PT 053
7 BEN/B
(
1901
)
OPERATING INSTRUCTIONS
EN
Translation of the original instructions
CALIBRATION SYSTEM BASIC
for calibration of vacuum gauges
Страница 1: ...PT 0537 BEN B 1901 OPERATING INSTRUCTIONS EN Translation of the original instructions CALIBRATION SYSTEM BASIC for calibration of vacuum gauges...
Страница 2: ...n 13 4 2 Vacuum layout 13 4 3 Structure 14 4 4 Range of application 15 5 Installation 16 6 Operation 17 6 1 Handling of the calibration system 17 6 2 Requirements for a calibration 18 6 3 Preparation...
Страница 3: ...the following hazard levels and information are considered Calibration system BASIC Operating Instructions Operating instructions for vacuum gauges see product descriptions Declaration of conformity P...
Страница 4: ...with a reference gauge DAkkS DKD R 6 2 Calibration of measuring equipment for vacuum This directive determines the minimum requirements for the calibration of measuring equipment It does not replace...
Страница 5: ...etc which are not documented in the corresponding product documentations operates the product with accessories which are not documented in the correspond ing product documentations The responsibility...
Страница 6: ...r fill or operate the calibration system with cleaning agent Do not operate the calibration system with open high vacuum flange Information requirements regarding possible risks Every person who does...
Страница 7: ...The calibration system is only de energized with the power plug disconnected Switch off the master switch and disconnect the power plug before you do any work Prevent the unit from unintentional ener...
Страница 8: ...ions of the vacuum gauges before the calibration NOTICE Process stability due to constant rotation speed of the turbo pump Inconstant rotation speed of the turbo pump can lead to negative influence on...
Страница 9: ...as long as the pressure in the vacuum chamber is 1 hPa If you use pressurized venting gas maintain the allowed rate of pressure rise be cause the gas flow of the venting gas supply rises in accordanc...
Страница 10: ...s cause danger Always transport the unit with 2 persons two handed Wear safety shoes with toe protection according to EN 347 CAUTION Risk of injury through hot surfaces Vacuum pumps can become hot dur...
Страница 11: ...ssary experience or have been trained by the operator respectively Instruct technical personnel on the unit Personnel to be instructed must only work on or with the unit with supervision by ex perienc...
Страница 12: ...corresponding protective covers Store the calibration system only indoors at temperatures of between 10 C to 40 C preferably at room temperature of 20 C In rooms with humid or aggressive atmosphere o...
Страница 13: ...VN 116 Butterfly valve Mains cable Operating instructions incl turbo pumping station HiCube 80 Eco and single compo nents 4 2 Vacuum layout part of turbo pumping station HiCube 80 Eco Mod M No Ser No...
Страница 14: ...connections for vacuum gauges 8 Master switch 2 GAV EVN 116 9 Display control unit DCU 002 3 Pirani Cold cathode transmitter PKR 361 10 Power supply pack TPS 110 4 Butterfly valve 11 Backing pump MVP...
Страница 15: ...e turbo pump is additionally equipped with a venting valve which vents the turbo pump automatically in case of deactivation or a power cut off The HiPace air cooling unit 12 cools the turbo pump durin...
Страница 16: ...16 Installation 5 Installation The instructions of the operating instructions of the turbo pumping station HiCube 80 Eco are applicable...
Страница 17: ...f their measuring range limits for example Pirani gauges at ATM and VAC Diaphragm gauges at zero of scale You can easily establish the required pressure conditions for this adjustment with the cal ibr...
Страница 18: ...negligi ble measuring uncertainty Vacuum gauges at operating temperature All UUC must be at operating temperature UUC thermally stabilized min 3 hours operating time UUC not thermally stabilized min 3...
Страница 19: ...ections on the vacuum chamber closed Keep blind flanges and protect them agains dirt Extended calibration range You can connect additional reference gauges in order to achieve a higher accuracy or to...
Страница 20: ...Pa relative pressure Connect a safety valve to the vacuum chamber Use a pressure reducer Set the inlet pressure at the pressure reducer to 500 hPa relative pressure Close the gas dosing valve when nor...
Страница 21: ...n see p 20 chap 6 4 Proceed as follows to do the zero adjustment ZERO and the offset correction Close the GAV to achieve an acceptable base pressure p0 Do the zero adjustment ZERO and the offset corre...
Страница 22: ...illed see p 18 chap 6 2 The calibration system is ready for operation see p 20 chap 6 4 The zero adjustment ZERO and the offset correction have been done see p 21 chap 6 5 Proceed as follows for the d...
Страница 23: ...rfly valve completely Pump down the vacuum chamber to a pressure at least one decade lower than the lowest pressure of the intended calibration range Close the butterfly valve in order to achieve a st...
Страница 24: ...andstill 0 Hz Starting position After you have switched off the calibration system the following starting position has been reached The turbo pump is in standstill 0 Hz The vacuum chamber is vented Th...
Страница 25: ...3E 05 1 02E 04 2 76 2 00E 04 1 99E 04 2 09E 04 4 99 4 00E 04 4 01E 04 4 23E 04 5 53 7 00E 04 6 99E 04 7 33E 04 4 97 1 00E 03 1 00E 03 1 03E 03 2 52 2 00E 03 2 00E 03 2 03E 03 1 53 4 00E 03 4 00E 03 4...
Страница 26: ...1 00E 04 1 00E 03 1 00E 02 1 00E 01 1 00E 00 1 00E 05 1 00E 04 1 00E 03 1 00E 02 1 00E 01 1 00E 00 1 00E 01 1 00E 02 1 00E 03 Measured pressure hPa Reference gauge pressure hPa Reference gauge vs Mea...
Страница 27: ...mber 3 together with the attached parts including the support 4 Replace the turbo pump 2 according to the operating instructions of the HiCube 80 Eco Install the vacuum chamber 3 together with the att...
Страница 28: ...oning The instructions of the operating instructions of the turbo pumping station HiCube 80 Eco are applicable 9 Malfunctions The instructions of the operating instructions of the turbo pumping statio...
Страница 29: ...l s Leave electronic drive on the pump Close the flange openings by using the original protective covers If possible send pump or unit in the original packaging Sending of contaminated pumps or devic...
Страница 30: ...5 kPa 10 0 01 1000 10 1 7 5 Torr mm Hg 1 33 1 33 10 3 133 32 1 33 0 133 1 1 Pa 1 N m2 mbar l s Pa m3 s sccm Torr l s atm cm3 s mbar l s 1 0 1 59 2 0 75 0 987 Pa m3 s 10 1 592 7 5 9 87 sccm 1 69 10 2 1...
Страница 31: ...ange 115 V 50 60 Hz 230 V 50 60 Hz 115 V 50 60 Hz 230 V 50 60 Hz 115 V 50 60 Hz 230 V 50 60 Hz Material Chamber Stainless steel glas bead blast ed Stainless steel glas bead blasted Stainless steel gla...
Страница 32: ...ence gauges upper range values 1000 hPa 10 hPa and 0 1 hPa 0 1 1 10 100 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 1 E 01 1 E 02 1 E 03 Relative deviation Pressure hPa CMR 361 CMR 362 CMR 363 CMR 364 C...
Страница 33: ...ystem BASIC Harmonised standards and national standards and specifications which have been ap plied EN ISO 13857 2008 Safety distances EN ISO 12100 2010 Safety of machinery General principles for desi...
Страница 34: ...are the only supplier of vacuum technology that provides a complete product portfolio COMPETENCE IN THEORY AND PRACTICE Benefit from our know how and our portfolio of training opportunities We suppor...