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Declaration of conformity

We hereby declare that the product cited below satisfies all relevant provisions accord-
ing to the following

EC directives

●

Electromagnetic Compatibility 2004/108/EC

●

Low Voltage 2006/95/EEC

TC 110

Harmonised standards and national standards and specifications which have been ap-
plied:

DIN EN 61000-3-2 : 2008
DIN EN 61000-3-3 : 2006
DIN EN 61010-1 : 2010
DIN EN 61326-1 : 2006
DIN EN 62061 : 2005
Semi F47-0200
Semi S2-0706

Signatures:

Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany

(M.Bender)
Managing Director

(Dr. M. Wiemer)
Managing Director

CE/2013

Содержание wrn100

Страница 1: ...Translation of the original instructions Operating Instructions EN PT 0204 BEN N 1407 TC 110 Electronic Drive Unit ...

Страница 2: ...4 Connection diagram 9 5 Connection X3 10 5 1 Pin assignment 10 5 2 Operation via X3 connection 10 6 The Pfeiffer Vacuum parameter set 14 6 1 General 14 6 2 Parameter overview 14 6 3 Configuring the connections 17 6 4 Operation with the Pfeiffer Vacuum parameter set 19 6 5 Switching on off the pump 25 7 Pfeiffer Vacuum Protocol for RS 485 26 7 1 Telegram frame 26 7 2 Telegrams 26 7 3 Applied data ...

Страница 3: ... The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk evaluations and hazard analyses and are oriented on international certification stan dards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered DANGER Imminent danger Indicates an imminent hazardous situation that will resu...

Страница 4: ...speed derivated from frequency in Hz P 000 Parameter of the electronic drive unit with number Prohibition of an action or activity in connection with a source of danger the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan ger the di...

Страница 5: ...sary measures when installing into ambient conditions which afford other protection classes Keep leads and cables well away from hot surfaces 70 C Only separate the pump and the electronic drive unit from each other after disconnect ing the supply voltage and the complete standstill of the pump Duty to inform Each person involved in the installation or operation of the unit must read and observe t...

Страница 6: ...ues for 20 years the safety control system must be taken out of operation after 20 years and returned to the manufacturer A proof test cannot be accomplished by the user NOTICE EC conformity The manufacturer s declaration of conformity becomes invalid if the operator modifies the original product or installs additional components Following installation into a plant and before commissioning the ope...

Страница 7: ...ting with Pfeiffer Vacuum always have the information from the rating plate available Fig 1 Example for a rating plate 3 2 Range of application Pfeiffer Vacuum electronic drive units TC 110 must be installed and operated in the fol lowing ambient conditions Characteristics TC 110 Connection voltage TC 24 V DC 5 Connection panel Standard X3 Turbopump HiPace 10 60 80 300 Mod M No Ser No Oil S N2 n f...

Страница 8: ... h LED Operating display c d h PV can1 M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service pur poses 1 The connection PV can serves to service purposes exclusively X3 D sub 15 pole female socket for the connection of a remote control Casing socket on the rear side of the electronic drive unit for the connection to the turbopump ...

Страница 9: ...15 1 S2 S1 S2 S1 2 3 4 5 6 7 10 11 8 9 12 13 14 15 1 1 3 4 1 3 4 Acc A1 Acc B1 3 4 2 1 A B C 4 3 1 4 3 1 X3 Connection cable TC 110 TPS DCU RS485 TPS 110 180 and DCU 002 HPU 001 or DCU 110 180 Connection cable TC 110 TPS DCU with accessory ports RS485 TPS 110 180 and DCU 002 HPU 001 or DCU 110 180 0 10 VDC 0 100 f end R 10kΩ 90 132 185 265 VAC 2 3 4 5 6 7 10 11 8 9 12 13 14 15 1 U B PE B A C TPS 1...

Страница 10: ...nit being destroyed Cutting the plug connection X3 can lead to the destruction of the electronic drive unit when the power supply is still switched on Before pulling the connector X3 necessarily disconnect the power supply Switch off the power supply unit Pin Function Designation factory settings 1 24 V DC input Voltage supply for the electronic drive unit 2 DI Remote priority Control via interfac...

