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Maintenance

GA10218_002_A7 - 9/2015 - © Oerlikon Leybold

4.4 Maintenance Work
4.4.1 Opening of the PHOENIX L300i

1: Openings for removal of the cover for the mechanical section

2: Four screws for loosening the cover for the electronics section.

3: Mechanical cover

4: Electronic cover

To open the PHOENIX L300i please follow the next steps:

1. Switch the PHOENIX L300i off.

2. Pull the mains cord on the PHOENIX L300i.

3. Separate the PHOENIX L300i from other vacuum components at the test port.

Fig. 40 Back view of the PHOENIX L300i

Содержание PHOENIX L300i

Страница 1: ...Leak detector Operating Manual GA10218_002_A7 PHOENIX L300i Part numbers 250000V01 250001V01 250002V01 251000V01 251001V01 251100V01 251101V01 ...

Страница 2: ...L300i DRY 17 1 3 3 Technical Data PHOENIX L300i MODUL 19 1 3 4 Dimensional Drawings 21 1 4 Ordering Information 24 1 5 Accessories 24 1 6 Default Settings 26 2 Installation 28 2 1 Placement 28 2 2 Conforming Utilisation 28 2 3 Ambient Conditions 28 2 4 Electrical Connections 28 2 4 1 Mains Power 28 2 4 2 Connection for the Controller Signal and Accessories 30 2 4 3 Vacuum Connections 33 3 Operatio...

Страница 3: ...Auto Manual 56 3 6 5 Time Axis 57 3 6 6 C ontrast 57 3 6 7 Background in standby 58 3 6 8 Lower Display Limit 58 3 7 Mode 59 3 8 Trigger Alarms 60 3 8 1 Trigger Level 1 60 3 8 2 Trigger Level 2 61 3 8 3 Trigger Level 3 61 3 8 4 Units 61 3 8 5 Volume 62 3 8 6 Alarm Delay 62 3 8 7 Audio Alarm Type 63 3 9 C alibration 64 3 10 Settings 65 3 10 1 Vacuum Settings 66 3 10 2 Filter Background 74 3 10 3 Ma...

Страница 4: ... 4 Maintenance 90 4 1 Safety Information 90 4 2 Maintenance Intervals 90 4 3 Oerlikon Leybold Vacuum Service 90 4 4 Maintenance Work 91 4 4 1 Opening of the PHOENIX L300i 91 4 4 2 Exchanging the Filter Mats 92 4 4 3 Exchanging the Oil 93 4 4 4 C leaning 93 4 4 5 Exchanging the Fuses 93 4 4 6 Exhaust Oil Filter 95 4 4 7 Turbo Molecular Pump 95 4 5 Calibrated Leak TL7 96 4 5 1 Technical Data 96 4 5 ...

Страница 5: ...nstructions It must be operated and maintained by trained personnel only Consult local state and national agencies regarding specific requirements and regulations Address any further safety operation and or maintenance ques tions to our nearest office Failure to observe the following precautions could result in serious personal injury Electrical hazards During all maintenance and connection work m...

Страница 6: ...oms the exhaust has to be put out of doors so that the oil vapor can not be breathed in Ensure a sufficient air cooling The air inlet as well the air discharge openings must never be obstructed By using the optional iPad it is recommended to pull the fix ture of the iPad into a raised position to optimize the cooling The PHOENIX L300i is designed for indoor use only Operate the PHOENIX L300i only ...

Страница 7: ...s e g 1 2 consist of the Fig no and the item No in that order We reserve the right to alter the design or any data given in these Operating Instructions The illustrations are not binding Retain the Operating instructions for further use Symbols of vacuum technology Given in the following are some important symbols which are used in this Operating Instructions Vacuum pump in general Turbo molecular...

Страница 8: ...st detectable leak rate is 1 10 7 mbar l s FINE is a measurement mode with inlet pressure 0 2 mbar The minimum detect able leak rate is 5 10 12 mbar l s Precision is a measurement mode for the PHOENIX L300i DRY only from an inlet pressure 0 01 mbar In this mode the PHOENIX L300i DRY has the highest sen sitivity the minimum detectable leak rate is 3 10 11 mbar l s Pressure in the fore vacuum betwee...

Страница 9: ...earched from the outside with a sniffer probe which is attached to the inlet port sniffer mode 1 1 Design and Function The PHOENIX L300i basically is a helium leak detector for vacuum applications i e the part under test is evacuated while the test is performed The vacuum is achieved with a pumping system that is part of the PHOENIX L300i In addition the vacuum can be generated by pumps which are ...

Страница 10: ... are accelerated into the magnetic field following a circular path the radius of which depends on the mass to charge ratio of the ions When mass 4 is selected Default setting only helium ions can pass this filter and reach the ion collector where the stream of the ions is measured as an electri Fig 2 Vacuum diagram PHOENIX L300i Pos Description 1 MS Mass Spectrometer Helium sensor 180 magnetic fie...

Страница 11: ... the gas ballast function of the fore vac uum pump Valve V7 opens and closes the internal test leak during calibration With the pressure in the test part being lower than ambient pressure sprayed helium or Hydrogen as forming gas can penetrate into the part in case of a leak age As soon as the pressure conditions allow it one of the valves to the TMP opens Now Helium can penetrate into the mass sp...

