

Страница 34: ...al attention when transporting products manually Do not stack the products Wear protective equipment e g safety shoes 4 1 Transporting product NOTICE Damage caused by incorrect transportation Transpor...

Страница 35: ...commend storing the product in its original packaging General information for safe storage Store the product in a cool dry dust free place where it is protected against impacts and me chanical vibrati...

Страница 36: ...d air filter if necessary Fig 21 Minimum lateral distances of the unit Procedure 1 Always keep an area of 25 mm clear around the unit 2 If you install the unit in a cabinet Make sure that the cabinet...

Страница 37: ...xhaust duct WARNING Danger of poisoning due to toxic process media escaping from the exhaust pipe During operation with no exhaust line the vacuum pump allows exhaust gases and vapors to escape freely...

Страница 38: ...uct to the unit if you are operating the unit with corrosive substances 3 Observe the local regulations for handling process gases 5 5 Connecting the sealing gas line 5 5 1 Trimming the sealing gas ho...

Страница 39: ...cause damage to the unit s sampling system Observe the bending radius 200 C capillary hose 50 mm 350 C capillary hose 200 mm Do not additionally insulate the capillary heating Do not additionally cove...

Страница 40: ...the measurement point 4 Use the stainless capillary tube adapter cable from the Pfeiffer Vacuum accessories range 5 Fix the capillary tube in place 6 Only clamp the capillary tube in the solid inflexi...

Страница 41: ...network uses IP addresses as a means of identifying individual units IP addresses are unique within a network but are not universal This means that only one unit in a network can have a certain IP ad...

Страница 42: ...D 350 use IPv4 IP addresses IPv4 IP addresses consist of 32 bits in dotted decimal notation They consist of four decimal numbers which are each separated from 0 to 255 by full stops for exam ple 192 1...

Страница 43: ...Changing the host computer IP address Administrator rights The following steps apply to the Windows 10 operating system Changing the host comput er IP address requires administrator rights Contact yo...

Страница 44: ...s voltage and frequency match rating plate specifications Make sure that the mains cable and extension cable meet the requirements for double isolation between input voltage and output voltage in acco...

Страница 45: ...with earthing contact only Always connect the mains cable prior to all other cables to ensure continuous protective earth ing Fig 31 Mains connection with IEC 320 C13 socket Connecting the power suppl...

Страница 46: ...onductor is located below the power supply pack The connection to the functional earth is located in the unit s connection panel 6 3 User I O connection NOTICE Impairment of electrical connections cau...

Страница 47: ...y open contact NO USER I O connection Pin 15 relay normally closed contact NC 1 8 9 15 Fig 33 USER I O connection 1 Ground GND 9 Analog ground PrismaPro EXT I O 2 Digital input DI1 10 Ground GND 3 Rel...

Страница 48: ...put signals simultaneously or control program sequences Total number of channels 3 AUX IO connection AI3 AI5 Input impedance 50 k Sampling rate 16 bit Analog output The analog outputs allow the output...

Страница 49: ...data TD 4 5 7 8 Not used 3 Reception data RD LED Status Meaning Green link lights up Hardware connection exists dark No hardware connection Yellow activity lit up flickering Data transmission runs dar...

Страница 50: ...Procedure 1 Switch on the master switch The unit starts up Once the electronics and the internal VLAN switch have booted the sys tem is ready for operation and can be controlled using the display or...

Страница 51: ...ontrol screen Pumping down the vacuum system 1 Switch to the Control screen 2 Press the Pump down button see chapter Pumping down the vacuum system page 64 The unit is ready for measuring Commissionin...

Страница 52: ...not save the measured data of measurements via the display Use the web interface You cannot save the measured data of measurements via the web interface Performing complex analytical measuring tasks U...

Страница 53: ...Menu structure with functions Menu Subprograms functions and information 1st Level 2nd Level Info see page 54 Vacuum pumps Diaphragm pump Turbopump Sensors Gauges Sealing gas sensor Valves Metering v...

Страница 54: ...Messages see page 62 Active messages history and confir mation Content history filter for errors warn ings info inactive filters grayed out Control see page 63 Pump down to Vent Heating on off Meterin...

