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Oerlikon TURBOVAC series, Руководство по эксплуатации

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Description

12

GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum

1.4

Ordering Information

TURBOVAC

35 LS

35 LS 2

50

151

151 C

361

361 C

600 C

1000 C

High-vacuum
port

DN 40 KF

856 64

856 66

854 00

DN 40 CF

853 99

DN 63 ISO-K

854 01

800150V0010

DN 63 CF

854 02

DN 100 ISO-K

856 31

856 35

856 70

856 75

800150V0005

3)

800150V0018

4)

DN 100 CF

856 32

103 41

856 71

DN 160 ISO-K

856 72

856 77

800150V0015

855 35

1)

855 38

2)

DN 160 CF

856 73

800150V0017

854 91

1)

DN 200 CF

117 64

1)

DN 200 ISO-K

153 00

1)

6“ ANSI

894 89

1)

DN 250 ISO-K

855 36

1)

855 39

2)

Cooling water unit for
TURBOVAC 35 LS, 35 LS2, 50

854 08

1)  With forevacuum flange DN 40 KF
2)  With forevacuum flange DN 63 ISO-K
3)  Venting flange, turned by 180°
4)  Clean room packaging

Содержание TURBOVAC series

Страница 1: ...pumps with grease lubricated bearings TURBOVAC 35 LS 35 LS2 TURBOVAC 50 TURBOVAC 151 151 C TURBOVAC 361 361 C TURBOVAC 600 C TURBOVAC 1000 C and pumps modified by Oerlikon Leybold Vacuum Operating In...

Страница 2: ...acuum connection 20 3 5 Connecting the cooling 20 3 6 Connecting the purge gas and airing device 22 3 7 Connecting the TURBOTRONIK 23 4 Operation 24 4 1 Media Compatibility Purge Gases 24 4 2 Start up...

Страница 3: ...rve the following precautions could result in serious personal injury Mechanical hazards Risk of injury Avoid exposing any part of the human body to the vacuum Only handle the pump when it is vented T...

Страница 4: ...a burn hazard Shield the hot components against contact Note the symbols on the pump pointing to the hazards and in the case of a hot pump wear the required protective clothing Hazards caused by mate...

Страница 5: ...e C version pump must be operated with purge gas when handling media containing dust a fine mesh filter must be installed Observe the information on media compatibility to be found in Section 4 1 Take...

Страница 6: ...h FPM sealing ring outer ring For high vacuum port with CF flange Splinter guard For high vacuum port with KF flange Splinter guard centering ring with FPM O ring and clamping ring For high vacuum por...

Страница 7: ...ing at 10 2 mbar He mbar I s 1 0 25 0 25 Max idle compression He high vacuum 1 5 103 2 104 He interstage vacuum 70 600 Max forevacuum pressure for He mbar 1 6 Forevacuum port DN 16 KF 16 KF Recommende...

Страница 8: ...80 High vacuum port DN Pump housing Pumping speed at 10 3 mbar N2 I s 1 He I s 1 H2 I s 1 Max gas throughput in permanent operation with water cooling at 10 2 mbar N2 mbar I s 1 He mbar I s 1 H2 mbar...

Страница 9: ...mbar Max forevacuum pressure for N2 mbar Recommended forevacuum pump TRIVAC Run up time to 95 nominal speed min Forevacuum port DN Purge gas vent port DN Cooling water connection hose nozzle mm Weigh...

Страница 10: ...me to 95 nominal speed min Forevacuum port DN Purge gas vent port DN Cooling water connection hose nozzle mm Weight approx kg Max power consumption at ultimate pressure VA Max ambient temperature at o...

Страница 11: ...8_1502 12 2006 Oerlikon Leybold Vacuum A High vacuum port B Forevacuum port C Vent port D Purge gas port E Connection for water cooling F Electrical connection TURBOVAC 1000 C TURBOVAC 600 C A B F A C...

Страница 12: ...DN 100 ISO K 856 31 856 35 856 70 856 75 800150V00053 800150V00184 DN 100 CF 856 32 103 41 856 71 DN 160 ISO K 856 72 856 77 800150V0015 855 351 855 382 DN 160 CF 856 73 800150V0017 854 911 DN 200 CF...

Страница 13: ...y one of these conditions prevails Ambient temperature 40 45 C Bakeout operations High vacuum pressure 5 10 2 mbar Forevacuum pressure 2 mbar Ambient temperature 45 55 C Bakeout at ambient temperature...