Страница 12: ...KF at the side or under the bottom of the PHOENIX L300i MODUL Pos Description 1 MS Mass Spectrometer Helium sensor 180 magnetic field mass spectrometer 2 Turbo molecular pump TMP provides high vacuum conditions in the MS 3 Pirani gauge P2 fore vacuum pressure 4 Diaphragm pump provides the fore vacuum pressure for the TMP and pumps down the parts under test 5 Inlet Port 6 Pirani gauge P1 inlet pres...

Страница 13: ...o the mass spectrometer where it is detected This measurement mode is called GROSS In this mode leak rates down to 10 8 mbar l s can be detected Since the rotary vane vacuum pump continues to evacuate the test sample via valves V2a V2b and V1 the inlet pressure p1 will continue to drop When the pres sure drops below p1 0 2 mbar the PHOENIX L300i will switch to the FINE mode i e valve V1and V2b clo...

Страница 14: ...e able to make measurements already at an inlet pressure of 1000 mbar 1 1 6 Sniffer Mode The PHOENIX L300i may simply be converted into a sniffer leak detector via the rugged sniffer line Cat No 252003 For this the KF flange of the sniffer line is connected to the inlet flange Fig 1 1 and the sniffer mode is selected through menu mode After pressing START the inlet valve V1 Fig 2 opens The sniffer...

Страница 15: ... active Max inlet pressure 15 mbar Minimum detectable Helium leak rates in vacuum mode 5 10 12 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vacuum mode 1 10 8 mbar l s in sniffer mode 1 10 7 mbar l s Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 12 decades Time constant of the leak rate signal blanked off 63 of the final value ...

Страница 16: ... Dimensions L W H in mm 495 x 456 x 314 Weight in kg 40 0 Noise level dB A 54 max Audio alarm dB A 90 Contamination level to IEC 60664 1 2 Overvoltage category to IEC 60664 1 II For use within buildings Permissible ambient temperature during operation 10 C 40 C Permissible storage temperature 10 C 60 C Maximum relative humidity 80 up to 31 C lin ear decreasing to 50 at 40 C Max permissible height ...

Страница 17: ...ressure 15 mbar Minimum detectable Helium leak rates in vacuum mode 3 10 11 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vacuum mode 1 10 8 mbar l s in sniffer mode 1 10 7 mbar l s Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 11 decades Time constant of the leak rate signal blanked off 63 of the final value 1 s Pumping speed H...

Страница 18: ...ions L W H in mm 495 x 456 x 314 Weight in kg 35 5 Noise level dB A 54 max Audio alarm dB A 90 Contamination level to IEC 60664 1 2 Overvoltage category to IEC 60664 1 II For use within buildings Permissible ambient temperature during operation 10 C 40 C Permissible storage temperature 10 C 60 C Maximum relative humidity 80 up to 31 C lin ear decreasing to 50 at 40 C Maximum permissible height abo...

Страница 19: ... Minimum detectable Helium leak rates in vacuum mode with Scroll pump 8 10 12 mbar l s with oil sealed pump 5 10 12 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vacuum mode 1 10 8 mbar l s in sniffer mode 1 10 7 mbar l s Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 12 decades Time constant of the leak rate signal blanked off 6...

Страница 20: ... mm 495 x 456 x 314 Weight in kg 35 5 Noise level dB A 54 max Audio alarm dB A 90 Contamination level to IEC 60664 1 2 Overvoltage category to IEC 60664 1 II For use within buildings Permissible ambient temperature during operation 10 C 40 C Permissible storage temperature 10 C 60 C Maximum relative humidity 80 up to 31 C lin ear decreasing to 50 at 40 C Maximum permissible height above sea level ...

Страница 21: ...A10218_002_A7 9 2015 Oerlikon Leybold 21 1 3 4 Dimensional Drawings Fig 5 Dimensions PHOENIX L300i Abmaße PHOENIX L300i Familie in mm und inch in Klammern Dimensions PHOENIX L300i family in mm and inches in brackets ...

Страница 22: ... 22 GA10218_002_A7 9 2015 Oerlikon Leybold Vacuum Fig 6 Dimensions PHOENIX L300i side view Abmessungen PHOENIX L300i Familie in mm und inch in Klammern Dimensions family in PHOENIX L300i mm and inches in brackets ...

Страница 23: ...Description GA10218_002_A7 9 2015 Oerlikon Leybold 23 Fig 7 Dimensions PHOENIX L300i MODUL Abmessungen PHOENIX L300i in mm und inch in Klammern Dimensions PHOENIX L300i in mm and inches in brackets ...

Страница 24: ...ote control set RC310C consisting of Remote control cable 4 m mounting parts Extension cable for remote control 10m 252013V01 14022 Remote control set RC310WL wireless consisting of Remote control Radio transmitter mounting parts 252014V01 Radio transmitter for remote control 252015V01 Spray gun with hose 16555 Set of connection plugs 20099024 Partial flow system PHOENIX L300i and PHOENIX L300i MO...

Страница 25: ... the selected trigger level is not exceeded The red LED is on when the PHOENIX L300i is not ready for use or the selected trigger level is exceeded The push button in the grip is for the zero function When pushing the button the helium background will be suppressed For cancelling the zero function push the button once more Options for the sniffer line Spare parts for the sniffer line Sniffer tip r...

