Description
GA10218_002_A7 - 9/2015 - © Oerlikon Leybold
19
1.3.3 Technical Data PHOENIX L300i MODUL
Physical data
To get down to the minimum detected leak rate range some conditions must be
fulfilled:
PHOENIX L300i has to run at least 20 minutes
Ambient conditions must be stable (temperature, no vibration/accelerations.)
The part under test has been evacuated long enough without using the zero func-
tion (background is no longer decreasing)
ZERO must be active
Max. inlet pressure
15 mbar
Minimum detectable Helium leak rates
in vacuum mode
- with Scroll pump
< 8·10
-12
mbar l / s
- with oil sealed pump
< 5·10
-12
mbar l / s
in sniffer mode
<1·10
-7
mbar l / s
Minimum detectable Hydrogen leak rates
- in vacuum mode
< 1·10
-8
mbar l / s
- in sniffer mode
< 1·10
-7
mbar l / s
Maximum Helium leak rate which can be displayed 0.1 mbar l / s
Measurement range
12 decades
Time constant of the leak rate signal (blanked off,
63% of the final value)
< 1 s
Pumping speed (Helium) at the inlet
GROSS mode
1,0 l / s
FINE mode
> 2.5 l / s
Detectable masses
2, 3 and 4
Mass spectrometer
180° magnetic sector
field
Ion source
2 filaments;
Iridium/Yttrium-oxide
Inlet port
DN 25 KF
Run-up time (after starting)
< 2 min
Physical data
