B
P
5056 B
E
N
(2010-11)
A P A S S I O N
F O R P E R F E C T I O N
EVR 116
Control Valve
Operating Instructions
Product Identification
In all communications with Pfeiffer Vacuum, please specify
the information on the product nameplate. For convenient
reference copy that information into the nameplate replica
below.
Type:
No:
F-No:
V W
Pfeiffer Vacuum, D-35614 Asslar
Validity
This document applies to products with the part number
PF I39 931.
The part number (No) can be taken from the product
nameplate.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The EVR 116 Control Valve is used together with a control
unit (e.g. Pfeiffer Vacuum RVC 300 control unit) for con-
trolling the pressure in a vacuum system, either with a
variable gas flow (up-stream contol) or with a variable con-
ductance (down-stream control).
It must not be used with liquid gases.
Functional Principle
The Control Valve with integrated motor drive electronics,
which transforms the control signal into a defined valve
position, can be controlled
•
with
analog
voltage,
•
via integrated interface or
•
via optional RS232 interface.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and en-
vironmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried
out by persons who have suitable technical training and
the necessary experience or who have been instructed by
the end-user of the product.
General Safety Instructions
•
Adhere to the applicable regulations and take the neces-
sary precautions for the process media used.
Consider possible reactions between the materials and
the process media.
•
Adhere to the applicable regulations and take the neces-
sary precautions for all work you are going to do and con-
sider the safety instructions in this document.
•
Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty be-
comes null and void if end-user or third parties
•
disregard the information in this document
•
use the product in a non-conforming manner
•
make any kind of interventions (modifications, alterations
etc.) on the product
•
use the product with accessories and options not listed in
the corresponding product documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Failures due to contamination or wear and tear, as well as
expendable parts (seals), are not covered by the warranty.
Technical Data
Connection flange
Mounting orientation
Gas flow direction
1)
DN 16 ISO-KF
any
→
"Dimensions"
Tightness
Pressure range
Flow rate
2)
With filter on inlet side
With filter on inlet and
Vacuum side
Dead volume
1x10
-9
mbar l/s
1x10
-8
mbar … 2.5 bar (absolute)
5x10
-6
… 1250 mbar l/s
5x10
-6
… 1000 mbar l/s
0.03 cm
3
Supply
Operating voltage
Power consumption
Current consump-
tion
3)
24 VDC (
±
10%)
12 VA
500 mA, 20 … 30 mA rest current
Control
RVC 300
Control voltage
→
separate document
0 … +10 VDC
(
→
"Electrical Connection")
Degree of protection
IP 40
Stroke (needle)
Closing / opening time
Integrated sensors
11.5 mm
3 / 4 s
valve open
valve closed
valve needle in movement
Ambient temperature
5 … 40 °C
Materials
Valve housing
Valve needle
Filter
Seals
Dosing sleeve
stainless steel 1.4435
stainless steel 1.4301
stainless steel 1.4404
FPM
fluorplastomer
Weight 0.75
kg
1)
The recommended mounting orientation is with the valve seat
in direction to the vacuum chamber
2)
For air with
Δ
p = 1 bar
3)
Pre-fusing 630 mAT recommended
Dimensions
[mm]
DN 16 ISO-KF
Electrical
connection
Gas flow direction
Protective lid e
Valve
seat
site
Gas flow diagram
The gas flow curve corresponds to a mean value for air with
a pressure difference of 1 bar.
1E-6
1E-5
1E-4
1E-3
1E-2
1E-1
1
10
100
1000
0
1
2
3
4
5
6
7
8
9
10
U
CONTROL
[V]
Gas flow [mbar l/s]