Страница 26: ...ists of the components partial flow valve block right angle valve DN 25 KF control cable and vacuum hose with flange connections The partial flow valve block with the right angle valve has to be connected to the inlet flange of the PHOENIX L300i Connect the control cable to the Option port and the vacuum hose to the auxiliary pump The PHOENIX L300i has to be config urated as described in chapter F...

Страница 27: ...tomatic purge PHOENIX L300i DRY and PHOENIX L300i MODUL only on Pressure mbar Minimum volume 0 Beep on Maximum evacuation time 30 minutes Audio Alarm Type Trigger Alarm Max pressure limit for sniff mode 0 15 mbar Min pressure limit for sniff mode 0 05 mbar Control location local Alarm delay 30 seconds Leak rate filter auto Zero enable Vacuum ranges normal Upper display limit 1E 5 mbar l s Service ...

Страница 28: ...est sample vacuum mode or when a helium overpressure is provided in the test sample and the test sample is searched from the outside with a sniffer probe which is attached to the inlet port sniffer mode The PHOENIX L300i is to be used for leak detection only It must not be used as a pumping system esp pumping aggressive or humid gases The leak detector is not suitable for pumping liquids or gases ...

Страница 29: ...d off from the name plate beneath the mains socket Fig 9 4 at the side This voltage is fixed and can not be changed A separate fuse for each of the mains conductors has been integrated into the mains switch The mains voltage is applied to the instrument via the detachable mains cable which is supplied with the instrument A mains socket Fig 9 4 is available for this purpose at the side of the instr...

Страница 30: ...olt ages higher than 60V DC 25V AC to grounding equipment conductor or reach this threshold The contacts are numbered from bottom to top The pin assignment for contacts 8 to 16 follows the same order as for pins 5 to 7 For further information see chapter 3 5 Pin Assignment 1 24 V constantly applied power supply for the Leybold partial flow valve or sniffer line 2 GND 3 24V switched by the PHOENIX ...

Страница 31: ... V The resolution is limited to 10 mV The instrument which is connected to the recorder output e g X t chart recorder should have an input resistance of no less than 2 5 kW The measured values are available through pins 1 and 4 The ref erence potential GND is available at pins 2 and 3 The contacts are numbered from bottom to top The chart recorder outputs are electrically isolated from other plugs...

Страница 32: ...ion The remote control does not belong to the standard equipment If the remote control is connected via a cable wireless communication over REMOTE2 is excluded REMOTE2 Through this interface the PHOENIX L300i is controlled wirelessly via Bluetooth or WLAN The Bluetooth transmitter connects to the remote control RC310 WL The WLAN module provides the connection to Apple I Pad or other handheld devic...

Страница 33: ...ance see Chapter 4 4 6 When the PHOENIX L300i is running in closed rooms the exhaust has to be put out of doors using the provided adapter So the oil steams that are harmful to health are lead off With the provided connection a hose line can be connected to the exhaust of the PHOENIX L300i and lead off Vent Usually the parts under test are vented with ambient air when the test is finished If it is...

Страница 34: ...ies to connect the external fore vacuum pump to the DN 25 KF flange One on the side of the PHOENIX L300i or one in the bottom measurements see Fig 5 Fig 7 As default setting the flange on the side is chosen To change the connection proceed as follows 1 Take of the mechanical hood see chapter 4 4 1 2 Loose the flange with the connection piece on the side of the PHOENIX L300i 3 Disconnect the blind ...

Страница 35: ...fore vacuum connection DN25 KF on the side or the bottom Please connect the part to be tested to the inlet port and press START The PHOE NIX L300i starts to evacuate the part The evacuation time depends on the volume of the test part During evacuation the screen shows the inlet pressure online Once the pressure of 15 mbar 11 Torr or 1500 Pa is reached the unit switches to measurement mode The corr...

Страница 36: ...allast valve automatically to limit the loss of oil This function can be chosen automatically for the PHOENIX L300i MODUL Every time the unit changes into standby mode the purge starts automatically for 20 sec onds During this time the scroll pump will be purged by the valve V6 In case there was a large quantum of water vapor pumped with the machine please activate the gas ballast for about 20 min...

Страница 37: ...own combined with a number This number indicates the level of the current loudness ranges from 0 to 15 Refer to C hapter 3 8 Volume for information on loudness alarms and sound tracks 3 2 8 Status Line in the Display The status line at the top of the display Fig 10 and Fig 11 informs about reading from left to right Fig 10 Display Measurement mode with bargraph Symbol of display Meaning Explanatio...

Страница 38: ...de the leak rates are displayed over time Fig 11 In addition the actual leak rate and inlet pressure also are displayed digitally The time axis can be defined in the menu Please refer to Chapter 3 6 5 The intensity axis y axis is defined the same way as the bargraph Please refer to Chapter 3 6 4 3 3 First Operation Check The steps for an initial operation are described here It is explained how to ...

Страница 39: ...flange with o ring on the inlet port 5 Press the START button The inlet will be evacuated and if the inlet pressure drops below 15 mbar a measured leak rate will be displayed 6 Press the STOP button the PHOENIX L300i will go to standby If you press STOP a few seconds the inlet of the PHOENIX L300i will be vented 7 To finish the startup procedure please proceed with step 21 For calibration pro ceed...

