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CLEANING SOLVENT FOR WET CLEANING
∗
However, the cleaning result gets worse.
Besides, it takes more time for the mask to
dry, so set the cleaning speed to 10mm/s
for Back of the second cleaning.
Optimum discharge amount of cleaning solvent for cleaning
It is optimum to discharge the 35mm
±
5mm width of cleaning solvent onto the cleaning paper for the
wet cleaning.
Adjustment method : Adjust the discharge amount with the regulator on the back of the machine
(next to the cleaning solvent container).
The increase of pressure makes the dis-
charge amount larger.
The decrease of pressure makes the dis-
charge amount smaller.
(0.147
MPa
to 0.196
MPa
)
35
mm
±
5
mm
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153C-E-TE008
193C-E-OMA00-A04-00
Содержание KXF-193C
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