Страница 14: ...nge are suitable for accepting a lifting fork see Fig 3 Take care not to damage the plugs and coolant connections during move ment The TURBOVAC is shipped in a sealed PE bag which also contains a desi...

Страница 15: ...or moving air or inert gases They are not suitable for pumping aggressive or reactive gases TURBOVAC versions identified with a C in the model number are equipped with this purge gas feature it protec...

Страница 16: ...cuum cham ber If the pump were to become blocked insufficient attachment could cause the pump to break away from its mount or allow internal pump parts to be discharged Never operate the pump in bench...

Страница 17: ...is a danger that dust could pass from the vacuum chamber into the TURBOVAC install a fine mesh filter between the vacuum chamber and the TURBOVAC The TURBOVAC is precision balanced and is generally o...

Страница 18: ...ultra high vacuum sealing washers Splinter guard A splinter guard is installed in the high vacuum flange to protect the TURBO VAC Operate the pump only with this splinter guard in place as foreign obj...

Страница 19: ...as to represent a burn hazard Shield the hot components against contact The pump running noise is below 70 dB A no noise insulating measures are required Installation 19 GA05118_1502 12 2006 Oerlikon...

Страница 20: ...vibration decoupling between the TURBOVAC and the forevacuum pump The forevacuum line must be tight Hazardous gases could escape from leaks or the gases being pumped could react with air or humidity 3...

Страница 21: ...cations Inlet pressure 3 to 7 bar absolute Cooling water requirement inlet temperature See Fig 7 Appearance Colorless clear free of oils and greases Sediments 250 mg l Particle size 150 m pH value 7 t...

Страница 22: ...0 C Either attach a power failure airing valve to the airing connection flange or a purge gas and airing valve at the purge gas connection flange Which of the two flanges is used will depend on the pr...

Страница 23: ...at the fan the flange heater the valves and their supply leads Route the conductors and cables so as to protect them from damage The connections are of the IP 40 safety classification Do not expose t...

Страница 24: ...ignition at pressures below about 100 mbar 75 Torr A hazar dous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar 75 Torr During operation the pump can rea...

Страница 25: ...wn with the forevacuum pump Then switch on the cooling and the TURBOVAC at the TURBOTRONIK Kindly refer to the TURBOTRONIK operating instructions for details Avoid impact and vibration while the pump...

Страница 26: ...reduced to such an extent that the rotor unit will not be excited by vibrations In the case of critical applications you must consult our Applications Dept first 4 5 Switching Off Switch off the TURBO...

Страница 27: ...gases from being forced through the bearings into the not yet vented motor chamber of the pump Cautious venting of the pump is possible from the high vacuum side since here the bearing forces will be...

Страница 28: ...ss During venting the flow must be of the laminar type in both the vacuum chamber and the turbomolecular pump The speed of the pressure rise during venting of the running pump will greatly influence t...

Страница 29: ...new the adsorption agent regularly refer to the operating instructions provided with the trap 5 2 Oerlikon Leybold Vacuum Service Whenever you send us in equipment indicate whether the equipment is co...

Страница 30: ...ctions 4 5 and 4 6 Take the appropriate precautionary measures prior to opening the intake or discharge connection if the pump has previously handled hazardous gases If necessary use gloves a respirat...

Страница 31: ...Section 5 2 Maintenance Troubleshooting 31 GA05118_1502 12 2006 Oerlikon Leybold Vacuum 6 Troubleshooting When the connector cable to the TURBOVAC is attached the outputs of the TURBOTRONIK frequency...

Страница 32: ...ng line or pre pump for a shorter period of time or install a sorption trap Regenerate or replace the sorption trap Possible cause Motor connection cable not attached is loose or is defective Pump has...

Страница 33: ...vironment Before beginning with any work first find out whether any parts are contamina ted Adhere to the relevant regulations and take the necessary precauti ons when handling contaminated parts Sepa...

Страница 34: ...lines flange heaters and fans and when powering the pump with the specified frequency converters the protection level prescribed in the EMC Guidelines will be attained Designation of the products Turb...

Страница 35: ...____ B Condition of the equipment No1 Yes No Contamination No1 Yes 1 Has the equipment been used1 toxic 2 Drained Product service fluid corrosive 3 All openings sealed airtight flammable 4 Purged expl...

Страница 36: ...g s B P 107 F 26501 Bourg l s Valence Cedex Phone 33 4 75 82 33 00 Fax 33 4 75 82 92 69 info vacuum vc oerlikon com Great Britain Oerlikon Leybold Vacuum UK LTD Unit 2 Silverglade Business Park Leathe...

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