Страница 40: ...n Fig 12 10 The test object will be evacuated 17 Start spraying Helium onto the outside of the test object The leak rate of the test object will be shown in the display 18 Press the STOP button Fig 12 12 to stop the measurement The PHOENIX L300i goes into standby mode 19 Press the STOP button Fig 12 12 again until the message STANDBY Vented appears on the display The inlet is vented now 20 Remove ...

Страница 41: ...e Chapter 3 10 1 to select the time parameters of the venting ZERO Button Pushing the ZERO button Fig 12 11 enables the zero mode see also Chapter 3 10 2 When pressing ZERO the currently measured leak rate is taken as a background signal and is subtracted from all further measurements As a result the displayed leak rate then is After pressing ZERO Fig 13 t 1 the decreasing background is fitted to ...

Страница 42: ...Button When pressing the MENU button Fig 12 13 the selecting menu is shown at the display This function is not depending on the operating mode when calibrating If the menu is opened during the current session the operator will lead to the last screen before the menu was left Pushing the MENU button again leads back to the screen of the previous working mode The software shows the last screen that ...

Страница 43: ...ange the digit please proceed as follows 1 The digit that can be changed is displayed inverted With the arrows Soft Key no 8 and Soft Key no 4 you can choose which digit you want to change 2 To change a digit to a specific number press the corresponding pair of numbers A submenu opens and the desired number can be selected The submenu closes automatically and the next digit of the total number now...

Страница 44: ...ion 44 GA10218_002_A7 9 2015 Oerlikon Leybold Vacuum In the submenu press 3 soft key no 4 Fig 16 Fig 15 Numerical entry of the trigger level sample of the digit Fig 16 Trigger level change of the first digit ...

Страница 45: ...ey 3 Define recorder output Customer defined selection for the recorder output Softkey 4 RS232 Selection for the RS232 Softkey 5 Define PLC outputs Control digital out Customer defined selection for PLC outputs Softkey 6 Define PLC inputs Control 2 Digital in Customer defined selection for PLC inputs Softkey 7 Scaling recorder outputs Selection for the scaling of the recorder output Softkey 8 PLC ...

Страница 46: ...tton at the machine are deac tivated Softkey 4 All The PHOENIX L300i is controlled via all possible controls e g PLC RS232 Local Softkey 5 Local PLC The PHOENIX L300i is controlled via the Digital In connector or and the START STOP and ZERO buttons at the control panel and remote con trol Softkey 6 Local RS232 The PHOENIX L300i is controlled via the Digital In connector or and the START STOP and Z...

Страница 47: ... e 1000 mbar comply 4V with 0 5V decade logarithmic scale Users can exchange their L200 for a PHOENIX L300i without changing pin assignment Fig 18 LR mantissa The leak rate mantissa is recorded linearly from 1 10V Fig 20 LR exponent The exponent is recorded as step function U 1 10V with steps of 0 5V per decade starting with 1V 1 10 12 mbarl s Fig 19 LR linear There will be two decades the lower d...

Страница 48: ...0 V 3 1 1 3 10 10 10 10 10 5 mbar Pa Torr 10 10 10 10 6 4 2 0 atm 0 1 2 3 4 5 6 7 8 9 10 V 12 10 8 6 10 10 10 10 mbarl s Pam s Torrl s sft yr oz yr g a 4 2 0 2 10 10 10 10 4 10 0 5 10 13 0 1 2 3 4 5 6 7 8 9 10 V 1 2 3 4 5 6 7 8 9 Mantissa 0 1 2 3 4 5 6 7 8 9 10 V 14 13 12 11 10 10 10 10 mbarl s Pam s Torrl s sft yr oz yr g a 10 9 8 7 10 10 10 10 6 10 10 5 Recorder output leak rate exponent Recorde...

Страница 49: ...can be seen under Info View internal data page 7 The following digital out signals are selectable Trigger 1 Trigger 2 and 3 analog Trigger 1 Is open in case Trigger Level 1 is exceeded or the machine is not in condition of Softkey 2 Baudrate and end sign Settings for the baudrate selectable between 1200 and 19200 as well as endsign between CR LF CR or LF Softkey 3 Data Parity Stop bits The setting...

Страница 50: ...ing is shown Gas ballast Closed when gas ballast is active Open Open all time Close Closed all time Recorder Strobe Closed in case recorder output is invalid Only used when record output is set on leak rate Pump down Open when machine is evacuating the test object Standby Open when machine is in Standby or Vent mode Vented Open when machine is in Vent mode Emission on Open when emission is on Defi...

Страница 51: ...igh When machine is in standby mode start internal calibration In case machine is measurement mode start external calibration Premise external calibration test leak has to be open and leak rate signal is stable Change from high to low External calibration approve that external test leak is closed and leak rate signal is stable High means U 13V approximately 7mA Low means U 7V The level of the logi...

Страница 52: ...L300i models The next page gives an overview of the entire menu architecture Fig 23 The overview of the menu architecture corresponds to the PHOENIX L300i differ ing menu points or setting possibilities for the PHOENIX L300i DRY and PHOENIX L300i MODUL are described in the respective menu point Softkey 2 The decade of the upper leak rate can be decreased Softkey 3 Decrease scaling of the previousl...

