Description
13
GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
TURBOVAC
35 LS
35 LS2
50
151, 151 C,
361, 361 C
600 C
1000 C
Air or water cooling required
Ambient temperature 30 - 40
°
C
Bakeout operations
High-vacuum pressure 10
-3
to
5·10
-2
mbar
Forevacuum pressure 5·10
-1
to
2 mbar
Bakeout at ambient temperature
< 40
°
C
Continuous operation at high-
vacuum pressure > 10
-4
mbar
Rapid-cycling operation
Bakeout at ambient temperature
< 35
°
C or
High-vacuum pressure < 10
-3
mbar and ambient temperature
< 45
°
C
Bakeout at ambient temperature
< 35
°
C o
high-vacuum pressure < 10
-3
mbar and ambient temperature
< 45
°
C
Bakeout at ambient temperature
< 35
°
C or
high-vacuum pressure < 10
-4
mbar and ambient temperature <
45
°
C
Water cooling required if any one
of these conditions prevails
Ambient temperature 40 - 45
°
C
Bakeout operations
High-vacuum pressure > 5·10
-2
mbar
Forevacuum pressure > 2 mbar
Ambient temperature 45 - 55
°
C
Bakeout at ambient temperature >
40
°
C
Bakeout at ambient temperature
> 35
°
C
High-vacuum pressure > 10
-3
mbar
Ambient temperature 45 - 55
°
C
Bakeout at ambient temperature
> 35
°
C
High-vacuum pressure > 10
-3
mbar
Ambient temperature 45 - 55
°
C
Bakeout at ambient temperature
> 35
°
C
High-vacuum pressure > 10
-4
mbar
Ambient temperature 45 - 55
°
C
No additional cooling
required if all these condi-
tions are satisfied
Ambient temperature < 30
°
C
No bakeout operations
High-vacuum pressure
< 10
-3
mbar
Forevacuum pressure
< 5·10
-1
mbar
Continuous operation at high-
vacuum pressure < 10
-4
mbar
Ambient temperature < 45
°
C
—
—
—
1.5
Operating environment and cooling
°
C
°
F
30
86
35
95
40
104
45
113
50
122
55
131
mbar
Torr
10
-4
8·10
-5
10
-3
8·10
-4
10
-2
8·10
-3
5·10
-2
4·10
-2
5·10
-1
4·10
-1
2
1.5
