Parker MX80S Series, Руководство по эксплуатации продукта

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MX80S Series Product Manual
20
Parker Hannifin Corporation
EMN Automation - Parker
Irwin, Pennsylvania
Cleanroom Preparation
There is no cleanroom ‘ rating ’ for motion control products, just individual compatibility with class of clean-
rooms. The compatibility is also dependant on measurement location. A point directly below a component
may have a different particle count than at a side location. In an effort to clarify the class of cleanroom that
our products can be used in with out affecting the overall rating of the cleanroom, Parker provides a Clean-
room Class Compatibility chart for product intended for use in such environments. MX80S tables with
cleanroom preparation were tested in Parker ’ s vertical laminar flow work station which utilizes ULPA filters
to produce an environment having a cleanliness of class 10 prior to testing. Tables were tested in a variety
of orientations with sampling both below the table and at the carriage mounting surface with a particle
counter capable of measuring 0.3

m diameter and larger particles. Based on results from testing follow-
ing the 209E Federal Standard, the following chart shows the expected cleanroom compatibility of the
MX80S with Class 10 cleanroom prep. Consult factory for details on test methodology and results .
* Compatibility is defined as not affecting the cleanroom class rating with the addition of this product for classes shown.
The Class 1 rating in the table refers to class 1 levels of 0.3

and larger particles detected in Parker ’ s Class 10 chamber.
For complete class 1 compatibility, the particle count for the 0.1 and 0.2

m particles would also need to be taken into con-
sideration.
Standard Cleanroom Preparation
Stringent cleaning and handling measures
Cleanroom rated lubricant
Reduce force specification by 25% due to additional viscosity of cleanroom lubrication