Oerlikon Leybold Vacuum PHOENIX L300i, Руководство по эксплуатации

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Maintenance
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GA10218_002_A7 - 9/2015 - © Oerlikon Leybold Vacuum
4. Turn the PHOENIX L300i so that it is orientated in the same way as shown in Fig.
5. Use two flat blade screw drivers and insert these into the openings ( Fig. 41 ) and
lever the cover for the mechanical section out at the bottom.
6. In doing so, the cover should be moved somewhat to the front by the downward
motion of the screwdrivers. The cover may be lifted up by the upwards motion of
the srew drivers so that the cover is disengaged completely.
7. Then pull the cover off the mechanical section up to its stop and remove it to the
front.
8. Removing the cover for the electronics section by removing the four Phillips
screws ( Fig. 40 /2).
9. Pull the cover over the electronics section back to the rear and place it aside.
10. After completion of all maintenance work put the electronic cover back in place
and screw it tighten. The cover of the mechanical section must engage properly
in the openings at the bottom.
4.4.2 Exchanging the Filter Mats
The filter mats have been built in to filter the dust out the air which is taken in. In
order to ensure that the filter mats will not throttle the air flow and so that sufficient
cooling is possible at all times, the filter mats should be cleaned or exchanged as
soon as these have attained a dark grey colo ur.
Filter mats are used at two places within the PHOENIX L300i:
a) at the ventilation slit of the electronic cover (only partly visible from the out-
side)
b) at the fan of the turbo molecular pump (only partly visible from the outside)
To exchange the filter mats remove the covers as described above.
Filter mat a.) these filter mats are screwed to the electronic cover. Unscrew the
screws and exchange the filter mats. (Cat. no. 20099026)
Filter mat b) This filter mat is fixed before the fan with a plastic bracket. Take of the
bracket and remove the filter, put on the bracket and fix it properly. (cat.- no.
200001366)
Under certain circumstances a dirty mat may be cleaned by shaking the dust out or
Fig. 41 Opening of the mechanical hood