Страница 55: ...ngs menu contains the following functions and submenus Recipes submenu Creating editing and deleting measurement recipes Heating submenu Specify the setpoint temperatures for heating and set the heati...

Страница 56: ...red parameter 2 Press the parameter field A numerical entry field appears 3 Enter the desired value For values outside the permissible value range the GSD 350 automatically assumes the highest or lowe...

Страница 57: ...easurement recipe 3 Select Spectrum Scan measuring mode 4 Define the mass range by entering the start and end mass FromAMU and ToAMU 5 Define the number of measuring points per mass PointsPerAMU 6 Def...

Страница 58: ...e you entered or Press Back to discard the current input or Press Delete to delete the current measurement recipe 8 4 2 Adjusting the heating units Overheating protection of heating units All heating...

Страница 59: ...tal pressure gauges If possible leave the total pressure gauges switched on at all times to protect filaments and vac uum pumps of the GSD 350 Switch the total pressure gauge off temporarily with the...

Страница 60: ...English standard German Setting the time and date 1 Tap the date and time on the display 2 Set the date 3 Set the time 4 Select Save to confirm the settings 8 4 5 Setting autostart functions Fig 46 Au...

Страница 61: ...o not switch off the GSD 350 in the evacuated state Setting up the IP address for the GSD 350 1 Enter the new static IP address The IP address 192 168 2 xxx is reserved for internal services and canno...

Страница 62: ...enu NOTICE Property damage due to unintended changes in the Service menu Improper changes in the Service menu impair unit functions and cause damage to the unit and its components The Service menu is...

Страница 63: ...the vacuum diagram of the system and its important parameters Depending on the operating status of the unit and the type of unit the menu offers the following func tions Pump down Vent vacuum system S...

Страница 64: ...vacuum system reaches a pressure of 5 10 5 hPa The GSD 350 is now ready to measure vacuum ready 8 6 2 Venting vacuum system Prerequisites Ongoing measurements completed see chapter Measurement menu pa...

Страница 65: ...quired set temperature 5 C Switching the heating off 1 Switch to the Control menu 2 Press the Heating off button Switch off sequence The GSD 350 switches the capillary heating and the gas inlet heatin...

Страница 66: ...ut off button Sequence on terminating The GSD 350 transitions from Bake out on state to Bake out off state The GSD 350 switches the vacuum chamber heating cartridges off As of a threshold value of 40...

Страница 67: ...valve if the emission is switched off 2 Wait until the pressure in the vacuum chamber has dropped below 1 10 5 hPa before switching on the filament 3 Switch to the Control menu 4 Press the Open calib...

Страница 68: ...on multiplier 2 In the Measurement menu press the Start button 3 If necessary toggle the display between linear and logarithmic Stopping the measurement 1 In the Measurement menu press the Stop button...

Страница 69: ...pillary 2 Allow the GSD 350 to run for another approx 30 minutes to flush residues of corrosive gases and condensable gases out of the system Switching off unit 1 Switch the EM of the mass spectromete...

Страница 70: ...ls are attached to the unit in such a way that you can open the following parts of the GSD 350 without removing a warranty seal Gas inlet Turbopump operating fluid reservoir Service opening for the ca...

Страница 71: ...Replace filament tungsten If required After the first of the 2 fila ments fails 1 Filament unit Replace filament Ir Y2O3 1 Filament unit Replace ion source tungsten filaments If soiled 1 Ion source Re...

Страница 72: ...rom the current supply Never open the device with the current supply connected Secure the current supply against unauthorized or unintentional reactivation Never operate an open or defective device Se...

Страница 73: ...he gas inlet cover There is no need to remove the gas inlet cover to remove the side covers Warranty claim Opening the device during the warranty period or damaging removing the warranty seal will voi...

Страница 74: ...or damaging removing the warranty seal will void the warranty The warranty seals are attached to the unit in such a way that you can open the following parts of the GSD 350 without removing a warrant...

Страница 75: ...g cleaning agents observe the applicable regulations Adhere to safety measures regarding handling and disposal of cleaning agents Be aware of potential reactions with product materials NOTICE Damage c...

Страница 76: ...ee and before the air circulation drops below the required level 2 Hold the fan firmly to prevent the induction of current to the fan 3 Use a vacuum cleaner to remove the dust from the protection scre...

