401/402/403XE Series Product Manual
19
Parker Hannifin Corporation
EMN Automation
-
Parker
Irwin, Pennsylvania
Test Methodology
2.64
-3.68
6.32
Published accuracy and repeatability specifications are subject to the testing methodology. Parker
’
s methodolo-
gy provides specifications over the entire table travel regardless of start or finish position. The accuracy and
repeatability specifications are based on the peak to peak error measured by a laser interferometer and prism
located at 37.5mm above the center of the table. This type of measurement sums the X, Y, Z, roll, pitch, and
yaw errors. Temperature deviations from test condition may cause deviations in straightness, flatness, accura-
cy, and repeatability from catalog specifications. Tests are performed with the table mounted to a granite table,
unloaded at 20
o
C.
In this example, the accuracy ranges from
-
3.68 microns to 2.64 microns. This table would have its accuracy
specified as 6.32 micron since the worst case would be starting at one extreme and traveling to the other.