Страница 11: ...f the nominal rotation speed V Standby activated V Reset ongoing error messages when cause has been eliminated with a pulse of 500 2000 ms duration open Standby off operation at nominal rotation speed Outputs The digital outputs at the connection X3 can be loaded with a maximum of 24 V 50 mA per output All outputs listed below are configurable by the Pfeiffer Vacuum parame ter set via interface RS...

Страница 12: ...evice addresses P 797 Connecting Pfeiffer Vacuum display and control units or PC Fig 4 Optional connection possibilities for interface RS485 Use the connection cable supplied with the control panel or from the range of acces sories The connection of respectively one external operating unit is possible on the interface RS 485 A USB interface PC can be connected via the USB RS 485 converter CAUTION ...

Страница 13: ...ons according to the specification of the interface RS 485 Connect all units with RS 485 D and RS 485 D to the bus The group address of the electronic drive unit is 961 All units connected to the bus must have differing RS 485 device addresses P 797 USB RS485 converter Y Connector RS485 RS485 RS485 M12 M12 M12 M12 TC TC D D USB RS485 converter RS 485 USB PC ...

Страница 14: ...n Short description of the parameter Functions Functional description of the parameter Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum pro tocol Access method R read access W write access Unit Physical unit of the described characteristic min max Permissible limits for value input default Factory settings partially specific of the pump type Parameter can be sto...

Страница 15: ...Pumping station 16 Pump rotates 17 Pump does not rotate 7 RW 0 17 1 x 023 MotorPump Motor pump 0 off 1 on 0 RW 0 1 1 x 024 Cfg DO1 Configuration output DO1 0 Rot speed switchpoint attained 1 No error 2 Error 3 Warning 4 Error and or warning 5 Set speed attained 6 Pump on 7 Pump accelerates 8 Pump decelerates 9 always 0 10 always 1 11 Remote priority active 12 Heating 13 Backing pump 14 Sealing gas...

Страница 16: ...eed 1 Power 2 Current 3 always 0 V 4 always 10 V 7 RW 0 4 0 x 060 CtrlViaInt Control via interface 1 Remote 2 RS 485 4 PV can 8 Field bus 16 E74 255 Unlock interface selection 7 RW 1 255 1 x 061 IntSelLckd Interface selection locked 0 off 1 on 0 RW 0 1 0 x 062 Cfg DI1 Configuration input DI1 0 Deactivated 1 Enable venting 2 Heating 3 Sealing gas 4 Run up time control 5 Rotation speed setting mode ...

Страница 17: ...ErrHist2 Error code history pos 2 4 R x 362 ErrHist3 Error code history pos 3 4 R x 363 ErrHist4 Error code history pos 4 4 R x 364 ErrHist5 Error code history pos 5 4 R x 365 ErrHist6 Error code history pos 6 4 R x 366 ErrHist7 Error code history pos 7 4 R x 367 ErrHist8 Error code history pos 8 4 R x 368 ErrHist9 Error code history pos 9 4 R x 369 ErrHist10 Error code history pos 10 4 R x 397 Se...

Страница 18: ...ority active active if Remote priority is active 12 Heating Control is equal to parameter P 001 13 Backing pump Control is equal to parameter P 010 and P 025 14 Sealing gas Control is equal to parameter P 050 15 Pumping station Control is equal to parameter P 010 16 Pump rotates active if rotation speed 1 Hz 17 Pump does not rotate active if rotation speed 2 Hz Option Description 0 Rotation speed ...

Страница 19: ... s capacity for each gas type Gas mode 0 for gases with the molecular mass 39 e g argon Gas mode 1 for gases with the molecular mass 39 Gas mode 2 for helium Power characteristics according to the technical data of the turbopump Check and set up the gas mode via P 027 Option P 060 Description 1 remote Operation via connection remote 2 RS 485 Operation via connection RS 485 4 PV can For service pur...

Страница 20: ...sired value in If adjusting the set value power consumption below 100 the run up time prolongs To avoid error messages the parameter P 700 RUTimeSVal should be adjusted accord ingly Run up time The run up of the turbopump is time monitored ex factory There are various causes of prolonged run up times e g Too high gas loads Leakage in the system The set value run up time is too low Eliminate any ex...

Страница 21: ...signal generator When the pumping station is switched off signal output and status que ry are based on the rotation speed switchpoint 2 The signal output is governed by the hysteresis between the two switchpoints Fig 8 Example for the configuration rotation speed switchpoint 1 2 active P 701 P 719 Fig 9 Example for the configuration rotation speed switchpoints 1 2 active P 701 P 719 Process f t t ...

