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OPERATING INSTRUCTIONS

EN

Translation of the Original

PKR 36X 

∣

 IKR 36X

Pirani/cold cathode gauge 

∣

 Cold cathode gauge

Содержание FullRange IKR 36 Series

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original PKR 36X IKR 36X Pirani cold cathode gauge Cold cathode gauge...

Страница 2: ...pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and...

Страница 3: ...nced training with Pfeiffer Vacuum 16 2 9 Operator requirements 17 3 Transportation and storage 18 4 Product description 19 4 1 Identifying the product 19 4 2 Scope of delivery 19 4 3 Function 19 5 In...

Страница 4: ...ion 50 13 1 Ordering parts 50 13 2 Spare parts 50 13 3 Accessories 51 14 Technical data and dimensions 52 15 Appendix 56 15 1 Units of pressure 56 15 2 Gas throughputs 56 ETL Listed PKR 57 ETL Listed...

Страница 5: ...factors for the pressure range 10 hPa PKR and IKR 31 Tbl 13 Measurement PKR 41 Tbl 14 Measurement IKR 41 Tbl 15 Malfunctions PKR 44 Tbl 16 Malfunctions IKR 45 Tbl 17 Spare parts 50 Tbl 18 Measuring an...

Страница 6: ...e range 10 hPa with solely Pirani operation PKR 28 Fig 10 Pressure range from 10 to 0 1 hPa PKR 29 Fig 11 Displayed pressure IKR 30 Fig 12 Disassembling the gauge 33 Fig 13 Calibrating the PKR gauge 3...

Страница 7: ...pressure measuring and control unit TPG 366 BG 5501 Declarations of Conformity Part of this document Tbl 1 Applicable documents 1 1 2 Variants This document applies to products with the following part...

Страница 8: ...cuum connections accordingly The part number is found on the rating plate of the product Pfeiffer Vacuum reserves the right to make technical changes without prior notification The figures in this doc...

Страница 9: ...n the product This section describes all the stickers on the product along with their meaning D 35614 Asslar Mod P N S N Input PKR 360 PT T02 xxx xxxxxxxxx 14 5 30 V DC 2 W Made in Liechtenstein 2019...

Страница 10: ...1 4 Trademarks FullRange is a trademark of Pfeiffer Vacuum GmbH About this manual 10 62...

Страница 11: ...ctices not related to physical injury Instructions on avoiding property damage Notes tips or examples indicate important information on the product or on this document 2 2 Safety instructions Safety i...

Страница 12: ...arity or impermissible supply voltage will damage the gauge Always connect the supply earth Pin 5 with the earth for the supply unit Always connect the shielding Pin 6 with the earth for the supply un...

Страница 13: ...leaning agents Be aware of potential reactions with product materials NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate a...

Страница 14: ...mb and product damage and additional property damage Duty to provide information on potential dangers The product holder or user is obliged to make all operating personnel aware of dangers posed by th...

Страница 15: ...2 6 Responsibilities and warranty Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party disregards this document does not use the product for its inte...

Страница 16: ...ineering field in accordance with nationally applicable regulations Knowledge of this documentation In addition these individuals must be familiar with applicable safety regulations and laws as well a...

Страница 17: ...e product only in accordance with these operating instructions 3 Carry out all work only on the basis of the complete operating instructions and applicable docu ments 4 Comply with the application lim...

Страница 18: ...proof packaging for the product 4 Remove the existing protective cover and transport protections only immediately prior to installa tion 5 Reattach transport locks and transport protections prior to...

Страница 19: ...ems Pirani measuring system Cold cathode measuring system functioning to the principle of the inverted magnetron The Pirani measuring circuit is switched on at all times The cold cathode measuring cir...

Страница 20: ...KF connections e g O rings are not resistant to pressures 2500 hPa This could prove harmful to health due to escaping process medium Do not open any tensioning pieces when overpressure is prevalent i...

Страница 21: ...nic unit removed This will facilitate installation of the CF flange connection 8 Ensure that the button and the switch of the gauge can be easily accessed with the stylus once fitted 9 Remove the prot...

Страница 22: ...vers from flanges and connections only when necessa ry Carry out all work in a well lit area 1 2 Fig 3 Removing installing the electronic unit recommended for CF F 1 Allen head 2 WAF 2 Protective cap...

