BG
5041 BEN
/ B
(20
16-0
7
)
OPE
PTR
FullRan
ERATING I
R 91
ge® Gauge
INSTRUCT
TIONS
Trranslation of the original instrucctions
Страница 1: ...BG 5041 BEN B 2016 07 OPE PTR FullRan ERATING I R 91 ge Gauge INSTRUCT TIONS Tr ranslation of the original instruc ctions ...
Страница 2: ...ation t applies to produc 310 DN 25 ISO 310 DN 40 ISO 310 DN 40 CF ber No can be tak otherwise in the espond to gauges They apply to th e right to make tec BG 5041 BE fer Vacuum pleas t nameplate For c into the space pro cts with part numb O KF O KF F F ken from the prod legends the illust s with vacuum con e other gauges by chnical changes w EN B 2016 07 se specify the convenient ovided below ber...
Страница 3: ...measurement unit for gauges or with another suitable controller Functional Principle The gauge consists of two separate measuring systems the Pirani and the cold cathode system according to the inverted magnetron principle They are combined in such a way that for the user they behave like one measuring system Over the whole measurement range the measuring signal is output as a logarithm of the pre...
Страница 4: ...e Dependence PTR 91 13 3 Installation 16 3 1 Vacuum Connection 16 3 2 Power Connection 20 4 Operation 22 4 1 Status Indication 22 4 2 Put Gauge Into Operation 23 4 3 Gas Type Dependence 23 4 4 Ignition Delay 24 4 7 Contamination 24 5 Deinstallation 26 6 Maintenance Repair 28 6 1 Adjusting the Gauge 28 6 2 Cleaning the Gauge Replacing Parts 30 6 2 1 Troubleshooting measuring chamber 31 6 2 2 Replac...
Страница 5: ...s 41 10 Accessories 41 11 Spare Parts 42 11 1 Ignition Aid 42 11 2 Ionization chamber 42 11 3 Measuring Chamber Cpl Spare Sensor 43 ETL Certification 44 EU Declaration of Conformity 45 For cross references within this document the symbol XY is used ...
Страница 6: ...ct handling or use Disregard can lead to malfunctions or minor equipment damage Consultation of operating manual required symbol printed on the product nameplate Notice Labeling 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces sary experience or who have been instructed by the en...
Страница 7: ...the relevant regulations and take the necessary precautions when handling contamin ated parts Communicate the safety instructions to all other users 1 4 Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of intervention...
Страница 8: ...easurement range 1 397 8 6 V dc Voltage vs pressure 0 6 V decade logarithmic Error signal 9 5 10 5 V dc Output impedance 2 4 7 Ω short circuit proof Load impedance 10 kΩ short circuit proof Step response time 1 10 6 mbar 1 10 6 1 10 8 mbar pressure dependent 100 ms 1 s Gauge identification 85 kΩ referenced to supply common Status signal digital output Current rating 100 mA High voltage is ON 14 5 ...
Страница 9: ...High voltage in the measuring chamber Ignition voltage Operating voltage 4 5 kV 3 3 kV Current in the measuring chamber High current Electrical connection FCC 68 8 pin Sensor cable 8 pin shielded Cable length 50 m 0 14 mm2 conductor Grounding concept Power Connection Vacuum connection signal common connected via 10 kΩ potential difference 16 V Supply common signal common conducted separately diffe...
Страница 10: ...eel 1 4310 Internal volume DN 25 ISO KF DN 40 ISO KF DN 40 CF F 19 9 cm3 20 9 cm3 25 2 cm3 Permissible pressure absolute 10 bar limited to inert gases 55 C Bursting pressure absolute 13 bar Permissible temperatures Operation Pirani filament PTR 91 Bakeout Storage 5 C 55 C 120 C 150 C 3 40 C 70 C Relative humidity for 30 days a year 1 10 8 1 10 2 mbar 1 10 7 1 10 2 mbar 70 non condensing 95 non con...