Страница 77: ...again 7 Remove the diaphragm pump s transport protection see chapter Removing transport protection for the diaphragm pump page 36 10 3 2 Replacing the venting valve Pfeiffer Vacuum Service handles the...

Страница 78: ...m pump carrier 6 Transport protection lug 13 Shoulder screw 7 Transport protection 14 Diaphragm pump 1 2 Fig 58 Connect the exhaust gas and intake hose and draw off 1 Release ring 2 Hose Removing diap...

Страница 79: ...r to the dia phragm pump 5 Position the diaphragm pump with the diaphragm pump carrier on the fastening plate 6 Screw the hexagon socket screws with lock washers into the diaphragm pump carrier 7 Fast...

Страница 80: ...n necessary Carry out all work in a well lit area Mass spectrometer operating instructions Information on disassembly and assembly of the electronic unit QME and analyzer QMA is available in the Prism...

Страница 81: ...ctrometer Replacing the filaments If one of the two filaments fails measuring may continue temporarily with the second filament Recommendation Replace both filaments as soon as possible if one of the...

Страница 82: ...T For replacing the total pressure gauge Total pressure gauge order number PT R40 351 5 6 7 10 9 8 2 3 4 1 Fig 61 Total pressure gauge on the gas analysis unit 1 Elbow fitting with insulating pad not...

Страница 83: ...ed the desired results If the pressure in the GSD 350 does not increase at all or only increases marginally after opening the metering valve pressure remains at 1 10 6 hPa then the capillary or orific...

Страница 84: ...ll the heat conductor plate out from under the valve block and place it on top of the GSD 350 3 Remove the spools from the valve bodies on both valves 4 Open the capillary fitting on the valve block w...

Страница 85: ...with the special tool gently tap the gas inlet on a soft surface to make it fall out 5 Locate the new orifice on the gas guide in the correct orientation so that the matt side is visible when you look...

Страница 86: ...gas guide is complete Make sure that the compression spring and the ceramic sleeve are located on the gas guide part Remove missing parts from the vacuum chamber before starting up the GSD 350 again P...

Страница 87: ...ry does not achieve the desired results If the pressure in the GSD 350 is permanently 1 10 6 hPa despite atmospheric pressure at the gas inlet then the capillary or orifice on the gas inlet is probabl...

Страница 88: ...the gas inlet flange and pull the quartz capillary out there 4 Loosen the temperature sensor s rounded head screw and clamp 5 Remove the temperature sensor 6 Fasten the two hexagon socket screws and...

Страница 89: ...GSD 350 switched off Power cable disconnected Vacuum system at a standstill and vented to atmospheric pressure Gas inlet removed Required tools Special tool for the orifice of the gas inlet system Ope...

Страница 90: ...4 Open end wrench WAF 3 8 Procedure 1 Check the seat of the compression spring and ceramic sleeve 2 Carefully insert the gas inlet flange into the connection flange on the vacuum chamber 3 Tighten the...

Страница 91: ...Tube or capillary cutter 1 16 knife file 1 2 3 Fig 68 Length of stainless steel capillary with clamping collar fitting 1 Stainless steel capillary 3 Capillary seal ferrule 2 Clamping collar fitting 1...

Страница 92: ...lary diameter too small 10 8 2 Replacing stainless steel capillary Prerequisites GSD 350 switched off Power cable disconnected Vacuum system at a standstill and vented to atmospheric pressure Stainles...

Страница 93: ...ng quartz capillaries CAUTION Risk of injury due to splintering of the quartz capillary Quartz capillaries splinter in case of unintended use There is a risk of eye injuries due to splinters being pro...

Страница 94: ...ected from measurement point Gas inlet cover removed Insulating collar removed Required tools Open end wrench WAF 1 4 Open end wrench WAF 3 8 Capillary cutting tool Spare parts required Quartz capilla...

Страница 95: ...9 1 Replacing the capillary hose Pfeiffer Vacuum Service handles the replacement Contact Pfeiffer Vacuum Service 10 9 2 Maintaining the gas inlet heating If the GSD 350 has a defect on the gas inlet...

Страница 96: ...e rear side of the display fasten the countersunk screws of the cable fasteners 6 Place the display in the GSD 350 During the run up the GSD 350 automatically synchronizes the display with the configu...