Страница 23: ...ply voltage will damage the gauge Always connect the supply earth Pin 5 with the earth for the supply unit Always connect the shielding Pin 6 with the earth for the supply unit To operate the gauge wi...

Страница 24: ...nical data Connect the supply earth directly with the protective earth for power supply pack Use a differential measuring input separate signal earth and supply earth Ensure that the potential differe...

Страница 25: ...2 gauge con nections the IKR gauge can be controlled with a Pirani gauge for example 6 1 Status display 3 4 1 2 Fig 6 Status display 1 Switch for calibration value CAL 3 LED HV ST high voltage cold c...

Страница 26: ...ration cold cath ode measuring system not ignited 11 1 k Pirani Lights up green Combined operation 9 1 k combination Tbl 9 Operating modes PKR The identification output shows the respective operating...

Страница 27: ...on PKR Validity range 1 10 9 hPa p 1000 hPa 7 5 10 10 Torr p 750 Torr 1 10 7 Pa p 1 105 Pa Formula p 10 1 667 U d U c 0 6 log10 p Measuring signal U Pressure p Constant c 1 Constant d 2 V hPa 6 8 11 3...

Страница 28: ...operating the gauge with a Pfeiffer Vacuum total pressure measuring and control unit TPG you can enter a calibration factor to adjust the displayed measured value p hPa 102 8 6 4 2 101 8 6 4 2 100 8 6...

Страница 29: ...10 4 8 6 4 2 10 6 2 4 6 10 5 10 4 Ar 10 5 8 6 4 2 10 6 8 2 4 6 8 2 4 6 2 4 6 2 4 6 10 3 8 10 2 8 10 1 8 10 3 8 10 2 8 10 1 8 peff hPa p hPa Air N2 O2 CO He Fig 10 Pressure range from 10 6 to 0 1 hPa P...

Страница 30: ...ng a simple conversion Calculation Peff C p Peff Effective pressure C Calibration factor p Displayed pressure gauge calibrated for air Gas mixture Mixtures of gases and vapors are often involved here...

Страница 31: ...it has not ignited the signal output issues solely the Pirani measured value once again display Pirani underrange for pressures p 5 10 4 hPa The identifica tion output signals solely Pirani operation...

Страница 32: ...should be afford ed for vapors which are separated in the plasma e g from the cold cathode measuring system 1 Implement geometric safety measures screening sheets bends for particles propagated in a s...

Страница 33: ...open any tensioning pieces when overpressure is prevalent in the vacuum system Use suitable tensioning pieces for overpressure Use tensioning pieces which can only be opened and closed using a tool e...

Страница 34: ...gauge 5 Recommendation Remove the electronic unit of the gauge temporarily if disassembling is only possible with the electronic unit removed This will facilitate disassembling the CF flange connectio...

Страница 35: ...ressure range 1 10 3 hPa has been cali brated by Pfeiffer Vacuum to a fixed value at the factory The HV calibration of the Pirani measuring circuit is performed automatically during operation at press...

Страница 36: ...e gauge as near as possible to the subsequent operating position 2 Allow the gauge to run for at least 10 minutes at atmospheric pressure 3 Press the ADJ button briefly with a stylus The Pirani sensor...

Страница 37: ...ecting flanges free of grease Remove protective caps and protective covers from flanges and connections only when necessa ry Carry out all work in a well lit area 2 1 3 5 4 Fig 14 Disassembling the ga...

Страница 38: ...or ultra high vacuum systems always wear clean lint free and powder free laboratory gloves Only use clean tools During assembly ensure for connecting flanges free of grease Remove protective caps and...

Страница 39: ...aid in the mounting tool 2 Ensure correct position of the ignition aid serrated end at the bottom 2 3 1 Fig 17 Inserting the ignition aid 1 Measurement chamber with anode 3 Mounting tool 2 Ignition ai...

Страница 40: ...ds and humidity sources Take special precautions if there is a risk of dripping water Do not switch on the device if fluid has penetrated into it instead contact the Pfeiffer Vacuum Service Center NOT...

Страница 41: ...Contact pin 6 Measurement chamber Performing a resistance test Prerequisite The electronic unit is removed Equipment required Ohmmeter 1 Perform the measurements at the contact pins of the measuremen...

Страница 42: ...oves Only use clean tools During assembly ensure for connecting flanges free of grease Remove protective caps and protective covers from flanges and connections only when necessa ry Carry out all work...

