BP 5
0
05
BEN
(
201
1-
11
)
A P A S S I O N F O R P E R F E C T I O N
EVN 116
Dosing Valve
Operating Instructions
Страница 1: ...BP 5005 BEN 2011 11 A P A S S I O N F O R P E R F E C T I O N EVN 116 Dosing Valve Operating Instructions...
Страница 2: ...ually actuated EVN 116 Dosing valve is used for both gas dosing and shutting off a defined gas flow without changing the gas flow setting The EVN 116 must not be used in connection with liquid gases D...
Страница 3: ...BP 5005 BEN 2011 11 EVN 116 oi 3 1 valve 1 Operating Instructions German 1 Operating Instructions English 1 Safety Guide Scope of Delivery...
Страница 4: ...l Safety Instructions 6 1 4 Liability and Warranty 6 2 Technical Data 7 3 Installation 9 4 Operation 11 5 Gas Flow 13 5 1 Gas Flow Curve 13 5 2 Conversion Table 13 6 Deinstallation 14 7 Maintenance 16...
Страница 5: ...damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Skilled personnel All work described in this document may only be carried out by pers...
Страница 6: ...mmunicate the safety instructions to all other users Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this docu...
Страница 7: ...re Bakeout temperature Storage temperature 80 C 150 C 5 40 C Dead volume 0 032 cm Materials Housing needle filter Dosing sleeve Seal stainless steel fluor plastomer FPM75 Weight 400 g at the flange co...
Страница 8: ...BEN 1111 EVN 116 oi Gas flow 700 mbar l s Filter vacuum side Accessories 19 Inlet filter standard Gas flow 1000 mbar l s Filter vacuum side Accessories 19 6 2 10 Inlet filter standard Accessories Filt...
Страница 9: ...m is pressurized Use the type of clamps which are suited to overpressure Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always...
Страница 10: ...6 oi Preferred flow direction Remove the protective lids and connect the valve to the vacuum system using the small flange connections Seal with centering ring DN 16 ISO KF Clamp Protective lid Flow d...
Страница 11: ...11 11 EVN 116 oi 11 4 Operation The product is ready for operation as soon as it has been installed C DANGER DANGER hot surface Touching the hot surface 55 C can cause burns Wear protective gloves 80...
Страница 12: ...0 032 cm3 Gas dosing needle Valve seat seal Gas dosing seal Open close Dead volume 0 032 cm3 Tightness 1 10 9 mbar l s Tightness 10 6 mbar l s Vacuum system If the pressure in the dead volume is high...
Страница 13: ...00 20 30 50 70 2 3 5 7 1 10 6 1 10 5 1 10 4 1 10 3 1 10 2 1 10 1 1 100 1 101 1 102 1 103 mbar l s Gas flow for air at a pressure difference of 1 bar Digital position indication Example Digital positio...
Страница 14: ...s when handling contaminated parts Caution Caution vacuum component Dirt and damages impair the function of the vacuum component When handling vacuum components take appropriate measures to ensure cle...
Страница 15: ...BP 5005 BEN 2011 11 EVN 116 oi 15 Remove the small flange fittings and put the pro tective lids in place Seal with centering ring DN 16 ISO KF Clamp Protective lid...
Страница 16: ...ontamination or wear and tear as well as expendable parts e g seals filter are not covered by the warranty Remove the valve from the vacuum system according to section Deinstallation Remove the protec...
Страница 17: ...rclip Inlet filter Clean the filter s with alcohol DANGER DANGER cleaning agents Cleaning agents can be detrimental to health and environment Adhere to the relevant regulations and take the necessary...
Страница 18: ...d air can cause physical injuries Adhere to the relevant regulations and take the necessary precautions when handling compressed air The compressed air must meet the following specifications free of o...
Страница 19: ...pair We recommend returning the product to your local Pfeiffer Vacuum service center for repair Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if any repair work is carrie...
Страница 20: ...can be contaminated by the pro cess installing a filter at the vacuum port of the valve is strongly recommended Ordering number PT 420 462 T Inlet side Ordering number PT 420 463 T Filter vacuum side...
Страница 21: ...taminated products e g radioactive toxic caustic or biological hazard can be detrimental to health and environment Products returned to Pfeiffer Vacuum should preferably be free of harmful substances...
Страница 22: ...al and electric components operating fluids etc can be detrimental to the environment Dispose of such substances in accordance with the relevant local regulations After disassembling the product separ...
Страница 23: ...BP 5005 BEN 2011 11 EVN 116 oi 23 Notes...
Страница 24: ...l 43 1 894 17 04 office pfeiffer vacuum at Benelux Pfeiffer Vacuum GmbH Sales Service Benelux Tel 800 pfeiffer benelux pfeiffer vacuum de India Pfeiffer Vacuum India Ltd Tel 91 40 2775 0014 pfeiffer v...