Страница 11: ...BG 504 41 BEN B 2016 0 Dimensions Weight DN 25 ISO DN 40 ISO DN 40 CF F 07 mm KF KF F 280 g 320 g 570 g 11 ...
Страница 12: ...50 Torr 1 10 7 Pa p 1 105 Pa mbar Pa Torr c 6 798 5 598 6 873 d 11 33 9 333 11 46 where p pressure U measurement signal c d constant pressure unit dependent 1E 04 1E 02 1E 00 1E 02 1E 04 1E 06 1E 08 0 0 0 5 2 5 3 5 4 5 5 5 6 5 7 5 8 5 9 5 10 5 Measurement signal U V Pressure p 8 6 1 397 1E 09 sensor error Pa mbar torr 1 217 underrange overrange ...
Страница 13: ... Pirani only operation Indicated pressure gauge calibrated for air p mbar peff mbar 102 8 6 4 2 101 8 6 4 2 100 8 6 4 2 10 1 8 6 4 2 10 2 H2 He Ne Air N2 O2 CO 10 3 2 4 6 10 2 10 1 100 101 102 8 2 4 6 8 2 4 6 8 2 4 6 8 2 4 6 8 Water vapor Indication range above 10 2 mbar Xe Kr Ar CO2 Freon 12 ...
Страница 14: ...e pressure indication is linear For gases other than air the pressure can be determined by means of a simple conversion formula peff K indicated pressure 6 4 2 6 4 2 6 4 2 10 4 8 6 4 2 10 6 2 4 6 10 5 10 4 10 5 8 6 4 2 10 6 8 2 4 6 8 2 4 6 2 4 6 2 4 6 10 3 8 10 2 8 10 1 8 10 3 8 10 2 8 10 1 8 peff mbar p mbar Indication range 10 6 10 1 mbar Air N2 O2 CO Ar He ...
Страница 15: ... 4 Kr 0 5 Ar 0 8 H2 2 4 Ne 4 1 He 5 9 These conversion factors are average values A mixture of gases and vapors is often involved In this case accurate determination is only possible with a partial pressure measurement instrument e g a quadrupole mass spectrometer ...
Страница 16: ...e opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER DANGER overpressure in the vacuum system 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak and possibly damage your health Use O rings provided with an outer...
Страница 17: ...EN 61010 CF connections fulfill this requirement For gauges with a KF flange use a conductive metallic clamping ring Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare han...
Страница 18: ... in a icles from getting e a horizontal to up contaminating ap system against co with centering ring 41 rotective lid and co m the protective lid BG 5041 BE ations occur Vibr measured values any orientation To into the measurin pright position pplications and to p ontamination insta and filter is recom onnect the produc EN B 2016 07 ations at the o keep conden g chamber pre protect the allation of...
Страница 19: ...ctive lid WARNIN ARNING electric elium may cause e fects on the electr efore performing a ct out of operation it ge connection it m rily remove the ele G arcing electric arcing with ronics of the produ any tightness tests n and remove the 19 may be ad ectronics unit h detrimental uct s put the pro electronics ...
Страница 20: ...e fused 4 Ground loops differences of potential or EMC problems may affect the measurement signal For optimum signal quality please do observe the following notes Use an overall metal braided shielded cable The connector must have a metal case Connect the supply common with protective ground directly at the power Use differential measurement input signal common and supply common conducted separate...
Страница 21: ...ding to the following diagram Connect the sensor cable Electrical connection Pin 1 Supply 14 5 30 V dc Pin 2 Supply common GND Pin 3 Signal output measuring signal Pin 4 Gauge identification Pin 5 Signal common Pin 6 Status signal Pin 7 and 8 are not assigned FCC 68 8 pin ...