Страница 53: ...o the previous screen 2 View Display settings like scaling contrast sys tem background Please refer to Chapter 3 6 2 3 Mode Selection of the working modes Vacuum or Sniff Please refer to Chapter 3 7 4 Trigger Alarms Settings of units trigger levels and alarms Please refer to Chapter 3 7 5 Calibration Calibration of the PHOENIX L300i Please refer to Chapter 3 13 6 Settings Settings of internal mach...

Страница 54: ...round suppression Calculate inlet area background Leak rate filter Mass Interfaces Location of control Define recorder output RS232 Define PLC outputs Define PLC inputs Scaling recorder output PLC sample rate Miscellaneous Time Date Language Calibration request Service internal forepump Service internal exhaust oil filter Service message exhaust oil filter Parameter save load Load parameter set Mo...

Страница 55: ...ed Usually a logarithmic scale is recommended because leak rates may change easily over several decades Default setting is logarithmic with 4 decades Fig 24 Display View Menu Explanation to Fig 24 Key No Name Description 1 Back Return to the main menu 2 Scale linear logarithmic Settings for bargraph and trend mode Please refer to Chapter 3 6 3 3 Display range auto manual Manual or automatic scalin...

Страница 56: ... Linear Pressing this key switches the display to a linear scale starting at zero Softkey 3 Number of decades Pressing this key reduces the number of displayed decades The mini mum value is 2 decades Only available if log softkey 6 was chosen Softkey 6 Logarithmic The scaling will be displayed logarithmically Softkey 7 Number of decades Increase the number of displayed decades Maximum value is 9 d...

Страница 57: ...g the run up phase press the key no 3 or 7 so long until the display can be read properly again This setting is saved to the EPROM only after confirming this through the contrast menu If this setting is not confirmed the former setting will be applied after switching on the instrument on again Softkey 3 Decrease the length of the time axis The minimum value is 16 seconds Softkey 5 Help text Softke...

Страница 58: ...ur ther measured signals automatically Thus it is made sure that only the net leak rate from the part under test is measured When switched to standby Vent again a new internal background is calculated after 25 s The updated value is underlined This means that if you press START when the value is underlined the actual background signal will be subtracted If you press START when the value is not und...

Страница 59: ... to select the different working modes Fig 25 Display Mode menu Explanation to Fig 25 Key No Name Description 1 Cancel Return to the main menu without any changes of the present settings 3 Sniff The sniffer mode will be used 7 Vacuum The vacuum mode will be used 8 OK Save the settings and return to the previous menu ...

Страница 60: ...reacts as follows Display In the status line of the display the signs for Trigger 1 2 and Trigger 3 are displayed inverted if the leak rate exceeds becomes higher than the programmed value see Fig 10 Fig 26 Display Trigger Alarms Menu Explanation for Fig 26 Key No Name Description 1 Back Return to the main menu 2 Trigger level 1 Definition of Trigger level 1 Chapter 3 8 1 3 Trigger level 2 Definit...

Страница 61: ...s Trigger level 3 The value of the third trigger level can be set Please refer to Numerical entries for the description of the entry If Trigger 3 is exceeded the corresponding relay will switch This is also indicated at the display see Chapter 3 8 1 3 8 4 Units Main menu Trigger Alarms Units The preferred leak rate unit can be selected There is the choice of 4 mbar Pa Torr atm pressure units and 5...

Страница 62: ...ecessary to block an alarm for some time after pressing START This delay time of the alarm can be changed After pressing START the loudspeaker is activated as soon as the leak rate drops below trigger level 1 or after the entered alarm delay time has elapsed This setting is only active for the audio alarm types SETPOINT and TRIGGER ALARM See chapter 3 8 7 Softkey 2 Decrease the minimum loudness Th...

Страница 63: ... to 4 10 6 mbar l s Leak rate prop The frequency of the acoustic output is proportional to the reading on the bargraph display The frequency ranges from 300 Hz to 3300 Hz Please refer to Chapter 3 6 3 for the definition of the number of decades Softkey 2 Pinpoint This function is for localization of a known leak rate value Softkey 3 Leak rate prop The sound will be proportional to the leak rate si...

Страница 64: ...ulti tone signal is gen erated The tone does not vary with the leak rate 3 9 Calibration Main menu Calibration In the menu Calibration Fig 29 the selection between internal and external calibra tion can be chosen Please refer to Chapter 3 13 Calibration for a detailed description of the calibration Fig 28 Setpoint Change of the frequency above the trigger level 1 TR1 Trigger level 1 Fig 29 Display...

Страница 65: ...um system related func tions See chapter 3 10 1 3 Filter Background See Chapter 3 10 2 4 Mass Switching between Helium and Hydro gen See Chapter 3 10 3 5 Interfaces Settings for electrical communication and selection for control location See Chapter 3 5 for detailed information 6 Miscellaneous Settings like date or time See C hapter 3 10 4 7 Parameter save load Store and load sets of parameters Se...

Страница 66: ...ection of partial flow mode and forepump type Softkey 6 Sniffer factor Setting for the sniffer factor Softkey 7 Machine factor Setting for the machine factor Softkey 8 Leak rate internal test leak Setting for the internal test leak Softkey 3 Vent delay Definition of delay time until the PHOENIX L300i is vented Softkey 4 Vacuum ranges Selection of the vacuum working modes Softkey 5 Purge in measure...