Страница 43: ...nic unit up to the mechanical stop 7 Ensure in this regard that the pins remain straight 8 Secure the grub screw on the side of the electronic unit 9 Perform a manual ATM and HV calibration Assembling...

Страница 44: ...al HV calibration Voltage at signal output con stantly 9 5 V sensor error Lights up red Off Pirani faulty Replace complete measurement chamber Flashes red Off EEPROM error Switch off the gauge and the...

Страница 45: ...ff EEPROM error Switch off the gauge and then switch on again after 5 seconds reset Replace gauge Signal constant with ap prox 7 2 V 5 10 4 hPa Lights up green Lights up green Measurement chamber heav...

Страница 46: ...subject to charge Pfeiffer Vacuum decontaminates products not clearly declared Free of contamination at your expense 1 Do not ship microbiological explosive or radioactively contaminated products 2 Ob...

Страница 47: ...in accordance with local regulations Dividing components After disassembly divide the components into the following categories with regard to disposal contaminated components that have contact with p...

Страница 48: ...and addresses can be found on our website in the Pfeiff er Vacuum Service section Advice on the optimum solution is available from your Pfeiffer Vacuum contact partner For quick and smooth handling of...

Страница 49: ...ontainers e Observe the applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Affix the declaration of contamination to the outside of the packag ing 7 Then send your product to your local Servic...

Страница 50: ...ment sensor 1 Circlip 3 Measurement chamber 2 Ionization chamber Description Order number Ignition aid set 10 x BN 845 995 T Mounting tool for ignition aid PT 120 316 T Ionization chamber stainless st...

Страница 51: ...d online Description Order number Measurement cable 3 m PT 448 250 T Measurement cable 6 m PT 448 251 T Measurement cable 10 m 4 PT 448 252 T Mating connector B 4707 283 MA Centering ring with protect...

Страница 52: ...pprox 5 within the range 1 10 8 up to 1 10 2 hPa Tbl 19 Measuring and pressure values IKR Parameter Value Output signal measuring signal Voltage range approx 0 V to approx 10 5 V Measuring range 1 397...

Страница 53: ...ed Tbl 20 Electrical data PKR Parameter Value Output signal measuring signal Voltage range approx 0 V to approx 10 5 V Measuring range 1 5 to 8 5 V DC Error signal 0 5 V no supply Relation voltage pre...

Страница 54: ...k potential differ ence 16 V Supply earth and signal earth arranged separately differential meas urement recommended Tbl 21 Electrical data IKR Parameter Value Internal volume approx 19 9 cm3 DN 25 IS...

Страница 55: ...ough insulation Ceramic AI2O3 glass Feedthrough ring Stainless steel 1 4435 Feedthrough anode Molybdenum Mo Feedthrough pin Nickel alloy Ni Feedthrough PKR 36x C IKR 36x C Ceramic coated Ionization ch...

Страница 56: ...00 10 1 7 5 Torr mm Hg 1 33 1 33 10 3 133 32 1 33 0 133 1 1 Pa 1 N m2 Tbl 26 Units of pressure and their conversion 15 2 Gas throughputs Unit mbar l s Pa m3 s sccm Torr l s atm cm3 s mbar l s 1 0 1 59...

Страница 57: ...3103457 ETL LISTED The products PKR 360 PKR 360 C PKR 361 and PKR 361C conform to the UL standard UL 61010 1 are certified to the CAN CSA standard CAN CSA C22 2 No 61010 1 12...

Страница 58: ...3103457 ETL LISTED The products IKR 360 IKR 360 C IKR 361 and IKR 361C conform to the UL standard UL 61010 1 are certified to the CAN CSA standard CAN CSA C22 2 No 61010 1 12...

Страница 59: ...use of certain hazardous substances 2011 65 EU Pirani cold cathode gauge PKR 360 PKR 360 C PKR 361 PKR 361 C Harmonized standards and applied national standards and specifications DIN EN 61000 6 2 20...

Страница 60: ...the use of certain hazardous substances 2011 65 EU Cold cathode gauge IKR 360 IKR 360 C IKR 361 IKR 361 C Harmonized standards and applied national standards and specifications DIN EN 61000 6 2 2006 0...

Страница 61: ...61 62...

Страница 62: ...BG5164 ed B Date 1905 P N BG5164BEN...

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