Страница 22: ...ion Meani HV ST off No sup off Supply no high chamb blinking green Supply pressu cathod lit solid green Cold ca off EEPRO lit solid green Over o ng 38 BG 5041 BE ng pply voltage y voltage ok h voltage in the mea er y voltage ok re in the cold catho e has not ignited athode has ignited OM error or underrange EN B 2016 07 asuring ode range cold ...
Страница 23: ...timum measuring configuration for the particular pressure range in which measurement is performed is used The Pirani measuring circuit is always on The cold cathode measuring circuit is controlled by the Pirani circuit and is activated only at pressures p 1 10 2 mbar As long as the cold cathode measuring circuit has not ignited the measuring value of the Pirani is output as measuring signal if p 5...
Страница 24: ...i is output as measuring signal Pirani Underrange is displayed for pressures p 5 10 4 mbar The identification output pin 1 indicates the Pirani only operation If the gauge is activated at a pressure p 3 10 9 mbar the gauge cannot recognize whether the cold cathode system has ignited It indicates Pirani Underrange Once flanged on permanently leave the gauge in the operating mode irrespective of the...
Страница 25: ...low as a consequence of the contami nation of the cold cathode system In case of severe contami nation instabilities can occur layers of the measuring cham ber peel off Contamination due to isolating layers can even lead to a complete failure of the discharge Underrange is displayed Contamination can to a certain extent be reduced by geometric protection e g screenings elbows against parti cles th...
Страница 26: ...aminated parts Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working i...
Страница 27: ...B 2016 0 Remove g protective W b tr 07 gauge from the va e lid When deinstalling be advantageous t ronics unit 1 acuum system and the CF flange con to temporarily rem 19 27 d install the nnection it may move the elec ...
Страница 28: ...ally by the gauge itself at pressures 1 10 5 mbar The new zero point is saved non volatile every 15 minutes Any adjustment has a negligible effect on the pres sure range between approx 10 2 mbar and 102 mbar If used under different climatic conditions through extreme tem peratures aging or contamination the characteristic curve can be offset and a manually readjustment or a maintenance may be come...
Страница 29: ...herwise e e the vacuum syst inutes e ADJ button wi out duration 5 s he pressure value asurement value o cessful Otherwise e on and operate it a nutes ith a pin max ø1 out The Pirani se tion 5 s 1000 mbar is outp output the adjustm e repeat the adju em to p 10 5 mb ith a pin and the H s 1 10 5 mbar is ou output the adjustm e repeat the adju 29 at atmospheric 1 mm and the ensor is ad put at the ment...
Страница 30: ...r any parts are contaminated Adhere to the relevant re gulations and take the necessary precautions when handling contaminated parts Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts there...
Страница 31: ...utions when handling and dis posing of cleaning agents Consider possible reactions with the product materials 10 Precondition Gauge deinstalled 6 2 1 Troubleshooting measuring chamber If the cause of the fault is suspected to be in the measuring chamber the following checks can be made with an ohmmeter Tools material required Allen wrench AF 2 Pliers for retaining ring Ohmmeter ...
Страница 32: ...ng 2 from the meas e ionization cham mination tion chamber is co tion chamber uring chamber is s ete measuring cha BG 5041 BE ket set screw 4 a ber 3 from the e 1 as well as the suring chamber 3 ber and the meas ontaminated only 33 severely contamin amber 35 EN B 2016 07 and remove the electronics ionization 3 suring chamber Replace ated Replace ...
Страница 33: ...an only e measuring cham mmend to perform mbar l s onization Cham n ng measuring cha ontamination remo g tool Accessories following measur 5 Ω Values outside of the range 00 Ω Values outside of the range be remedied by r ber 35 m a leak test leak mber and Igniti amber performed ove the ignition aid s 41 33 rements on the Possible cause Pirani filament rupture Pirani tempera ture sensor rupture Con...