Страница 67: ...just change to standby mode When the STOP button is pressed for a period of time which is longer than the delay time specified here the PHOENIX L300i will vent the inlet port Softkey 2 Automatic purge Definition of automatic purge function in standby Softkey 3 Vent delay Definition of delay time until the PHOENIX L300i is vented Softkey 4 Vacuum ranges Selection of the vacuum working modes Softkey...

Страница 68: ...ENIX L300i remains at the inlet flange after falling below 15 mbar When the pressure is increasing over 15 mbar the PHOENIX L300i switches automatically into evacuation mode The small est detectable leak rate is 1 10 8 mbarl s Softkey No 3 FINE only In this mode the PHOENIX L300i remains after falling below 0 2 mbar at the inlet flange Valve V1 will be closed When the pressure at the inlet flange ...

Страница 69: ...OSS only In this mode the PHOENIX L300i DRY remains at the inlet flange after fall ing below 15 mbar When the pressure is increasing over 15 mbar the PHOENIX L300i DRY switches automatically into evacuation mode The smallest detactable leak rate is 1 10 8 mbarl s Softkey No 3 FINE only In this mode the PHOENIX L300i DRY remains after falling below 0 1 mbar at the inlet flange Valve V1 will be clos...

Страница 70: ...ent mode and display leak rates This is recommended if it is acceptable to wait for a while until measurement mode is reached and leak rate reading at high inlet pressures are not needed With times between 0 and endless V10 is opened and the leak detector tries to reach a inlet pressure of less than 15 mbar within this time TQ When TQ has gone by V10 is closed and the PHOENIX L300i switches to mea...

Страница 71: ...ntry of the nominal pumping speed of the partial flow pump can be decreased The minimum pumping speed is 4 m3 h Softkey 3 Forepump type The PHOENIX L300i MODUL with partial flow system can be operated with a dry forepump for ex Scroll pump or a wet forepump oil sealed This key is for choosing a dry Scroll piston fore vacuum pump Softkey 5 Help text Softkey 6 The entry of the nominal pumping speed ...

Страница 72: ... for large volumes and dirty objects At TQ endless valve V10 will open when pressing start At an inlet pres sure p1 15 mbar the PHOENIX L300i switches to measurement mode and display leak rates This is recommended if it is acceptable to wait for a while until measurement mode is reached and leak rate reading at high inlet pressures are not needed With times between 0 and endless V10 is opened and ...

Страница 73: ...ctor 1 Refer to Chapter 7 3 Connect an external calibrated leak for example 2 0 10 6 mbar l s to the test chamber 4 Measure leak rate of the external test leak for example 5 0 10 8 mbar l s 5 The machine factor is the quotient of the desired value and the actual value Desired value 2 0 10 6 mbar l s 5 0 10 8 mbar l s machine factor 40 6 Set the acquired value in the menu point 7 Calibrate again in...

Страница 74: ...a background Main menu Settings Filter Background Calculate inlet area background This function calculates the background of the inlet area The PHOENIX L300i has to be in the following conditions 1 Mode vacuum 2 Mode VENTED min 25 seconds Softkey 7 Enable default The fore vacuum pump is purged constantly during the measurement mode to avoid helium accumulation This setting is the preferred setting...

Страница 75: ...o the internal offset background the offset of the inlet area will be subtracted This function for the inlet area is only possible in standby mode therefore this value has to be determined with the menu point Calculate inlet area background Softkey 7 internal only default With start the PHOENIX L300i defines the internal offset background and subtracts this value from the leak rate signal so that ...

Страница 76: ...n be changed on two subsequent pages Please refer to Numeri cal entries for the description of the entry Softkey 2 H2 2 amu Hydrogen with the mass of 2 amu will be measured Softkey 3 3 He 3 amu Isotope of helium with the mass of 3 amu will be measured Softkey 7 4He 4 amu Helium with the mass of 4 amu will be measured Default setting Softkey 2 Time Date Setting of time and date Softkey 3 Language S...

Страница 77: ...ings Miscellaneous Service interval forepump Setting for the service interval of the forepump This setting depends on the use of the PHOENIX L300i but latest after 4000 running hours or one year the oil in the pump should be controlled See also manual for the Trivac D2 5E which is included in the document folder See chapter 4 4 3 also This setting is possible for the PHOENIX L300i DRY only Softkey...

Страница 78: ... intervals to ensure the correct function of the PHOENIX L300i If the service message is activated the PHOENIX L300i reminds you of the required maintenance This setting is only possible for the PHOENIX L300i If the service messages are ignored and the exhaust is not replaced a risk for over heating the pump motor exists Softkey 3 Decrease of the service interval steps of within 500 hours The limi...

Страница 79: ...ing functions Softkey 2 to 4 The names of the current values can be saved under a free selectable name The saving of 3 different sets is possible Softkey 5 load default values The factory settings will be loaded again Softkey 6 to 8 One of three saved parameter sets can be loaded Softkey 4 Edit a file name Rename the parameter set Softkey 8 Save Save the edited parameter set Softkey 6 Upward to th...

Страница 80: ...ecked more often Contamination Protection Main menu Settings Surveillance Contamination Protection If enabled this mode will cause the PHOENIX to close all inlet valves as soon as the measured leak rate exceeds the programmed limit Once the START key is pressed the value must drop below the limit once as the function will otherwise be Softkey No 7 Pressure limits for sniff mode Definition of the u...