Страница 22: ...tory set in the electronic drive unit If the electronic drive unit is replaced or a different pump type is used the reference set value of the nominal rotation speed must be confirmed This procedure is part of a redundant safety system for avoiding excess rotation speeds Adjust the parameter P 777 according to the pump type Once the nominal rotation speed is attained the pump will run idle unless ...

Страница 23: ... to the determined drive power for a fore vacuum pressure of 10 hPa Reduce the fore vacuum pressure to 5 hPa Read and note the parameter P 316 Adjust the switch off threshold backing pump via parameter P 710 to the determined drive power for a fore vacuum pressure of 5 hPa Delayed switching on Switching on the turbopump and the backing pump at the same time can result in un wanted gas flows Depend...

Страница 24: ...721 If the venting rotation speed is underrun the venting valve will open for the set venting time In the event of a power failure venting will occur if the set venting rotation speed is underrun In this case the venting period depends on the residual energy delivered by the moving rotor When power is restored the venting process is interrupted No venting No venting is performed during this operat...

Страница 25: ...reset After a successfully completed self test the electronic drive unit sets the turbopump motor and all connected accessories into operation depending on their configuration When the pumping station is activated the motor of the turbopump can be switched off and on via the function P 023 Switching off Parameter P 010 0 The electronic drive unit switches off the turbopump and activates preset acc...

Страница 26: ...dividual address of the unit 001 255 Group address 9xx for all identical units no response global address 000 for all units on the bus no response Action see p 26 chap 7 2 n2 n0 Pfeiffer Vacuum parameter numbers l1 l0 Data length dn d0 dn d0 Data in data type concerned see p 27 chap 7 3 c2 c0 Checksum sum of ASCII values of cells a2 to d0 modulo 256 CR carriage return ASCII 13 a2 a1 a0 0 0 n2 n1 n...

Страница 27: ...SCII 48 52 50 49 48 48 49 48 48 54 49 49 49 49 49 49 48 50 48 13 0 4 2 1 0 0 1 0 0 6 1 1 1 1 1 1 0 2 0 C R ASCII 48 52 50 49 48 48 49 48 48 54 49 49 49 49 49 49 48 50 48 13 Data type Description Size l1 l0 Example 0 False true 06 000000 111111 1 Positive integer number 06 000000 to 999999 2 Positive fixed comma number 06 001571 equal to 15 71 4 Symbol chain 06 TC_400 7 Positive integer number 03 0...

Страница 28: ...ation if necessary Provide safety measures against interference in the high vacuum flange while the tur bopump is running LED Symbol LED status Display Meaning Green Off currentless On flashing Pumping Station OFF rotation speed 60 min 1 On invers flashing Pumping Station ON set rotation speed not at tained On constantly Pumping Station ON set rotation speed attained On blinking Pumping Station OF...

Страница 29: ...earing Cooling deficient Optimize cooling Check the ambient conditions Err143 Excess temperature operating fluid pump Cooling deficient Optimize cooling Check the ambient conditions Reset at rotation speed f 0 only Err777 Nominal rotation speed not confirmed Nominal rotation speed not confirmed af ter replacement of the electronic drive unit Confirm the nominal rotation speed via P 777 Reset at ro...

Страница 30: ...ting fluid pump Cooling deficient Optimize cooling Check the ambient conditions Wrn168 High deceleration Rate of pressure rise too high Venting rate to high Check and optimize the venting rate pump specific Error code Problem Possible cause Remedy ...

Страница 31: ... EC Low Voltage 2006 95 EEC TC 110 Harmonised standards and national standards and specifications which have been ap plied DIN EN 61000 3 2 2008 DIN EN 61000 3 3 2006 DIN EN 61010 1 2010 DIN EN 61326 1 2006 DIN EN 62061 2005 Semi F47 0200 Semi S2 0706 Signatures Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany M Bender Managing Director Dr M Wiemer Managing Director CE 2013 ...

Страница 32: ...re the only supplier of vacuum technology that provides a complete product portfolio Benefit from our know how and our portfolio of training opportunities We can support you with your plant layout and provide first class on site service worldwide Vacuum solutions from a single source Complete range of products Competence in theory and practice Pfeiffer Vacuum GmbH Headquarters Germany T 49 6441 80...

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