Страница 34: ... th e new ignition aid i anode Spare Par ew ionization cham 3 until the mech e retaining ring 1 mmend to perform mbar l s BG 5041 BE inside walls of the for the retaining ri th urfaces must only he anode into the mounting rts 42 mber 2 into the m hanical stop is rea Spare Parts m a leak test leak EN B 2016 07 e measuring ng to a bright be worked con tool and slide it measuring ched and 42 rate ...
Страница 35: ...ng M Precondition Troubleshootin 07 slide the measuri o the electronics un ed Pins aligned stra he measuring cham socket set screw Measuring Cham n ng measuring cha ing chamber cpl nit 5 until the me aight mber 3 by mean 4 mber amber performed 35 3 clean or echanical stop s of the 31 ...
Страница 36: ...ctronic alibration value of witch on the electr slide the measuri cs unit 5 until the Pins aligned stra BG 5041 BE f the spare sensor ronics unit 5 ing chamber cpl e mechanical stop aight EN B 2016 07 r with the 3 into the p is reached ...
Страница 37: ...k rate 1 10 9 mbar l s and a function test of the gauge on the leak detector WARNING WARNING electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product Before performing any tightness tests put the pro duct out of operation and remove the electronics unit 6 3 Troubleshooting In case of an error it may be helpful to just turn off the mains supply and...
Страница 38: ...e No supply voltage Gauge contaminated Gas discharge has not ignited Pirani zero point shift Pirani defective EEPROM error Measuring chamber severely contaminated LED HV ST off lid solid green blinking green off off off lid solid green LED ST off lid solid green lid solid yellow lid solid green lid solid red blinking red lid solid green Problem No voltage at signal output Measuring signal unstable...
Страница 39: ...ld pre ferably be free of harmful substances Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination Form under www pfeiffer vacuum com Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Products not accompanied by a duly completed declarati...
Страница 40: ...and electric components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be decontaminat...
Страница 41: ...nd fine filter 4 µm DN 25 ISO KF stainless steel FPM PT 120 036 T Seal with centering ring and fine filter 20 µm DN 25 ISO KF stainless steel FPM PF 117 225 T 10 Accessories Ordering No Mounting removing tool for ignition aid PT 120 316 T Sensor cable FCC 68 3 m PT 448 450 T ...
Страница 42: ...pare parts always indicate all information on the product nameplate description and ordering number 11 1 Ignition Aid Ordering No Ignition aid set of 10 pieces BN 845 995 T 11 2 Ionization chamber Ordering No Ionization chamber stainless steel PT 120 312 T ...
Страница 43: ...ring The measuring PTR 91 PT T03 PT T03 PT T03 3 07 Chamber Cp g chamber cpl is p 148 310 DN 25 I 158 310 DN 40 I 358 310 DN 40 C pl Spare Sen pre assembled ISO KF ISO KF CF F 43 nsor Ordering No PT 120 302 T PT 120 306 T PT 120 310 T ...
Страница 44: ...44 BG 5041 BEN B 2016 07 ETL Certification RECOGNIZED COMPONENT 3103457 ETL LISTED The product PTR 91 conforms to the UL Standard UL 61010 1 is certified to the CAN CSA Standard C22 2 No 61010 1 12 ...
Страница 45: ... 65 EU FullRange Gauge PTR 91 Standards Harmonized and international national standards and specifi cations EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 3 2007 A1 2011 EMC generic emission standard EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 1 2013 EMC requirements for electrical equipment for measurement control an...
Страница 46: ...46 BG 5041 BEN B 2016 07 Notes ...
Страница 47: ...BG 5041 BEN B 2016 07 47 Notes ...
Страница 48: ... only supplier of vacuum technology that provides a complete product portfolio COMPETENCE IN THEORY AND PRACTICE Benefit from our know how and our portfolio of training opportunities We can support you with your plant layout and provide first class on site service worldwide Are you looking for a perfect vacuum solution Please contact us www pfeiffer vacuum com Pfeiffer Vacuum GmbH Headquarters Ger...