Страница 81: ...hanged This might be necessary if other gases than air will be pumped by the PHOENIX L300i The pressure signal from the gas dependent inlet pressure P1 will dump false signals With changing the pressure limits this performance will be adjusted Softkey No 1 Back Softkey No 3 Off Softkey No 4 Enter limit value Selection between air or Argon Softkey No 5 Help text Softkey No 6 On Softkey No 7 Off Sof...

Страница 82: ... Increase change over threshold EVAC GROSS Selectable between 3 15 mbar Softkey No 7 Increase change over threshold GROSS FINE Selectable between 0 05 0 2 mbar respectively 0 05 0 1 mbar for PHOENIX L300i DRY and PHOENIX L300i MODUL Softkey No 2 Decreasing the maximum pressure Upper limit is 0 15 mbar default Softkey No 3 Decreasing the minimum pressure Softkey No 4 Setting for Quicktest Setting f...

Страница 83: ...ings The current settings will be displayed on 5 pages e g trigger levels test leak mass date and time Softkey 3 View internal data Information on measured internal data is provided on 10 screens Softkey 4 Vacuum diagram The vacuum diagram of the PHOENIX L300i is shown Here you can see which valves are opened or closed momentarily See chapter 4 1 1 Softkey 5 View error list The list of occurred er...

Страница 84: ... Zero This setting enables respectively disables the ZERO button at the control panel With Zero at FINE the ZERO functions executes automatically as soon as the measuring range FINE is reached for the first time after START In this mode the ZERO function also can be executed manually via the ZERO button Fig 32 Display Access Control Menu Softkey 3 Zero Settings of the zero function Softkey 4 Acces...

Страница 85: ...ed in two different ways Internal calibration by means of a built in test leak or external calibration by means of an additional test leak which then is attached to the inlet port or the component under test During the calibration procedure the mass spectrometer is tuned to the maximum Softkey 3 closed ZERO button disabled Softkey 5 Help text Softkey 6 Zero at FINE When reaching the FINE mode the ...

Страница 86: ...tarted by pressing button CAL Softkey 5 via 3 dif ferent locations main menu Fig 23 standby mode Fig 12 measurement mode Fig 10 The access via standby mode or measurement mode can possibly be blocked see Chapter 3 12 2 In this case the softkey is not labeled Default Access on Once the calibration mode is activated the user must choose between an internal and an external calibration Please press th...

Страница 87: ...eak rate printed on the test leak and compare it with the leak rate at the dis play If the leak rates are not identical press Edit leak rate Soft Key no 4 and correct the value If the leak rates are okay press START Soft Key no 8 Make sure that the cor rect mass is selected Make sure that the test leak is connected and opened Fig 33 Display External Calibration Step 1 No action required Fig 34 Dis...

Страница 88: ...ich must not decrease any more There might be a small fluctuation which is okay If so please press OK Soft Key no 8 Fig 37 Display External Calibration Step 5 When the signal is stable confirm with o k Fig 38 Display External Calibration Step 6 The PHOENIX L300i shows the old and the new calculated calibration factor Fig 39 Display External Calibration Step 7 ...

Страница 89: ...em configuration or not e g because of maloperation When calibration is started via SPS or RS232 no testing for plausibility is occuring When calibrating internal it is also monitored if the newly calculated factor of cali bration is higher than 10 or lower than 0 1 In this case a warning see W81 resp W82 in Chapter 5 2 is displayed and the calibration will be interrupted 3 14 Switching Off Shutti...

Страница 90: ... is used heavily in particular in sniffer mode then this check should be performed more frequently The rotary vane pump is located on the side of the mechanical section at the bottom of the leak detector 4 3 Oerlikon Leybold Vacuum Service Whenever you send us in equipment indicate whether the equipment is contami nated or is free of substances which could pose a health hazard If it is contami nat...

Страница 91: ...al section 2 Four screws for loosening the cover for the electronics section 3 Mechanical cover 4 Electronic cover To open the PHOENIX L300i please follow the next steps 1 Switch the PHOENIX L300i off 2 Pull the mains cord on the PHOENIX L300i 3 Separate the PHOENIX L300i from other vacuum components at the test port Fig 40 Back view of the PHOENIX L300i 1 2 3 4 ...

Страница 92: ...n must engage properly in the openings at the bottom 4 4 2 Exchanging the Filter Mats The filter mats have been built in to filter the dust out the air which is taken in In order to ensure that the filter mats will not throttle the air flow and so that sufficient cooling is possible at all times the filter mats should be cleaned or exchanged as soon as these have attained a dark grey colo ur Filte...

Страница 93: ...wed closely As already stated before only Leybonol LVO Cat no L31001 must be used for the Trivac D 2 5E pump in the PHOENIX L300i After completion of all maintenance work the cover of the mechanical section must engage properly in the openings at the bottom 4 4 4 Cleaning The housing of the PHOENIX L300i is made of painted plastic parts Thus for the purpose of cleaning only such agents should be u...

Страница 94: ...re install the covers for the electronics and mechanical section in the reverse order No 1 F1 on MSV Fuse rating T 2A 24 V system voltage of the mass spectrometer supply Loosen control panel two Phillips screws Loosen the panel which holds the MSV board in place two Phillips screws Pull the MSV board the board at the back up to the top For this insert a screwdriver into the two recesses at the sid...

