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www.omega.com  

e-mail: [email protected]

User’s Guide

FMA 1400 and FMA 1500

Mass Flow Meters and Controllers

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Содержание FMA 1500

Страница 1: ...www omega com e mail info omega com User sGuide FMA 1400 and FMA 1500 Mass Flow Meters and Controllers Shop online at...

Страница 2: ...e Tel 33 0 1 61 37 29 00 FAX 33 0 1 30 57 54 27 Toll Free in France 0800 466 342 e mail sales omega fr Germany Austria Daimlerstrasse 26 D 75392 Deckenpfronn Germany Tel 49 0 7056 9398 0 FAX 49 0 7056...

Страница 3: ...INSTRUCTIONS 5 1 Preparation and Warm Up 5 2 Flow Signal Output Readings 5 3 Swamping Condition 5 4 Set Point Reference Signal FMA 1400 5 5 TTL Valve OFF Control FMA 1400 5 6 Valve Test Purge FMA 140...

Страница 4: ...Adjustment 7 4 3 Full Scale Flow Adjustment 7 4 4 25 Flow Adjustment 7 4 5 50 Flow Adjustment 7 4 6 75 Flow Adjustment 7 4 7 100 Flow Adjustment 8 TROUBLESHOOTING 8 1 Common Conditions 8 2 Troublesho...

Страница 5: ...7 is a registered trademark of DuPont Dow Elastomers Neoprene7 is a registered trademark of DuPont Omega is a registered trademark of Omega Engineering Inc VCR7 is a registered trademark of Crawford F...

Страница 6: ...e for Repair Please contact an Omega customer service representative and request a Return Authorization Number AR It is mandatory that any equipment returned for servicing be purged and neutral ized o...

Страница 7: ...d with standard 1 4 inch FMA 1400 1500 for ranges up to and above 10 L min or 3 8 inch FMA 1400 1500 for ranges above 10 L min or optional 1 8 inch inlet and outlet compression fittings which should n...

Страница 8: ...nd For Pin 3 3 0 5 VDC Flow Signal 4 15 VDC Power Supply 5 4 20 mA Flow Signal optional 6 7 VDC for Local Set Point 7 unassigned 8 TTL Valve Off Control FMA 1400 9 Control Set Point Input 0 5 VDC FMA...

Страница 9: ...emainder of the gas flows through the primary flow conduit The geometry of the primary con duit and the sensor tube are designed to ensure laminar flow in each branch According to principles of fluid...

Страница 10: ...NT 0 01 of full scale psi 0 07 bar RESPONSE TIME 300ms time constant approximately 1 second to within 2 of set flow rate for 25 to 100 of full scale flow rate GAS PRESSURE 500 psig 34 5 bars maximum o...

Страница 11: ...full scale including linearity for gas temperatures ranging from 59F F to 77F F 15F C to 25F C and pressures of 10 to 60 psia 0 7 to 4 1 bars REPEATABILITY 0 2 of full scale TEMPERATURE COEFFICIENT 0...

Страница 12: ...pressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters It is the customers sole responsibility to select the m...

Страница 13: ...IGH FLOW MASS FLOW METER CONTROLLERS Flow rates are stated for Nitrogen at STP conditions i e 70F F 21 1F C at 1 atm For other gases use the K factor as a multiplier from APPENDIX 2 8 CODE scc min N2...

Страница 14: ...PING WEIGHT FMA 1500 ranges up to 10 L min transmitter 1 71 lbs 0 78 kg 3 21 lbs 1 46 kg FMA 1500 ranges above 10 L min transmitter 2 42 lbs 1 10 kg 3 92 lbs 1 78 kg FMA 1400 ranges up to 10 L min tra...

Страница 15: ...panel of the FMA14PD Series Command Module The default calibration is performed for 0 to 5 VDC output signal If 4 20 mA out put signal is used for flow indication on the FMA 1400 the accuracy of the a...

Страница 16: ...rol FMA 1400 It may at times be desirable to set the flow and maintain that setting while being able to turn the flow control valve off and on again This can be accomplished by applying a TTL compatib...

Страница 17: ...ents and excessive RF or magnet ic interference If periodic calibrations are required they should be performed by qualified per sonnel and calibrating instruments as described in section 7 It is recom...

Страница 18: ...four socket head cap screws two 10 24 and two 6 32 at the inlet side of the meter This will release the short square block containing the inlet com pression fitting The 60 micron filter screen will n...