Страница 97: ...r calibration gas support Required consumables Calibration medium PFTBA order number PT 167 031 1 2 3 4 5 6 7 8 9 10 Fig 74 Calibration unit 1 Shut off valve EVI 005 M 6 Compression coupling 2 Seal 7...

Страница 98: ...ten the cover on the housing base with the countersunk screw 10 11 2 Replacing the calibration valve Pfeiffer Vacuum Service handles the replacement Contact Pfeiffer Vacuum Service 10 12 Additional ma...

Страница 99: ...Check the plug and socket con nection of the Ethernet cable be tween PoE and supervisor board After the Pump down control command the diaphragm pumps fail to start up icon remains light gray Cable co...

Страница 100: ...in the gas inlet area Fore vacuum pres sure too high Check the vacuum connection diaphragm pump turbopump for leakages Condensate in the diaphragm pump 1 Dismantle and clean the dia phragm pump 2 Wip...

Страница 101: ...he capillary Capillary blocked Trim the capillary or replace the capillary Orifice blocked Replace the orifice Metering valve fails to open only for Om niStar Delay time for valve opening not yet comp...

Страница 102: ...Delay time for vent ing not yet complet ed Wait for the delay time of 15 minutes to complete The time is shown top right in the dis play After the Vent control command the venting valve fails to open...

Страница 103: ...eiffer Vacuum decontaminates products not clearly declared Free of contamination at your expense Instructions for safe shipping Do not ship microbiological explosive or radioactively contaminated prod...

Страница 104: ...cordance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 13 1 General disposal informat...

Страница 105: ...ty You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represent...

Страница 106: ...uct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...

Страница 107: ...thout stainless steel capillary PT 167 013 T ThermoStar Flange insert orifice 50 m 2 O rings and internal gas guide without quartz capillary Spare parts set PT 167 014 T OmniStar and ThermoStar 2 O ri...

Страница 108: ...740 T Operating fluid reservoir with capillary rods Sealing gas system Sealing gas valve PM Z01 310 A Exhaust gas connection PT 167 011 Exhaust gas connection 6 mm for assembly in housing wall Display...

Страница 109: ...utor plug 4x R 1 8 4 mm 1 IQSLV4 184 Schott plug connector 4 mm 1 IQSS 40 Schott plug connector 6 mm 1 IQSS 60 Y plug connector 6 mm 6 mm 1 IQSY 60 Y angled plug connector I O 1 8 thread 6 mm 1 IQSYTF...

Страница 110: ...ge 76 Centering gauge for QMA PT 167 082 see chapter Maintaining QMA 250 M ana lyzer page 80 Mounting aid for calibration gas support PT 167 081 see chapter Refilling calibration medi um page 97 Tbl 1...

Страница 111: ...ite 17 1 Accessory information Capillary hose adapter The capillary hose adapter is used to reliably connect the capillary hose Fig 78 Capillary hose adapter 17 2 Ordering accessories Description Orde...

Страница 112: ...00 u 1 to 200 u 1 to 300 u Quadrupole mass spectrometer Type PrismaPro QMG 250 M1 PrismaPro QMG 250 M2 PrismaPro QMG 250 M3 Detector C SEM Ion source Crossbeam C B Number of filaments 2 Sensor perform...

Страница 113: ...Installation altitude 2 000 m above sea level Protection class I Overvoltage category II Protection degree IP30 Degree of pollution 2 Materials on vacuum side Capillary Stainless steel quartz glass d...

Страница 114: ...tching voltage of relays 24 V AC DC Switching current of relays 1 A Relay for pumping system status USER I O connection Pins 13 14 and 15 Connector assembly USER I O 15 pin D Sub AUX I O 25 pin D Sub...

Страница 115: ...requirements for laboratory equipment for the heating of materials CAN CSA No 61010 1 2012 GI1 GI2 R2017 Safety requirements for electrical equipment for measurement control and laboratory use Part 1...

Страница 116: ...e use of certain hazardous substances 2011 65 EU Restriction of the use of certain hazardous substances delegated directive 2015 863 EU Harmonized standards and applied national standards and specific...

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Страница 120: ...DA0105 ed B Date 2204 P N DA0105BEN...

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