Страница 95: ...lter cat no 20028656 6 Screw back the plexiglas cabinet hand tight 7 Check the oil level of the rotary vane pump and fill it up when necessary see instructions for rotary vane pump 8 Finally re install the cover for the mechanical section 4 4 7 Turbo Molecular Pump For the Leybold turbo molecular pump TW 70 LS it is recommended to change the bearings after 20 000 running hours For details please r...

Страница 96: ...ect to wear and the Helium loss of the calibrated leak TL7 being less than 2 per year is negligible Nevertheless the leak rate may change over years due to external influences A factory inspection is therefore advisable once a year A test certificate if required for the Helium calibrated leak can be obtained from our Cologne Works In that case the calibrated leak should be forwarded to us and will...

Страница 97: ...y with some restrictions As long as a warning status exists the status line shows a warning triangle Errors are events which force the PHOENIX L300i to interrupt its measurement operations In this case the PHOENIX L300i closes all valves except valve 2a standby mode Error messages remain on the LC display until the message has been acknowl edged by pressing Restart key no 8 After that the PHOENIX ...

Страница 98: ...nal output 1 is too low Fuse F2 on the wiring backplane has blown E25 Lowered valve voltage too low 7V I O board is faulty MC 68 defective E26 24V for external output 2 is too low The 24 V voltage for the external output 2 RS232 is too low Fuse F2 on the I O board has blown E27 24V for external output 3 is too low The 24 V voltage for the external output 3 optional is too low Fuse F1 on the I O bo...

Страница 99: ... potential too high Suppressor potential is higher than 363V MSV board is faulty E39 Suppressor potential is too low Suppressor potential is lower than 297V MSV board is faulty E40 The anode potential exceeds its nominal value by over 10 The actual anode potential exceeds its nominal value by 10 The nominal value can be displayed in the service menu MSV is faulty MC 68 is faulty E41 The anode pote...

Страница 100: ...er having exchanged the ion source it must be possible to switch on both cathodes manually via the service menu Replace ion source MSV board is defective E48 Anode heater is faulty Signal MSAFD on MSV board is active Anode heater fuse has blown Replace fuse F2 on the MSV board E50 No communication with turbo pump converter Clock from the frequency converter has failed No communication to the frequ...

Страница 101: ...rd is defective Both cathodes are defective replace ion source W62 Flow through capillary to low In the sniffer mode the intake pressure of the sniffer line is controlled If the pressure falls below the minimum limit the flow through the capillary is too low contamination or the capillary is blocked foreign objects particles The minimum limit can be set by the menu Default value is 0 05 mbar Filte...

Страница 102: ... temperature con verter too high 75 C Maximum temperature for the converter has been exceeded Ambient temperature too high Feed cooler air to the PHOENIX L300i Fan defective Replace the fan Fore vacuum or high vacuum pressure to high reduce the inlet pres sure of the PHOENIX L300i E69 TMP error Run up time out Max time after which the pump must enter its normal operation mode has been exceeded For...

Страница 103: ... reached Test sample has got a GROSS leak and Wrong setting too short of max time of evacuation W77 Peak not in Range The signal maximum has shifted to mass range alignment limits Signal of leak rate was instable during mass adjustment Calibrate again Check the basic setting for the anode voltage through the service menu Check calibrated leak W78 Differences of signal between test leak open and cl...

Страница 104: ...ntained The leak rate of the internal calibrated leak which was entered is much too high or much too small W83 All EEPROM parameter lost Please check your settings EEPROM on back plane is empty and was initialized with default valves Enter all parameters again The EEPROM might be faulty when warning comes up again after power up W84 EEPROM parameter initial ized Please check your set tings Softwar...

Страница 105: ...lable on request Contaminated parts can be detrimental to health and environment Before begin ning any work first find out whether any parts are contaminated Adhere to the rel evant regulations and take the necessary precautions when handling contaminated parts Separate clean components according to their materials and dispose of these accordingly We offer this service Further details are availabl...

Страница 106: ...Certificates 106 GA10218_002_A7 9 2015 Oerlikon Leybold Vacuum ...

Страница 107: ...G Gas ballast connection 33 GASBALLAST 29 gross 8 I Inlet Port 33 Internal Calibration 86 L List of Errors Warnings 97 M mains socket 29 Menu 8 MENU Button 42 N Numerical Entries 43 O On Off switch 29 OPTION 29 Option 30 P Partial flow setup 69 precision 8 R RECORD 29 31 REMOTE1 29 32 REMOTE2 29 32 RS232 32 49 S SERIAL 29 32 START Button 41 STOP Button 41 T Trigger Alarms 60 Troubleshooting 97 Tur...

Страница 108: ... 308 40 60 service vacuum zh oerlikon com Spain Oerlikon Leybold Vacuum Spain S A C Huelva 7 E 08940 Cornellà de Llobregat Barcelona Sales Phone 34 93 666 43 11 Fax 34 93 666 43 70 sales vacuum ba oerlikon com Service Phone 34 93 666 46 11 Fax 34 93 685 43 70 service vacuum ba oerlikon com America USA Oerlikon Leybold Vacuum USA Inc 5700 Mellon Road USA Export PA 15632 Phone 1 724 327 5700 Fax 1 7...

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