Страница 19: ...en may be used to closer approximate the flow characteristics of certain gases This practice is recommended when a reference gas is found with ther modynamic properties similar to the actual gas under...

Страница 20: ...fferent Restrictor Flow Element RFE Additionally a dif ferent Solenoid Valve Orifice for the FMA 1400 Mass Flow Controller see Table VI may also be required Consult Omega7 for more information 7 2 1 C...

Страница 21: ...ne and fittings M For gases other than nitrogen recheck appropriate K factor from Gas Factor Table M Temperature and or pressure correction errors See also section 8 TROUBLESHOOTING If after attemptin...

Страница 22: ...75 Flow Adjustment Increase the flow rate to 75 of full scale flow Check the flow rate indicated against the flow calibrator Adjust the setting for potentiometer R44 by using the insulated screwdriver...

Страница 23: ...counterclockwise will increase the flow through the FMA 1400 7 4 4 25 Flow Adjustment Change the set point to 1 25 VDC to control at 25 of full scale flow Check the flow rate indicated against the flo...

Страница 24: ...owing common conditions first Are all cables connected correctly Are there any leaks in the installation Is the power supply correctly selected according to requirements When several meters are used a...

Страница 25: ...ts automatically REMOVE CAUSE OF SHORT CIRCUIT apply appropriate gas pressure flush clean or disassemble to remove impediments or replace signal and power supply commons are different apply appropriat...

Страница 26: ...evel adjust appropriately re adjust valve section 7 4 return to factory for replacement check cable and connectors or replace disassemble to remove impediments or return to factory LIKELY REASON gas l...

Страница 27: ...an actual gas sccm Qr mass flow rate of a reference gas sccm Ka K factor of an actual gas Kr K factor of a reference gas 9 CALIBRATION CONVERSIONS FROM REFERENCE GASES The calibration conversion incor...

Страница 28: ...APPENDIX 1 COMPONENTS DIAGRAMS 23 FMA 1500 METERING PC BOARD ALSO INCORPORATED IN FMA 1400 FMA 1400 CONTROL PC BOARD...

Страница 29: ...CO2 Carbon Disulfide CS2 Carbon Monoxide CO Carbon Tetrachloride CCl4 Carbon Tetrafluoride Freon 14 CF4 Carbonyl Fluoride COF2 Carbonyl Sulfide COS Chlorine Cl2 Chlorine Trifluoride ClF3 Chlorodifluo...

Страница 30: ...3 CCl2FCClF2 Freon 114 C2Cl2F4 Freon 115 C2ClF5 Freon C318 C4F6 Germane GeH4 Germanium Tetrachloride GeCl4 Helium He Hexafluoroethane C2F6 Freon 116 Hexane C6H14 Hydrogen H2 Hydrogen Bromide HBr Hydro...

Страница 31: ...Freon C318 C4F6 Oxygen O2 Oxygen Difluoride OF2 Ozone Pentaborane B5H9 Pentane C5H12 Perchloryl Fluoride ClO3F Perfluoropropane C3F8 Phosgene COCl2 Phosphine PH3 Phosphorous Oxychloride POCl3 Phospho...

Страница 32: ...fluorohydrazine N2F4 Trichlorofluoromethane Freon 11 CCl3F Trichlorosilane SiHCl3 1 1 2 Trichloro 1 2 2 Trifluoroethane Freon 113 CCl2FCClF2 Triisobutyl Aluminum C4H9 AL Titanium Tetrachloride TiCl4 T...

Страница 33: ...RAWINGS FMA 1500 FOR RANGES UP TO 10 L MIN MASS FLOW METER NOTES Omega7 reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions p...

Страница 34: ...OR RANGES ABOVE 10 L MIN MASS FLOW CONTROLLER NOTES Omega7 reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact...

Страница 35: ...RANGES UP TO 10 L MIN MASS FLOW CONTROLLER NOTES Omega7 reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact O...

Страница 36: ...RANGES ABOVE 10 L MIN MASS FLOW CONTROLLER NOTES Omega7 reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact O...

Страница 37: ...NOTES 32...

Страница 38: ...NOTES 33...

Страница 39: ...shall not exceed the purchase price of the component upon which liability is based In no event shall OMEGA be liable for consequential incidental or special damages CONDITIONS Equipment sold by OMEGA...

Страница 40: ...ine Paddlewheel Systems 5 Totalizers Batch Controllers pH CONDUCTIVITY 5 pH Electrodes Testers Accessories 5 Benchtop Laboratory Meters 5 Controllers Calibrators Simulators Pumps 5 Industrial pH Condu...

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